MKS Instruments VALVE, Upstream Valves & Pressure Controllers , Upstream Valves & Pressure Controllers , PN 153D-3-6CF-2
These MKS Instruments VALVE have part number 153D-3-6CF-2, are new, and come with full MKS Instruments warranty. The advanced ultraclean design of the MKS Instrument’s 148J All Metal Control Valve minimizes particle generation and reduces outgassing of residual contaminants, both of which can lead to device failures and poor yields. Metal seals, with a guaranteed external leak rate of less than 1 x 10-10 atm cc/sec (He), are used to avoid contamination and corrosion. The 148 high temperature valves can operate to process temperature of 150°C.
More information about these MKS Instruments VALVE can be found by downloading the pdf catalog and documents below. Simply open the pdf catalog below, run the pdf search (ctrl F) and search for the 153D-3-6CF-2.
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