Leybold TURBOVAC 90i Turbo Vacuum Pump with ISO-K 63 Inlet, 90 l/s Pumping Speed, Air or Water Cooled. Leybold Part Number: 810031V1000. These Leybold TURBOVAC 90i turbomolecular high-vacuum pumps have a pumping speed up to 90 liters per second (l/s), with an ISO-K 63 inlet flange, and an ISO KF-16 exhaust foreline flange. These i-series turbo pumps require 24 VDC input power at a maximum of 240 Watts and have an integrated controller. All TURBOVAC i-series turbo pumps include a compact standard interface with RS485, USB and Digital I/O interfaces with 3 status LED’s and the possibility to control one accessory (air cooler, valves, relay box...). All that is needed is a power supply and start/stop logic. Power supplies, forced air or water cooling kits, and an optional remote user interface are available. This 90i turbo pump has Leybold part number 810031V1000. Leybold TURBOVAC 90i Specifications: Part Number: 810031V1000 Inlet Flange: ISO-K 63 Base Pressure: 8 x 10-8 mbar (6 x 10-8 Torr) Operating Speed: 72000 RPM Operating Position: Any Pumping Speed: 90 l/s Cooling: Forced Air or Water Exhaust Flange: KF-16 Operating Voltages: 24 VDC Maximum Power: 240 Watts Compact Standard Interface with RS485, USB and Digital I/O One accessory port Recommended Roughing Pump: TriVac D4B or ScrollVac SC7 TURBOVAC 90i pumps with a CF flange are true ultra-high vacuum (UHV) pumps with an ultimate pressure into the 10-10 Torr range (if all-metal intake seal gaskets are used and the vacuum chamber is completely cleaned and baked out). Leybold TURBOVAC 90i turbo pumps with ISO-K flanges are limited (by permeation and outgassing of the rubber/elastomer O-ring seals) to an ultimate pressure in the 10-8 Torr range. The intake flange of these pumps (CF flange only) can be baked up to 100 °C when the turbo is water cooled. You can choose to power the pump from your instrument’s auxillary power source or purchase either the Leybold TURBO.CONTROL i or TURBO.POWER integra. The TURBO.CONTROL i is a bench top or rack mountable remote user interface/power source, which communicates with the Leybold TURBOVAC i-series pumps through RS-485 and allows for full monitoring and control of the turbo pump. The TURBO.CONTROL i is the most popular option for laboratory and research applications. The TURBO.POWER integra is a local power supply only, which is typically mounted to the bottom of the turbo pump. The Leybold TURBOVAC i-series pumps, with the TURBO.POWER integra power supply mounted under the pump, is a compact low-cost high-vacuum pumping solution that is often integrated into many analytical instrumentation applications, including Electron Microscopy (SEM, TEM) and Focused Ion-beam Systems (FIB). Designed to offer maximum performance, the Leybold TURBOVAC i-Series turbomolecular vacuum pumps feature a cutting-edge rotor and drag-stage design which provide unparalleled speed, especially for light gases. A wide selection of interface options, housing and flange configurations as well as accessories completes this product line. The unique oil-free hybrid bearing system with maintenance-free ball bearings will boost your productivity and reduce cost of ownership. With a light gas pumping speed of up to 60% above current reference products and compression values around 100 times higher than previous generation products, they are especially suitable for operation with small backing pumps. Your benefits: a considerably smaller vacuum system, lower initial and operating costs along with a more compact footprint. Performance: Industry-leading pumping speed for light gases (up to 60% higher than existing products) Optimized rotor diameter to provide maximum pumping performance Flexibility: Vacuum port design flexibility Rotatable fore-vacuum port Onboard turbo controller Only requires power along with start/stop logic Optional TURBO.CONTROL i remote user interface Compact design with optional TURBO.POWER integra Installation, operation and control: Integrated 24/48V DC drive electronics to avoid expensive cabling Widest range of communication interfaces: USB, RS485, and remote 15 pin digital I/O as standard options Highly efficient motor Thermal isolation by design for optimized cooling of bearing and improved pump lifetime Innovative shaft support system reduces vibration Maintenance free upper passive magnetic bearing Oil free, lifetime lubricated, lower mechanical ceramic ball bearing is field-replaceable The Leybold TURBOVAC i-series turbo pumps are plug and play. They are simple and easy to install, operate and control, thanks to their flexible product design, integrated electronics, and a wide range of communication interfaces. They offer superior reliability due to an innovative pump design and the unique oil-free hybrid bearing concept with maintenance-free ball bearings available in the market today. The innovative shaft support system reduces vibration, noise, mechanical stress, and alleviates potential negative impact on vibration sensitive applications. Optimized cooling of the bearings is ensured through thermal isolation and a highly efficient motor. The pump is also equipped with a purge port to protect the bearings from critical gases and particles. As a result, the up-time and lifespan of the pump as well as your productivity are increased considerably. In combination with low costs of ownership, your vacuum system will be more efficient than ever. Typical Turbo Pump Applications include: General clean pumping applications Scanning Electron Microscopes - SEM Beam lines and high energy physics Mass Spectrometry Electron Microscopy Sample Preparation Research and Development High Energy Physics Industrial Semiconductor Coatings Surface Science Instruments The operating instructions manual and Leybold i-series TURBOVAC product brochures are available in the downloads.

