These small Ideal Vacuum Super-Seal pneumatic bellows 90° angle valves have CF 1-1/3" inlet and outlet ports with rotatable flanges. They are designed primarily for use in the ultra high-vacuum range (10^-10 Torr), with leak rates of 10^-11 Torr l/s (He) but can be used up to positive pressures of 60-80 psi. These valves are constructed of a 304L stainless steel valve body and mechanism, an aluminum actuator, and have copper bonnet seals. Super-Seal valves are bakeable up to 100°C (valve body only). These valves can be mounted in any orientation.

These small-sized Super-Seal valves require air to open and have a spring closure mechanism. Low volume, dry, compressed air in the range of 60-to-80 psi is needed. Because they close automatically, they are useful as safety valves, providing failure protection to preserve chamber vacuum in case of loss of power or air supply.

Air flow to open the valve is controlled by a single-acting, electrically operated solenoid. A selection of four solenoid voltage choices is offered: 12 VDC, 24 VDC, 110 VAC, and 220 VAC.

Three position indicator sensors are available for Super-Seal valves, including a mechanical reed switch and two transistor types (NPN and PNP). Each sensor has a LED which provides visual confirmation of the valve's state (whether it is open or closed). These sensors can also be used to switch or trigger auxiliary devices.

The Super-Seal family of valves includes weldable tube, KF, ISO-K, and Conflat (CF) flange options, from 3/4" OD tube (KF-16), to 10" OD tube (ISO-K 250), and many are available in right angle (90°) and in-line versions.

These valves are a great value and are extremely reliable, making them useful for applications such as semiconductor manufacturing, plasma physics research, and nuclear accelerators. They are a primary component in vacuum process automation and have a mean time to failure rate (MTTF) of more than one million cycles.

Solenoids and position indicator sensors are sold separately.

Please see below for technical specifications and download the User Manual for complete information about the Ideal Vacuum Super-Seal family of pneumatic bellows valves and accessories.