MKS Instruments FITNG,CAJ# SS-400-1-2, Upstream Valves & Pressure Controllers , Upstream Valves & Pressure Controllers ,  PN  SP93-5300B

These MKS Instruments FITNG,CAJ# SS-400-1-2  have part number SP93-5300B, are new, and come with full MKS Instruments warranty. The 245 Valve is a modified version of the Grainville-Philips Series 216 all-metal, bakeable control valve. The 245 Valve is capable of controlling pressure from 10-11 to 6000 Torr, with a maximum throughput up to 2500 Torr-liters/sec (200 slm): The valve can be used with many corrosive gases that preclude the use of other valves. With the valve driver assembly removed, the valve may be bake to 450°C for UHV applications. The stepper motor used to drive the Type 245 allows response to pressure or set point changes in fractions of a second and will drive the valve from a fully closed to a fully open position in only 15 seconds. The Type 244 Controller completes the system. The 244/245 Pressure/Flow Control System is a closed-loop feedback control system for use is vacuum processes that require an all-metal, bakeable control valve, for wide range pressure or flow control. The 244/345 system, comprised of a control module and servo-controlled leak valve, is ideally suited for single-gas process such as sputtering, sputter-etching, ion source control, ion implantation, vacuum gauge calibration, etc.

More information about these MKS Instruments FITNG,CAJ# SS-400-1-2  can be found by downloading the pdf catalog and documents below. Simply open the pdf catalog below, run the pdf search (ctrl F) and search for the SP93-5300B.