Leybold TURBOVAC 90i Turbo Vacuum Pump with Conflat CF 4.5 inch Inlet, 90 l/s Pumping Speed, Air or Water Cooled. Leybold Part Number: 810041V1000. These Leybold TURBOVAC 90i turbomolecular high-vacuum pumps have a pumping speed up 90 liters per second (l/s), with a Conflat CF 4.5 inch inlet flange, and an ISO KF-16 exhaust foreline flange. These Leybold TURBOVAC i-series turbo pumps require 24 VDC input power at a maximum of 240 Watts and have an integrated controller. All TURBOVAC i-series turbo pumps include a compact standard interface with RS485, USB and Digital I/O interfaces with 3 status LED’s and the possibility to control one accessory (air cooler, valves, relay box...). All that is needed is a power supply and start/stop logic. Power supplies, forced air or water cooling kits, and an optional remote user interface are available. This 90i turbo pump has Leybold part number 810041V1000. Leybold TURBOVAC 90i Specifications: Part Number: 810041V1000 Inlet Flange: Conflat CF 4.5 Inch Base Pressure: 5 x 10-10 mbar (3.7 x 10-10 Torr) Operating Speed: 72000 RPM Operating Position: Any Pumping Speed: 90 l/s Cooling: Convection, Optional Forced Air or Water Exhaust Flange: KF-16 Operating Voltages: 24 VDC Maximum Power: 240 Watts Compact Standard Interface with RS485, USB and Digital I/O One accessory port Recommended Roughing Pump: TriVac D4B or ScrollVac SC7 TURBOVAC 90i pumps with a CF flange are true ultra-high vacuum (UHV) pumps with an ultimate pressure into the 10-10 Torr range (if all-metal intake seal gaskets are used and the vacuum chamber is completely clean and baked out). Leybold TURBOVAC 90i turbo pumps with ISO-K flanges are limited (by permeation and outgassing of the rubber/elastomer O-ring seals) to an ultimate pressure in the 10-8 Torr range. The intake flange of these pumps (CF flange only) can be baked up to 100 °C when the turbo is water cooled. You can choose to power the pump from your instrument’s axillary power source or purchase either the Leybold TURBO.CONTROL i or TURBO.POWER integra. The TURBO.CONTROL i is a bench top or rack mountable remote user interface/power source, which communicates with the Leybold TURBOVAC i-series pumps through RS-485 and allows for full monitoring and control of the turbo pump. The TURBO.CONTROL i is the most popular option for laboratory and research applications. The TURBO.POWER integra is a local power supply only, which is typically mounted to the bottom of the turbo pump. The Leybold TURBOVAC i-series pumps, with the TURBO.POWER integra power supply mounted under the pump, is a compact low-cost high-vacuum pumping solution that is often integrated into many analytical instrumentation applications, including Electron Microscopy (SEM, TEM) and Focused Ion-beam Systems (FIB). Designed to offer maximum performance, the Leybold TURBOVAC i-Series turbomolecular vacuum pumps feature a cutting-edge rotor and drag-stage design which provide unparalleled speed, especially for light gases. A wide selection of interface options, housing and flange configurations as well as accessories completes this product line. The unique oil-free hybrid bearing system with maintenance-free ball bearings will boost your productivity and reduce cost of ownership. With a light gas pumping speed of up to 60% above current reference products and compression values around 100 times higher than previous generation products, they are especially suitable for operation with small backing pumps. Your benefits: a considerably smaller vacuum system, lower initial and operating costs along with a more compact footprint. Performance: Industry-leading pumping speed for light gases (up to 60% higher than existing products) Optimized rotor diameter to provide maximum pumping performance Flexibility: Vacuum port design flexibility Rotatable fore-vacuum port Onboard turbo controller Only requires power along with start/stop logic Optional TURBO.CONTROL i remote user interface Compact design with optional TURBO.POWER integra Installation, operation and control: Integrated 24/48V DC drive electronics to avoid expensive cabling Widest range of communication interfaces: USB, RS485, and remote 15 pin digital I/O as standard options Highly efficient motor Thermal isolation by design for optimized cooling of bearing and improved pump lifetime Innovative shaft support system reduces vibration Maintenance free upper passive magnetic bearing Oil free, lifetime lubricated, lower mechanical ceramic ball bearing is field-replaceable The Leybold TURBOVAC i-series turbo pumps are plug and play. They are simple and easy to install, operate and control, thanks to their flexible product design, integrated electronics, and a wide range of communication interfaces. They offer superior reliability due to an innovative pump design and the unique oil-free hybrid bearing concept with maintenance-free ball bearings available in the market today. The innovative shaft support system reduces vibration, noise, mechanical stress, and alleviates potential negative impact on vibration sensitive applications. Optimized cooling of the bearings is ensured through thermal isolation and a highly efficient motor. The pump is also equipped with a purge port to protect the bearings from critical gases and particles. As a result, the up-time and lifespan of the pump as well as your productivity are increased considerably. In combination with low costs of ownership, your vacuum system will be more efficient than ever. Typical Turbo Pump Applications include: General clean pumping applications Scanning Electron Microscopes - SEM Beam lines and high energy physics Mass Spectrometry Electron Microscopy Sample Preparation Research and Development High Energy Physics Industrial Semiconductor Coatings Surface Science Instruments The operating instructions manual and Leybold i-series TURBOVAC product brochures are available in the downloads.

