6 x 6 x 6 立方モジュラー真空チャンバー パッケージ、エドワーズ E2M1.5 ロータリー ベーン デュアル ステージ 粗引きポンプ付き

The Ideal Vacuum Cube^TM is a unique, modular, light weight, chamber system, capable of high vacuum to 1 x 10^-7 Torr. The Cube system is conceived to enable creativity and design flexibility in vacuum chamber system construction and limited only by your imagination.

The core of an Ideal Vacuum Cube modular chamber system is the Cube frame, machined from a single block of 6061-T6 aluminum alloy and reinforced with stainless steel threaded inserts. Many basic frame configurations are available and multiple Cubes can be joined together to create a virtually unlimited variety of long or odd-shaped chamber shapes. The Cube’s light weight aluminum construction makes it easy to transport around the lab or mounted to an optical table.

Cube plates are mounted with screws to each side of the Cube frame and sealed using our patented Taper-Seal^TM design, which provides protection of vacuum sealing surfaces and O-rings from damage or contamination.


An extensive number of interchangeable Cube plates are available and one or more plates can be swapped easily when chamber reconfiguration is needed. Plates are available with single and multiple port KF, CF, and ISO flanged plates for connections and feedthroughs, viewing windows and doors, and a variety of specialty plates for thermal and optical experiments. Most plates are machined from 6061-T6 aluminum (unless otherwise indicated) and include an optical breadboard with 1/4-20 mounting threads spaced on a 1” x 1” standard grid on the plate’s vacuum side for fastening hardware and test objects. Plates may also have mounting threads on the exterior side for mounting accessories. Plates are typically machined from aluminum and receive a blue powder-coated outside finish which makes them both attractive and durable.

The modular nature of the Ideal Vacuum Cube allows the designer to configure a chamber to their unique requirements and reconfigure it at any time – all without the cost, weight, time, and limitations of an application-specific welded chamber.