MKS Instruments MFC, AIR, 5K SCCM, 15 PIN ANALOG (TIED GROUNDS), N.C. VITON, LCEA53CS1MV20, Metal & Elastomer Sealed Mass Flow Controllers, Metal & Elastomer Sealed Mass Flow Controllers,  PN  GE50A008503SMV020

These MKS Instruments MFC, AIR, 5K SCCM, 15 PIN ANALOG (TIED GROUNDS), N.C. VITON, LCEA53CS1MV20  have part number GE50A008503SMV020, are new, and come with full MKS Instruments warranty. The GE50A digitally-controlled mass flow controller is available with either RS485, Profibus, EtherCAT, or DeviceNet I/O. The digital control electronics utilized the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1 of set point accuracy on the calibration gas. I/O protocols are designed to allow the GE50A to easily replace RS485 and DeviceNet versions of MKS’s 1179A MFC with minor coding. A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GE50A incorporates only one external elastomer seal and elastomer valve plug. All wetted surfaces are metal. The GE50A comes standard with Viton seals or optional Buna, Neoprene or Kalrez to support different gas requirements.

More information about these MKS Instruments MFC, AIR, 5K SCCM, 15 PIN ANALOG (TIED GROUNDS), N.C. VITON, LCEA53CS1MV20  can be found by downloading the pdf catalog and documents below. Simply open the pdf catalog below, run the pdf search (ctrl F) and search for the GE50A008503SMV020.