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| Edwards GX100L Dry Vacuum Pump, 62 CFM 200-230V 50/60Hz, 3.75 mtorr. PN A54710958 |
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NEW Edwards GX100L Dry Vacuum Pump, 62 CFM 200-230V 50/60Hz, 3.75 mtorr. Ultimate Pressure
Edwards Part Number A54710958
The Edwards GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. GX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. GX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure GX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote. For more specs and options scroll down to AVAILABLE DOWNLOADS and download datasheet.pdf. These Edwards GX100L dry semiconductor vacuum pump are new and have Edwards part number A547-10-958 (A54710958).
| Ordering/Models for the GX Series: |
- GX100L 200 - 230V 50/60Hz A54710958
- GX100L 380 - 460V 50/60Hz A54710959
- GX100N 200 - 230V 50/60Hz A54711958
- GX100N 380 - 460V 50/60Hz A54711959
- GX600L 200 - 230V 50/60Hz A54730958
- GX600L 380 - 460V 50/60Hz A54730959
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- GX600N 200 - 230V 50/60Hz A54731958
- GX600N 380 - 460V 50/60Hz A54731959
- GX1000N 200 - 230V 50/60Hz A54781958
- GX1000N 380 - 460V 50/60Hz A54781959
- GX100TI 200 - 230V 50/60Hz A54746958
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| TECHNOLOGY: |
- Lower Utilities Costs. Typically a 40% saving can be made on utilities costs over an entire fab. Based on a 300mm fab in the US, containing 200 tools, 537 pumps 70% GX pumps, 30% iH pumps
- iGX fitted with constant flow water valve
- Designed for Energy Efficiency
- High performance motors and inverter drives
- Low operating power consumption
- Lower power standby mode using Active Utility Control (AUC)
- Nitrogen dilution can be tuned to the application requirement
- Minimizes gas usage
- Highly efficient cooling
- High conductivity materials and good design enables low water flow
- Precision ceramic bearings
- Very high load capability for reliability
- Low noise and vibration
- Ethernet Connectivity
The GX Series includes unique web serving functionality that allows viewing of key parameters through a simple Ethernet connection and browser. Any user can simply connect to the pump to view a range of information, such as:
- Operating status
- Key parameters
- Parameter setpoints
- Alert summary
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| Product: |
Edwards GX100L Dry Vacuum Pump, 62 CFM 200-230V 50/60Hz, 3.75 mtorr. PN A54710958 |
| Condition: |
New |
| Warranty: |
Edwards Warranty |
| Part Number: |
P107093 |
| Sale Price: |
$15,266.07
Regular Price: $21,808.67
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