Agilent Varian VHS-400 High Vacuum Diffusion Pump, Std. Cold Cap, ISO-400K Inlet, 380V, L9767326
Agilent Varian VHS-400 Water Cooled Vacuum Diffusion Pump, ISO400K Inlet Flange, 17.72 inch OD, Maximum Pumping Speed 8000 l/s Air
Standard Cold Cap, (2) 380 VAC 2200 Watt Heaters, Agilent Varian Part NumberL9767326.

The Agilent Varian VHS-400 has been designed to fill a special need in applications where high pumping speeds are required and space limitations demand a compact pump. The VHS-400 pump is a rugged, general-purpose unit with an operating range of 1.4 x 10-3 to <5 x 10-9 Torr at 4400W. The Agilent Varian VHS-400 is ideal for applications requiring fast cycling because of its high pumping speed (maximum rated at 8000 l/s with standard cold cap) air combined with high forepressure tolerance (0.65 Torr with no-load and 0.55 Torr when at full gas load). Backstreaming rate of the unit is 1x10-3 mg/cm2/ min, without the use of any cooled cold cap.

This Agilent Varian VHS-400 Diffusion Pump Includes:
  • ISO 400K (17.72 in. OD) No bolt holes
  • ISO 63K (3.75 in. OD) No bolt holes
  • Standard Cold Cap
  • Recommended Roughing Backing Pump: 30 CFM
  • 8000 l/s Maximum Pumping Speed Air
  • 380 VAC 3 ph (4400W) with (2) 2200 Watt Heaters
  • Water Connections 1/8 in. FPT Tee
  • Designed To Be Used With Santovac 5 or IVP 704 Diffusion Pump Oil, 1000cc (1.056 Qt.) full charge
Diffusion pumps use a high-speed jet of vapor to direct gas molecules in the pump throat down into the bottom of the pump and out the outlet. The oil diffusion pump is operated with an oil that has low vapor pressure. Its purpose is to achieve higher vacuum (lower pressure) than possible by use of positive displacement pumps alone. The Agilent Varian VHS-400 can pump down to pressures of <5x10-9 Torr. Diffusion pumps cannot discharge directly into the atmosphere, so a mechanical forepump, roughing pump is typically used to maintain an outlet pressure around 1 mTorr.

These Agilent Varian Diffusion Pumps are very reliable, simple in design and operate with no noise or vibration. Diffusion pumps are still the most economical means for creating high-vacuum pressures. Diffusion pumps also tolerate operating conditions such as excess particles and reactive gases that would destroy other types of high-vacuum pumps. They can be ordered with a 3-phase 208, 240, 380, 480 VAC heater harness and with standard or extended cold cap. We stock and sell Santovac 5 diffusion pump fluids for this pump. Please see below in our “Related” section for additional accessories that may benefit your vacuum applications and maintenance needs. We offer a large variety of vacuum greases, oils, vacuum fittings, hoses, vacuum gauges, sensors/transducers, parts and accessories sold separately on this website.

These Agilent Varian VHS-400 diffusion pumps have ISO 400K no bolt inlet flange, operate on 3-phase 380 VAC, standard cold cap and has Agilent Varian part number L9767326. The Agilent Varian VHS-400 diffusion pump user's instruction manuals can be downloaded in PDF format below. These are typical stock items that often ship same day as order is placed.

ITEM DESCRIPTION PART NO.
1 Standard Cold Cap Assembly K4823301
2 Jet Assembly F0428401
3 Jet Coupling L6367301
4 Splash Baffle F0431301
5 Foreline Baffle Assembly F0435301
6 Sight Glass Repair Kit consisting of:
Sight GlassL8816001
Gasket, TeflonL9694001
O-ring, Viton, Parker No. 2-113ComI
O-ring, Viton, Parker No. 2-226ComI
L8908301
7 Thermal Switch Includes:
7a - Switch (set at 300°F – 147°C)642906025
7b - Lug648056680
7c - Wire656179100
7d - Box Insulator89867001
L8912301
8 Heater wire, 10 AWG, 42 inches (3 per pump required) X3901-68003
Heater Wiring Kit, Includes:
15 ft. wire
Nickel lug648056680
Terminal Strip Molex 39100-1512648091065
L8913301
9 Heaters (two heaters required per pump)
208 V / 2200 watt Heater Element647310140
240 V / 2200 watt Heater Element, 1Ph647310150
380 V / 2200 watt Heater Element647310160
480 V / 2200 watt Heater Element, wired open Delta, unbalanced load647310170
208 V / 2550 watt Heater Element647310145
240 V / 2550 watt Heater Element, 1Ph647310155
380 V / 2550 watt Heater Element, wired open Delta, unbalanced load647310165
480 V / 2550 watt Heater Element, wired open Delta, unbalanced load647310175
10 Heater Crush Plate (replace when either heater is replaced) K7667001
11 Heater Clamping Plate A36 Steel K4928001
Heater Clamping Plate Retrofit, Sloted R2667301
12 Heater Insulating Blanket L8914001
13 Heater Cover L8903301
14 O-Ring Kit includes:
  • 1 inlet flange O-ring, Butyl No. 2-385
  • F0430001
  • 1 foreline flange O-ring, Butyl No. 2-338
  • 660893338
  • 10 Viton fill and drain O-rings (old style), Viton No. 2-112
  • 10 Viton fill and drain O-rings (new style, Viton No. 2-113
  • 1 Sight glass O-ring, Parker No. 2-226
  • 1 PTFE gasket
  • K0377189
    15 Viton Centering ring for ISO inlet flange, 320K
    16 Centering ring for ISO foreline flange ISO-63K IC063SV
    Included with the pump
    1 inlet flange O-ring, Butyl No. 2-385F0430001
    1 Butyl foreline flange O-ring, Butyl No. 2-338660893338
    3/8 Hose 1/8 Pipe Barbed Connectors264301102
    Installation and Operation Manual-download from www.agilent.com/chem/vacuum699901023
    DC-702 diffusion pump fluid, 500 cc (2 required) 695472005
    DC-704 diffusion pump fluid, 500 cc (2 required) 695474005
    DC-705 diffusion pump fluid, 500 cc (2 required) 695475005
    Product: Agilent Varian VHS-400 High Vacuum Diffusion Pump, Std. Cold Cap, ISO-400K Inlet, 380V, L9767326
    Condition:      New
    Warranty:     As-Stated*
    Part Number: P106976
    Sale Price: $15,994.00       Regular Price: $18,175.00