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Condition:
  New
Part Number:
  P106975
Warranty:
  As-Stated*

Out of Stock   Agilent Varian VHS-400 High Vacuum Diffusion Pump, Std. Cold Cap, ISO-400K Inlet, 240V, L9767308 16008.29


Regular Price: $18,191.24

On Sale: $16,008.29


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Agilent Varian VHS-400 High Vacuum Diffusion Pump, Std. Cold Cap, ISO-400K Inlet, 240V, L9767308


Agilent Varian VHS-400 Water Cooled Vacuum Diffusion Pump, ISO400K Inlet Flange, 17.72 inch OD, Maximum Pumping Speed 8000 l/s Air
Standard Cold Cap, (2) 240 VAC 2200 Watt Heaters, Agilent Varian Part Number L9767308.

The Agilent Varian VHS-400 has been designed to fill a special need in applications where high pumping speeds are required and space limitations demand a compact pump. The VHS-400 pump is a rugged, general-purpose unit with an operating range of 1.4 x 10-3 to <5 x 10-9 Torr at 4400W. The Agilent Varian VHS-400 is ideal for applications requiring fast cycling because of its high pumping speed (maximum rated at 8000 l/s with standard cold cap) air combined with high forepressure tolerance (0.65 Torr with no-load and 0.55 Torr when at full gas load). Backstreaming rate of the unit is 1x10-3 mg/cm2/ min, without the use of any cooled cold cap.

This Agilent Varian VHS-400 Diffusion Pump Includes:
  • ISO 400K (17.72 in. OD) No bolt holes
  • ISO 63K (3.75 in. OD) No bolt holes
  • Standard Cold Cap
  • Recommended Roughing Backing Pump: 30 CFM
  • 8000 l/s Maximum Pumping Speed Air
  • 240 VAC 3 ph (4400W) with (2) 2200 Watt Heaters
  • Water Connections 1/8 in. FPT Tee
  • Designed To Be Used With Santovac 5 or IVP 704 Diffusion Pump Oil, 1000cc (1.056 Qt.) full charge
Diffusion pumps use a high-speed jet of vapor to direct gas molecules in the pump throat down into the bottom of the pump and out the outlet. The oil diffusion pump is operated with an oil that has low vapor pressure. Its purpose is to achieve higher vacuum (lower pressure) than possible by use of positive displacement pumps alone. The Agilent Varian VHS-400 can pump down to pressures of <5x10-9 Torr. Diffusion pumps cannot discharge directly into the atmosphere, so a mechanical forepump, roughing pump is typically used to maintain an outlet pressure around 1 mTorr.

These Agilent Varian Diffusion Pumps are very reliable, simple in design and operate with no noise or vibration. Diffusion pumps are still the most economical means for creating high-vacuum pressures. Diffusion pumps also tolerate operating conditions such as excess particles and reactive gases that would destroy other types of high-vacuum pumps. They can be ordered with a 3-phase 208, 240, 380, 480 VAC heater harness and with standard or extended cold cap. We stock and sell Santovac 5 diffusion pump fluids for this pump. Please see below in our “Related” section for additional accessories that may benefit your vacuum applications and maintenance needs. We offer a large variety of vacuum greases, oils, vacuum fittings, hoses, vacuum gauges, sensors/transducers, parts and accessories sold separately on this website.

These Agilent Varian VHS-400 diffusion pumps have ISO 400K no bolt inlet flange, operate on 3-phase 240 VAC, standard cold cap and has Agilent Varian part number L9767308. The Agilent Varian VHS-400 diffusion pump user's instruction manuals can be downloaded in PDF format below. These are typical stock items that often ship same day as order is placed.



