MKS Instruments PRESSURE CONTROLLER, Compact Pressure Controller with Integrated Baratron , Compact Pressure Controller with Integrated Baratron , PN 640A13TW1V32V
These MKS Instruments PRESSURE CONTROLLER have part number 640A13TW1V32V, are new, and come with full MKS Instruments warranty. The 640B Absolute Pressure Controller is a self-contained compact, closed-loop electronic control system used for upstream or downstream pressure control. It contains a Baratron® Capacitance Manometer, normally-closed proportioning control valve, and closed-loop control electronics. Electrically similar to a standard MFC, the 640B is powered by ±15 VDC at only 200 mA, permitting use with standard power supply/display electronics. The pressure output and input control signals are linear 0-5 or 0-10 VDC, user-selectable. Two trip points are included in the 640B, with LED status indicators, for use as simple on/off process limits. Typical 640B applications include bubbler back pressure control, gas manifold pressure control, and wafer backside pressure control.MKS Instruments PRESSURE CONTROLLER can be found by downloading the pdf catalog and documents below. Simply open the pdf catalog below, run the pdf search (ctrl F) and search for the 640A13TW1V32V.
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