Leybold TURBO.CONTROL i Display Unit And Remote User Interface For All TURBOVAC i-Series Turbo Pumps. Leybold Part Number PN: 800100V0004. The Leybold TURBO.CONTROL i remote user-interface has a display & front soft keys to allow monitoring and control of all TURBOVAC i-series turbo pumps. These i-Series pumps are operation ready, having a fully functional built-in controller. The TURBO.CONTROL i can issue start & stop along with read & write parameters to the i-series turbo pump’s integrated controller by either RS 485 (maximum cable length 30 meters) or USB (maximum cable length 5 meters). This unit can only operate one pump at a time and requires an external 24 VDC AC/DC adapter providing 1.5 Amps (sold separately). They can be rack mounted or placed on the benchtop with the optional tabletop housing. The Leybold TURBO.CONTROL i remote user-interface also includes an integrated networking communication port (RJ-45). Operations can be carried out via the pre-installed webserver software. A local area network (LAN) computer can be used through the Ethernet to access the unit’s independent webserver with any common web browser. All turbo pump parameters can then be easily viewed and adjusted by PC or mobile device. The Leybold TURBO.CONTROL i unit has ports for the connection of up to two vacuum pressure gauge sensors. They are compatible with the Leybold THERMOVAC and PENNINGVAC series vacuum pressure gauge sensors. The connected gauge sensors are Plug and Play, they are automatically recognized, and can be configured to user selectable pressure units (Torr, Pascal, and Mbar) along with a selectable gas correction factor. Compatible Vacuum Gauge Sensors: PTR 90 PENNINGVAC Pirani & Cold Cathode Ionization Gauge PTR 90N PENNINGVAC Pirani & Cold Cathode Ionization Gauge TTR 91 Thermovac MEMS-Pirani Vacuum Transducer TTR 91N Thermovac MEMS-Pirani Vacuum Transducer TTR 101 Thermovac Pirani & Capacitance Gauge TTR 101N Thermovac Pirani & Capacitance Gauge The Leybold TURBO.CONTROL i creates and saves a log file that the operator can easily view with our free DataViewer PC software, available in the Downloads section. This software is intuitive, with simple operating menus, allowing the user to quickly access real-time turbo pump status data along with the key parameters recorded in its event log files. TURBO.CONTROL i Interface Functions: Monitor TURBOVAC pump during operation Read and write parameters Issue pump start, stop, and standby commands Observe pump’s speed, current, and bearing temperature View warnings, error messages, and descriptions Set functions of the 24-VDC accessory connections X201, X202, X203 Activate TURBOVAC based on pressure Attach laptop and operate TURBOVAC pump via web server View logged data in real-time Read out log memory and analyze with data viewer PC tool Read out parameter set and error memory of the turbo pump with a PC The Leybold TURBO.CONTROL i is compatible with all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This TURBO.CONTROL i Display unit has Leybold part number 800100V0004.

