MKS Instruments ROUND BODY LOPRO, Upstream Valves & Pressure Controllers , Upstream Valves & Pressure Controllers ,  PN  LPV-40-N1-C0VS

These MKS Instruments ROUND BODY LOPRO  have part number LPV-40-N1-C0VS, are new, and come with full MKS Instruments warranty. The 245 Valve is a modified version of the Grainville-Philips Series 216 all-metal, bakeable control valve. The 245 Valve is capable of controlling pressure from 10-11 to 6000 Torr, with a maximum throughput up to 2500 Torr-liters/sec (200 slm): The valve can be used with many corrosive gases that preclude the use of other valves. With the valve driver assembly removed, the valve may be bake to 450°C for UHV applications. The stepper motor used to drive the Type 245 allows response to pressure or set point changes in fractions of a second and will drive the valve from a fully closed to a fully open position in only 15 seconds. The Type 244 Controller completes the system. The 244/245 Pressure/Flow Control System is a closed-loop feedback control system for use is vacuum processes that require an all-metal, bakeable control valve, for wide range pressure or flow control. The 244/345 system, comprised of a control module and servo-controlled leak valve, is ideally suited for single-gas process such as sputtering, sputter-etching, ion source control, ion implantation, vacuum gauge calibration, etc.

More information about these MKS Instruments ROUND BODY LOPRO  can be found by downloading the pdf catalog and documents below. Simply open the pdf catalog below, run the pdf search (ctrl F) and search for the LPV-40-N1-C0VS.