MKS Instruments MFM, NH3, 64 SLM, DEVICENET, MFM, LHMA12LR363X20, Metal & Elastomer Sealed Mass Flow Controllers, Metal & Elastomer Sealed Mass Flow Controllers, PN GM100A029644R630020
These MKS Instruments MFM, NH3, 64 SLM, DEVICENET, MFM, LHMA12LR363X20 have part number GM100A029644R630020, are new, and come with full MKS Instruments warranty. The GE250A & GE300A mass flow controllers are general purpose, elastomer-sealed MGCs, suited for a wide variety of applications. The GE250A can be ranged from 100 to 250 slm (N2 equivalent), while the GE300A can be ranged from 150 to 300 slm (N2 equivalent). Both are available with either analog I/O or digital I/O utilizing the latest control algorithms for gas and repeatable response to set point. Settling times of 1 to 2 seconds and set point accuracies below 1% of setpoint exceeds typical high flow mass controllers. Precise control is maintained down to 2% of the configured Full Scale flow range. Multi-gas/multi-range capability and performance specifications for accuracy, control range, and transient response minimizes flow controller inventory requirements. The multi-gas/multi-range feature and other custom controls are accessed through the embedded diagnostic interface. A standard Ethernet cable and JAVA-enabled HTML browser are the only tools needed. Critical gas parameters for typical high flow rate gases are already stored on the MFC. Configure a G-Series mass flow controller by selecting the gas from a drop-down menu and specifying the desired Full Scale flow range. Perform routine device health checks, plot flow response, and store operating data for offline analysis using the G-Series MFC diagnostic interface.
More information about these MKS Instruments MFM, NH3, 64 SLM, DEVICENET, MFM, LHMA12LR363X20 can be found by downloading the pdf catalog and documents below. Simply open the pdf catalog below, run the pdf search (ctrl F) and search for the GM100A029644R630020.
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