Leybold 24 VDC, 1.5A Plug In Power Supply for TURBO.CONTROL i Display Unit, 110-240 AC with Universal Adapters. Leybold Part Number: 800110V0027. This is the correct 24 VDC, 1.5A, center-positive power supply for the Leybold TURBO.CONTROL i Display Unit. Input is 110-240VAC and the power supply comes with a set of universal input plug adapters for most countries. TheTURBO.CONTROL i Display Unit is compatible with these TURBOVAC pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This 24 VDC 1.5A power supply for the TURBO.CONTROL i Display Unit has Leybold part number 800110V0027.

Leybold Table Top Housing for TURBO.CONTROL i Display Unit, Used with TURBOVAC Pumps. Leybold Part Number: 800110V0028. This table top display housing is a perfect compliment to the Leybold TURBO.CONTROL i Display Unit (part number P109168). It allows the display unit to be safely placed on a benchtop for easy access and use. Communication between the TURBOVAC pump and TURBO.CONTROL i display unit requires an RS485 serial cable that can be up to 30m in length (1m cable part number P1011242, 5m cable part number P1012476). The TURBO.CONTROL i Display Unit is compatible with these TURBOVAC pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This table top housing for the TURBO.CONTROL i Display unit has Leybold part number 800110V0028.

Leybold RS485 Serial Communication Cable, 1 m, for Connecting TURBO.CONTROL i Display Unit to any TURBOVAC Turbo Pump. Leybold Part Number: 800103V0027. This is the RS485 serial cable which allows the TURBO.CONTROL i Display Unit to communicate with any TURBOVAC i series turbo pump. This cable is 1m long. The Leybold TURBO.CONTROL i is compatible with all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This 1m long RS485 serial communication cable has Leybold part number 800103V0027.

Leybold RS485 Serial Communication Cable, 5 m, for Connecting TURBO.CONTROL i Display Unit to any TURBOVAC Turbo Pump. Leybold Part Number: 800103V0029. This is the RS485 serial cable which allows the TURBO.CONTROL i Display Unit to communicate with any TURBOVAC i series turbo pump. This cable is 5m long. The Leybold TURBO.CONTROL i is compatible with all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This 3m long RS485 serial communication cable has Leybold part number 800103V0029.

