Ideal Vacuum AnalyzaVAC Residual Gas Analyzer (RGA), 1-200 AMU, Electron Multiplier and Faraday Cup Detector, AutoZ+ Basic Software Included.

This listing is for the sale of the Ideal Vacuum AnalyzaVAC Residual Gas Analyzer with the following components:

• Ideal Vacuum AnalyzaVAC RGA
• 1-200 AMU scan range.
• Electron multiplier signal amplifier.
• Faraday cup detector.
• Built-in Pirani gauge for rough vacuum measurement.
• Built-in hot cathode ion gauge for high vacuum measurement.
• Conflat (CF) 2.75” mounting flange.

Also includes:

• 24 VDC universal power supply (120/240 VAC input) and 6' cable.
• USB to DB-9 male RS-232 serial communication cable, 1’ long.
• DB-9 male to female RS-232 serial extension cable, 25’ long.
• CF 2.75” copper gasket and bolt kit.
• Ideal Vacuum AutoZ⁺ basic version software.

The Ideal Vacuum AnalyzaVAC RGA is a compact mass spectrometer that can assist in determining the identity and concentration of residual gases inside a vacuum chamber. It can be used for leak detection, outgassing analysis, feed gas quality control in coating and etching applications, process troubleshooting, and more. The AnalyzaVAC RGA probe has a built in Pirani gauge and Bayard Alpert hot cathode gauge that protect it from operating at unsuitably high pressures, reducing system complexity and preventing costly maintenance. Each system comes complete with a quadrupole probe, control and communications unit (CCU), AutoZ⁺ Basic software for Microsoft Windows® 10, and all necessary cables for power and communication.

The AnalyzaVAC operates by ionizing the gases present at the probe tip using electrons emitted thermionically by dual field-replaceable thoriated iridium filaments. The resulting cations are separated by mass-to-charge ratio using a combination of varying radio frequencies and DC voltages applied to the quadrupole filter. The positively charged ions travel down the center of the quadrupole and are either amplified by an electron multiplier or detected directly by the faraday cup detector at the end of the probe. Each gas produces a unique spectral fingerprint which is a combination of the natural isotopic abundance of its elements and molecular fragmentation caused by the RGA's high-energy electron ionization.

The RGA is designed for continuous operation at total pressures below 1×10^-6 Torr, and optimally around 2×10^-7 Torr. Operation of the RGA at higher pressures leads to dramatically reduced ionizer, filament, and quadrupole lifetime. The built-in pressure gauges are used both internally and in AutoZ⁺ software to prevent fatal damage to the RGA (in most cases).

While the RGA probe may be mounted directly into a high vacuum chamber, it is best practice to isolate the RGA from the chamber using a length of tubing and an isolation valve. This prevents contamination or accidental damage when the chamber is vented, or when a new sample or equipment is introduced. If the RGA is used to measure gases in a rough vacuum chamber, the RGA should be kept in a small separate chamber with its own high vacuum pumping system connected to the main chamber via a leak valve. Ideal Vacuum offers RGA kits with all necessary equipment to safely measure gases at pressures up to 1000 torr.

All AnalyzaVAC probes come with a Faraday cup detector which provides repeatable, quantitative, highly linear detection down to 1.5×10^-12 Torr^*. The optional electron multiplier increases the sensitivity to a staggering 6×10^-15 Torr^* for qualitative measurements. Both the standard and an electron multiplier equipped detectors have 0.5 AMU resolution at 10% peak height (or better) when properly calibrated.

Ideal Vacuum’s non-expiring basic AutoZ⁺ software is a Windows 10 application, that can control any AnalyzaVAC RGA system from a desktop or laptop computer. AutoZ⁺ gives the operator the power to control all acquisition parameters. AutoZ⁺ provides real-time data streaming and allows users to view collected data as an analog spectrum, a mass histogram, and trends over time. To remove unwanted peaks and spectral contributions, a user can use previously collected spectra to baseline data.

Ideal Vacuum’s optional premium AutoZ⁺ software upgrade includes all the features of the basic software and adds advanced data logging, averaging, spectral fitting with access to Ideal Vacuum’s substance library, and the ability to add additional compounds to the library. Premium AutoZ⁺ uses a powerful least squares algorithm to calculate the partial pressures of common residual gases, identifies their contribution to the currently displayed spectrum, and isolates unknown peaks. Premium software must be renewed annually, or it reverts to the basic version.

Some RGA Applications:

• Leak testing
• Process monitoring
• Pump-down and bakeout monitoring
• Vacuum diagnosis
• Feed gas quality control
• Gas and contaminant identification

Please read carefully before ordering:
* The AnalyzaVAC probe is a delicate instrument. Inappropriate use, mishandling of the probe, or operating at elevated pressures for extended amounts of time can contaminate and damage it. Therefore, the probe does not carry a warranty after removal from its original packaging. For any other component, the warranty is against product defect.

The optimal total operational pressure of the RGA is 2×10^-7 Torr for most gases. Operation at higher pressures for extended lengths of time will results in premature aging of the probe, loss of gain, spectral drift, and fillament and ionizer burnout. The RGA can be used at the following pressure regions for the corresponding lengths of time:
10^-4 Torr, several hours
10^-5 Torr, several days
10^-6 Torr, several months
10^-7 Torr, several years
10^-8 Torr, indefinitely
Organic vapors should be kept at a 2x lower pressure than atmospheric gases to prevent soot contamination of the fillament and ionizer. Silicone vapors should be kept at pressures at least 10x lower than atmospheric gases to prevent glass buildup on the fillament and ionizer. Corrosive vapors are also more damaging to the RGA than normal gases. By properly managing pressure, the RGA can be used to measure these gases without incurring costly repairs.

**Measured with nitrogen gas, 5 second dwell time, 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy, and 2 mA electron emission, and calculating three standard deviations from baseline noise.