Trockenhalbleiter Vakuumpumpen und Zubehör
The semiconductor vacuum pump must provide clean, reliable operation in difficult atmospheres that may include corrosive gases or high particulate loads. We carry new, industry-proven DryStar, EPX, and iGX Series Edwards semiconductor pumps. We also provide service for your pump and cost-effective, rebuilt A and AA series Ebara semiconductor pumps. We also offer many older rebuilt systems like the Edwards DP Series, QDP, and L series semiconductor pumps.