MKS Instruments 640A PRESS CONT,1KT,C-SEAL,NC,METAL, Compact Pressure Controller with Integrated Baratron , Compact Pressure Controller with Integrated Baratron , PN 640A13TC1M62M
These MKS Instruments 640A PRESS CONT,1KT,C-SEAL,NC,METAL have part number 640A13TC1M62M, are new, and come with full MKS Instruments warranty. The 640B Absolute Pressure Controller is a self-contained compact, closed-loop electronic control system used for upstream or downstream pressure control. It contains a Baratron® Capacitance Manometer, normally-closed proportioning control valve, and closed-loop control electronics. Electrically similar to a standard MFC, the 640B is powered by ±15 VDC at only 200 mA, permitting use with standard power supply/display electronics. The pressure output and input control signals are linear 0-5 or 0-10 VDC, user-selectable. Two trip points are included in the 640B, with LED status indicators, for use as simple on/off process limits. Typical 640B applications include bubbler back pressure control, gas manifold pressure control, and wafer backside pressure control.MKS Instruments 640A PRESS CONT,1KT,C-SEAL,NC,METAL can be found by downloading the pdf catalog and documents below. Simply open the pdf catalog below, run the pdf search (ctrl F) and search for the 640A13TC1M62M.
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