Description

This is our High Vacuum ExploraVAC TVAC vacuum test chamber system, ideal for high-vacuum processes, and optimized for stability and ease of use. It is a fully integrated, turnkey, high vacuum system featuring a large 20 Inch cube welded stainless-steel vacuum chamber, a hinged stainless steel door with viewport, and a volume of 4.6 cubic feet. The system includes a Pfeiffer HiPace 300 turbomolecular pump, an Edwards nXDS20i dry scroll vacuum pump, and an integrated micro-ion and Convectron gauge controller which provides roughing and high vacuum chamber pressure measurements. This high vacuum ExploraVAC TVAC system can reach an ultimate pressure of 1x10^-7 Torr, weighs 862 lbs., and requires single phase 208-240 VAC, 50/60 Hz, at 19 Amps.

High vacuum chambers are used for many scientific and industrial processes. Much scientific instrumentation is done under vacuum especially when electron or other charged particle beams are used. Precision vacuum coating processes, such as vacuum sputtering, physical vapor deposition (PVD), and chemical vapor deposition (CVD) are used to apply very thin optical or protective coatings to semiconductors or precision ground optical substrates. High vacuum is also necessary for precision semiconductor etching processes. High vacuum can be used to remove water or other residual vapors from extremely cold samples without deforming them, such as in freeze-drying biological samples for imaging purposes. High vacuum is necessary for testing space-ready components or devices to determine that they will not outgas when exposed to the extreme low pressures felt in outer space. See the performance graph PDF download below for all option's performance data.

ExploraVAC High Vacuum System Configuration:

20 Inch Cube Welded Stainless Steel Chamber
Stainless Steel Front Chamber Door with Viewport
Pfeiffer HiPace 300 Turbomolecular Pump
Edwards nXDS20i Dry Scroll Vacuum Pump
QTY2 LF-200 Side Ports (Allow for a variety of feedthroughs to be added from either side of the chamber)

The ExploraVAC series of TVAC thermal vacuum chamber process and test instruments create precise environments empowering the operator with complete control over internal chamber pressure and temperature. They are built with innovation in mind. They allow for prototype device exploration in vacuum during the product research and development phase and for precise process control in small batch processing. These thermal vacuum test chamber instruments are designed to allow users to quickly tailor experiments to gather product analysis and diagnostics data as the product is subjected to the extreme stress factors of vacuum and temperature.

ExploraVAC TVAC thermal vacuum test chambers are completely configurable with many available system options (see product configurator above).

ExploraVAC System Configuration Options:

Roughing Pump (dry scroll or dry multi-stage roots, various speeds)
High Vacuum (various speeds)
Full Vacuum Pressure Control
Heated and Cooled Platen
Chamber Wall Heating
Integrated Chamber Lighting
Closed-Loop Refrigerated or LN₂Cryogenic Cooling System
Automated Software Control
Remote Control Operation
Purge Ports, Chamber Shelving, and Much More

A large selection of vacuum chambers is available for ExploraVAC, including welded stainless steel chambers with (internal) cubic sizes (12, 16, 20, or 24 inch) or Ideal Vacuum Cube™ modular chambers with (internal) cubic sizes (9, 12, or 24 inch). Chambers can be configured with aluminum or stainless steel doors, with or without viewports.

The ExploraVAC TVAC system cabinet has a conveniently angled front panel control surface with colored LED pushbutton interface which controls all chamber functions. PID controllers and gauges are installed as required for user selected options. A PLC manages system functions including pump and valve sequencing for efficient pump down cycles and safety interlocks for preventing equipment damage. The front accessible, built-in NEMA style enclosure houses the electronics needed for system operation.

A spacious LF-200 side port is available for user-selected or designed accessories, such as an electronic feedthrough for device monitoring or shock testing, an infrared lamp array for radiant heating or temperature differential tests, or an ultraviolet lamp array for ionizing radiation tests. This system could be customized to obtain any desired rate of rise by adding additional vacuum pumps mounted outside the cabinet.

The back of the cabinet holds a bulkhead feedthrough panel for chamber venting, pump exhaust, and the purge gas option. A digital feedthrough back panel has multiple ports including a DB9 connector for running the system remotely from a workstation or laptop running Microsoft Windows 10 or 11 with our AutoExplor™ software.

The (non-expiring) basic version of AutoExplor (P1012102) allows a user to manually control devices while protecting the system. AutoExplor properly sequences pumps and automatically operates the correct valves for a given request. The user can program pressure and temperature setpoints, ramp rates, soak times, and venting (if the system is equipped with those hardware options). The software provides real-time graphical data streaming so the user can visualize system behavior. AutoExplor maintains an internal preventive maintenance schedule and notifies the user when system service is due. For example, it notifies when scroll pump tip-seal replacements are needed and when sensor calibration is due. This helps keep the system at peak operating performance. It also provides fault and error messages along with specific troubleshooting information in the case of a device failure so that the issue can be corrected as soon as possible.

The premium version of AutoExplor (P1012100) includes all the features of the basic software package (above) and adds automated recipe control, data logging, and log export capabilities. Complex test recipes can be created as a step-by-step process, where each step can control the on/off state, setpoints, and ramp rates of multiple devices. One or multiple end conditions for each recipe step may be set using logical operators. The premium version allows the user to quickly generate environmental TVAC test reports from recipe data log files. Logs can be reviewed to ensure targeted process parameters are achieved. The premium version also includes AutoExplor IP Client, which gives the software the ability to be used as a host that can manage multiple external network clients, and AutoExplor API (application programming interface), which allows a scientist or programmer to integrate an ExploraVac instrument into their existing software test suite without using AutoExplor’s software interface. The premium version must be renewed annually, or it reverts to the basic version.

The ExploraVAC series of TVAC pressure and temperature-controlled test chambers are a perfect solution for many product testing requirements.

Sample Applications