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Specifications
Specification Value
Pumping Speed, Operating Range 4,500 l/s air, 5,625 l/s He/H₂
Maximum Pumping Speed 8,000 l/s air w/standard cold cap
Maximum Throughput 3.3 T-l/s (8.4 mbar-l/s) in operating range, 7.5 T-l/s (10.0 mbar-l/s) @ 0.01 Torr
Operating Range 1.4x10⁻³ to < 5x10⁻⁹ Torr at 4,400 W. (1.9 x 10⁻³ to < 6.5 x 10⁻⁹ mbar)
Maximum Forepressure No Load: 0.65 Torr (0.85 mbar)
Full Load: 0.55 Torr (0.72 mbar)
Recommended Backing Pump ≥ 30 cfm (51 m³/hr)
Backstreaming Rate < 1.0 x 10⁻⁴ mg/cm²/min (with standard cold cap)
Warmup Time 15 minutes
Cooldown Time 25 minutes (with quick cool coil)
Fluid Charge 1,000 cc
Electrical Requirements 3 ph, 50/60 Hz, 208/380/480 VAC
Pump Power 4,400 Watts
Cooling Water Requirements 0.40 gpm (80 l/h)
Water Connections ⅛ in. FPT Tee

VHS-400 Diffusion Pump Replacement Parts List

Description Part No. Item
Standard Cold Cap Assembly K4823301 1
Jet Assembly F0428401 2
Jet Coupling L6367301 3
Splash Baffle F0431301 4
Foreline Baffle Assembly F0435301 5
Sight Glass Repair Kit consisting of: L8908301 6
   Sight Glass L8816001 5.1
   Gasket, Teflon L9694001 5.1
   O-ring, Viton, Parker No. 2-113 CommI 5.1
   O-ring, Viton, Parker No. 2-226 CommI 5.1
Thermal Switch Includes: L8912301 7
   Switch (set at 300 °F – 147 °C) 642906025 7a
   Lug 648056680 7b
   Wire 656179100 7c
   Box Insulator 89867001 7d
Heater wire, 10 AWG, 42 inches (3 per pump required) X3901-68003 8
Heater Wiring Kit, Includes: L8913301
   15 ft. wire L8913301 5.1
   Nickel lug 648056680 5.1
   Terminal Strip Molex 39100-1512 648091065 5.1
Heaters (two heaters required per pump) 9
   208 V / 2200 watt Heater Element 647310140 5.1
   240 V / 2200 watt Heater Element, 1Ph 647310150 5.1
   380 V / 2200 watt Heater Element 647310160 5.1
480 V / 2200 watt Heater Element, wired open Delta, unbalanced load 647310170 5.1
   208 V / 2550 watt Heater Element 647310145 5.1
   240 V / 2550 watt Heater Element, 1Ph 647310155 5.1
   380 V / 2550 watt Heater Element, wired open Delta, unbalanced load 647310165 5.1
480 V / 2550 watt Heater Element, wired open Delta, unbalanced load 647310175 5.1
Heater Crush Plate (replace when either heater is replaced) K7667001 10
Heater Clamping Plate A36 Steel K4928001 11
Heater Clamping Plate Retrofit, Slotted R2667301
Heater Insulation Blanket L8914001 12
Heater Cover L8903301 13
Viton Centering ring for ISO inlet flange, 400K 15
Centering ring for ISO foreline flange ISO-63K IC063SV 16
O-Ring Kit includes: K0377189
   1 inlet flange O-ring, Butyl No. 2-385 F0430001 15
   1 foreline flange O-ring, Butyl No. 2-338 660893338 16
   10 Viton fill and drain O-rings (Old style), Viton No. 2-112 5.1
   10 Viton fill and drain O-rings (new style, Parker No. 2-113 5.1
   1 Sight glass O-ring, Parker No. 2-226 5.1
   1 PTFE gasket 5.1
Included with the pump: 5.1
   1 inlet flange O-ring, Butyl No. 2-385 F0430001 5.1
   1 Butyl foreline flange O-ring, Butyl No. 2-338 660893338 5.1
   13/8 Hose 1/8 Pipe Barbed Connectors 264301102 5.1
5.1
DC-702 diffusion pump fluid, 500 cc (2 required) 695472005
DC-704 diffusion pump fluid, 500 cc (2 required) 695474005
DC-705 diffusion pump fluid, 500 cc (2 required) 695475005
Installation and Operation Manual 699901021
PDF Logo Agilent Varian VHS-10, VHS-400 High Vacuum Diffusion Pump Manual.pdf

Ideal Vacuum offers 3D CAD models in Solidworks (SLDPRT), STP, & STEP formats. For those without CAD software a free trial 3D model viewer with measurement capabilities can be downloaded here:

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5910 Midway Park Blvd NE,
Albuquerque, NM 87109-5805

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