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Agilent Varian VHS-4 공냉식 확산 펌프 교체용 O-링 키트(ASA4 주입구용), PN K0377183

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Agilent Varian VHS-4 공냉식 확산 펌프 교체용 O-링 키트(ASA4 주입구용), PN K0377183

상태:

새로운

부품 번호:

P106783

보증:

Full Manufacturer's Warranty

지금 이용 가능 3

판매: ₩387,337.49

통화: South Korean Won (KRW)

설명

Agilent Varian VHS-4 공냉식 확산 펌프 교체용 O-링 키트(ASA4 인치 흡입구용) K0377183
PN K0377183

Agilent Varian VHS-4 공냉식 확산 펌프 교체용 O-링 키트(ASA4 인치 흡입구용).

O-링 교체 키트에는 다음이 포함됩니다.

0.84 MB, PDF

PDF

Specifications
Specification	Value
Pumping Speed, Operating Range	750 l/s air, 940l/s He/H₂
Maximum Pumping Speed	1,200 l/s air w/standard cold cap; 950 w/extended cold cap
Maximum Throughput	1.5 T-l/s (2.0 mbar-l/s) in operating range, 2.5 T-l/s (3.2 mbar-l/s) @ 0.01 Torr
Operating Range	2x10⁻³ to < 5x10⁻⁹ Torr (2.7 x 10⁻³ < 6.5 x 10⁻⁹ mbar)
Maximum Forepressure	No Load: 0.65 Torr (0.86 mbar) Full Load: 0.55 Torr (0.73 mbar)
Recommended Backing Pump	≥ 10 cfm (17 m³/hr)
Backstreaming Rate	< 5x10⁻⁴ mg/cm²/min (with standard cold cap)
Warmup Time	10 minutes
Cooldown Time	10 minutes (with quick cool coil)
Fluid Charge	300 cc
Electrical Requirements	1 ph, 50/60 Hz, 120/208/240 VAC
Pump Power	1,450 Watts
Cooling Water Requirements	0.5 gpm (30 l/h) at 60-80 °F (15-26 °C)
Water Connections	1/8 in. FPT Tee

VHS-4 Diffusion Pump Replacement Parts List

Description	Part No.	Item
Standard Cold Cap Assembly	86488301	1
Extended Cold Cap Assembly	F6898301	2
Sight Glass Repair Kit consisting of:	L8908301	3
Sight Glass	L8816001	5.1
Gasket, Teflon	L9694001	5.1
O-ring, Viton, Parker No. 2-113	CommI	5.1
O-ring, Viton, Parker No. 2-226	CommI	5.1
Jet Assembly	F4785301	4
Splash Baffle	F4780301	5
Foreline Baffle Assembly	86754301	6
Thermal Switch Includes:	L8912301	7
Switch (set at 300 °F – 147 °C)	642906025	7a
Lug	648056680	7b
Wire	656179100	5.1
Box Insulator	89867001	7d
Heaters (one heater required per pump)		8
120 V / 1450 watt Heater Element	647304205	5.1
208 V / 1450 watt Heater Element	647304210	5.1
240 V / 450 watt Heater Assembly	647304250	5.1
VHS-4 heater wire, 10 AWG, 24 inches (3 per pump required)	X3901-68001	9
Lugs, Replacement, nickel	648056680	10
Heater Clamp	88164301	11
Heater Insulation	86087001	12
Baffle Retaining Ring	699992156	13
O-Ring Kit includes:	K0377183	14
3 Butyl inlet flange O-ring, Parker No. 2-258		5.1
10 Viton fill and drain O-rings (old style), Parker No. 2-112		5.1
10 Viton fill and drain O-rings (new style, Parker No. 2-113		5.1
1 Sight glass O-ring, Parker No. 2-226		5.1
1 PTFE gasket		5.1
Screw, Rd hd machine, no. 8-32x31/416, stainless steel	Screw	15
Stud, no. 8-32 x 1/2, stainless steel	Stud	16
Screw, Socket hd cap, no. 8-32x11/44, stainless steel	Screw	17
Centering ring for ISO inlet flange, 160K	IC160SV	18
Centering ring for ISO foreline flange, KF40	KC40SV	19
Santovac 5 diffusion pump fluid, 500 cc	695405005
Installation and Operation Manual	699901021