Ideal Vacuum Gas Cylinder Mixing Assembly, 304L Stainless Steel Cylinder, Matheson 3530A Single Stage Regulator Cylinder Grade: DOT-3E-1800, 304L Stainless Steel The Ideal Vacuum Gas Cylinder Mixing Assembly is designed to simplify the mixture of process gasses across a variety of applications. The system, complete with a gas regulator and gas regulator purge valve assembly, uses high pressure needle valves (up to 6000 PSI) to help precisely control gas flow into the mixture cylinder. The Cylinder equipped to this system is 304L stainless steel, has a wall thickness of 2.4mm, and can be pressurized up to a recommended maximum of 1800 PSI(@ 37°C). Cylinders with internal PTFE coating or internal electopolished finishes are also available on this website Cylinder maximum pressure rating varies by temperature. DO NOT pressurize cylinders over their respective temperature limits The purge system is crucial to keeping the regulator clean while the cylinder is not in use. Corrosive gasses being mixed will eventually erode the seals of the regulator causing it to fail over time. To avoid this, the purge assembly line can be connected to an inert gas cylinder and a vacuum pump. It is recommended to evacuate and purge the regulator several times with an inert gas after using the mixing assembly with any amount of corrosives to greatly prolong the life of your regulator. Potential Applications Include: Mass Spectrometer Residual Gas Analyzer (RGA) Testing Gas-Phase Chromatography Incubator Gas Mixture Storage Semiconductor Gas Sampling Laser Spectroscopy Precursor Delivery Exoatmospheric Sample Storage Fill Gases for Chemical gas Laser General Gas Mixing and Storage Applications

Ideal Vacuum Gas Cylinder Mixing Assembly, 304L Stainless Steel Cylinder, Matheson 3530A Single Stage Regulator Cylinder Grade: DOT-3E-1800 The Ideal Vacuum Gas Cylinder Mixing Assembly is designed to simplify the mixture of process gasses across a variety of applications. The system, complete with a gas regulator and gas regulator purge valve assembly, uses high pressure needle valves (up to 6000 PSI) to help precisely control gas flow into the mixture cylinder. The Cylinder equipped to this system is 304L stainless steel, has a wall thickness of 2.4mm, and can be pressurized up to a recommended maximum of 1800 PSI(@ 37°C). Cylinders with internal PTFE coating or internal electopolished finishes are also available on this website Cylinder maximum pressure rating varies by temperature. DO NOT pressurize cylinders over their respective temperature limits The purge system is crucial to keeping the regulator clean while the cylinder is not in use. Corrosive gasses being mixed will eventually erode the seals of the regulator causing it to fail over time. To avoid this, the purge assembly line can be connected to an inert gas cylinder and a vacuum pump. It is recommended to evacuate and purge the regulator several times with an inert gas after using the mixing assembly with any amount of corrosives to greatly prolong the life of your regulator. Potential Applications Include: Mass Spectrometer Residual Gas Analyzer (RGA) Testing Gas-Phase Chromatography Incubator Gas Mixture Storage Semiconductor Gas Sampling Laser Spectroscopy Precursor Delivery Exoatmospheric Sample Storage Fill Gases for Chemical gas Laser General Gas Mixing and Storage Applications

Atomic Layer Deposition (ALD) Liquid Precursor Vapor Delivery Cylinder System Cylinder Volume: 150cm3 Cylinder Grade: DOT-3E-1800 The controlled delivery of gas-phase vapor from a liquid precursor is needed in the processes of Chemical Vapor Deposition (CVD), Metalorganic Chemical Vapor Deposition (MOCVD), and Atomic Layer Deposition (ALD). These liquid vapor gas delivery cylinders contain an integrated bubbler to help contain the precursor vapor in a flow of buffer gas. These vapor delivery cylinders are made of chemical resistant 316 stainless steel with ¼ turn ball valves at the inlet and exhaust. The cylinder is rated to withstand pressure up to 1800 PSI (@ 37°C). Cylinder maximum pressure rating varies by temperature. DO NOT pressurize cylinders over their respective temperature limits The flow direction is printed on each valve, when buffer gas is flowed in the correct direction towards the deposition process, bubbles are formed at the bottom of the cylinder which rise through the precursor liquid. This allows for a constant steady flow of dilute precursor vapor in the buffer gas, which is typically helium, neon, or argon. These liquid precursor vapor delivery gas cylinders can be heater or cold to control the vapor pressure and concentration of the precursor. This allows for an accurate flow concentration to be generated. The inlet and exit valves are ¼ inch Swagelok® fitting ball valves, which are not rated for pyrophoric liquids. For ALD application with highly flammable pyrophoric liquids our delivery cylinders are upgraded with diaphragm valves for improved safety, becoming applicable with pyrophoric liquids, such as, trimethyl aluminum (TMA), Triethyl Aluminum (TEA), diethyl zinc (DEZn), and trimethyl gallium (TMGa). Swagelok-TM Swagelok Company