Edwards Vacuum Inc EPX180LE 200V MCM 3/8QC EPX HIGH VACUUM PRIMARY Pumps, EPX High Vacuum Primary Pumps, EPX High Vacuum Primary Pumps,  PN  A41943712

These Edwards Vacuum Inc EPX180LE 200V MCM 3/8QC EPX HIGH VACUUM PRIMARY Pumps  have part number A41943712, are new, and come with full Edwards Vacuum Inc warranty. The EPX Series supports clean and light duty semiconductor processing applications such as ash/strip and implant end station applications. The EPX Series offers on-tool pumping in a very light small package and delivering exceptionally clean vacuum. Using a unique, patented, single-shaft regenerative Holweck® stage mechanism, EPX pumps are capable of evacuating from atmosphere to ultimate pressures of Torr. Offering enhanced performance in a modular package, EPX pumps can be integrated onto a process tool or mounted remotely. Integrated MicroTIM electronics also provide simple communication connections to the process tool.

More information about these Edwards Vacuum Inc EPX180LE 200V MCM 3/8QC EPX HIGH VACUUM PRIMARY Pumps  can be found by downloading the pdf catalog and documents below. Simply open the pdf catalog below, run the pdf search (ctrl F) and search for the A41943712.