Leybold TURBO.POWER Integra 24VDC Power Supply for TURBOVAC Turbomolecular Vacuum Pumps. Leybold Part Number: 800100V0003. The Leybold TURBO.POWER Integra is a 288-Watt power supply providing 24 VDC output at 10 Amps and is designed to power the TURBOVAC i-series pump models: 90i, 250i, 350i, and 450i. It supplies 24 VDC clean fused power from a 110-240 VAC input source (power cable part number P108678 is also required). Hardware is included to mount the TURBO.POWER integra below the turbo pump along with a short 0.3-meter cable to connect the undermounted power supply to the pump. The TURBO.POWER Integra power supply has Leybold part number 800100V0003. To mount the TURBO.POWER Integra below the smaller sized 90i or 250i TURBOVAC pumps, an adaptor mounting kit is required (part number P1012440). It could alternatively be used as a remote benchtop power supply. When using the power supply away from the pump, a longer interconnecting power cable is needed. A 1-meter cable (part number P109190) and 3-meter cable (part number P108858) are available. There are two types of air-cooling kits available for these TURBOVAC i-series pumps; the axial air-cooling kit is designed to mount to the bottom of the turbo pump and provide forced-air flow colinear to the pump’s shaft, while the radial air-cooling kit provides air flow perpendicular to the pump. The radial air-cooling kit should be purchased when plans are to mount the TURBO.POWER integra below the turbo pump. The Leybold TURBO.POWER Integra power supply is compatible with these pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i

Leybold Input Power Cord/Mains Cable for TURBO.POWER Integra Power Supply, 3m long, US 115 VAC. PN: 800102V1002. Leybold Part Number: 800102V1002. This is a Leybold power cord (mains cable), 115 VAC, 3m long, with US plug 5-15P to C13 Connector, IEC 60320. This OEM power cord is for: TURBO.POWER Integra power supply This Leybold 3 meter long power cord has Leybold part number 800102V1002.

Leybold Mounting Kit Adapts TURBO.POWER Integra Power Supply to TURBOVAC Turbo Pumps. PN: 800100V0005. Leybold Part Number: 800100V0005. This adaptive mounting kit is required for the TURBO.POWER Integra Power Supply to be mounted underneath the TURBOVAC 90i or 250i turbo pump, with or without the optional radial air cooling unit attached. This mounting kit is not required to mount the TURBO.POWER Integra power supply underneath 350i or 450i turbo pumps. The TURBO.POWER Integra power supply mounting kit has Leybold part number 800100V0005. This mounting kit is used on these pumps in these configurations: TURBOVAC 90i(underneath mounting of TURBO.POWER Integra power supply, with or without radial fan unit) TURBOVAC 250i(underneath mounting of TURBO.POWER Integra power supply, with or without radial fan unit)

Leybold Power Supply Cable, Connects TURBO.POWER Integra Power Supply to smaller TURBOVAC Turbo Pumps, 1m Long. Leybold Part Number: 800096V0100. This Leybold 1m long power supply cable connects TURBOVAC 90i, 250i, 350i, or 450i turbo pumps to the TURBO.POWER Integra power supply. This cable is used when the TURBO.POWER Integra power supply is used remotely from the pump on a table or bench top. This Leybold cable is compatible with the TURBO.POWER Integra power supply when connected to these TURBOVAC i series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i This 1m long power cable has Leybold part number 800096V0100.

Leybold Power Supply Cable, Connects TURBO.POWER Integra Power Supply to smaller TURBOVAC Turbo Pumps, 3m Long. Leybold Part Number: 800096V0300. This Leybold 3m long power supply cable connects TURBOVAC 90i, 250i, 350i, or 450i turbo pumps to the TURBO.POWER Integra power supply. This cable is used when the TURBO.POWER Integra power supply is used remotely from the pump on a table or bench top. This Leybold cable is compatible with the TURBO.POWER Integra power supply when connected to these TURBOVAC i series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i This 3m long power cable has Leybold part number 800096V0300.

Leybold Fine Centering Ring Inlet Screen (0.8 mm), Splinter Guard, fits ISO-K DN 63. Leybold Part Number: 800133V0012. This Leybold fine screened centering ring (0.8 mm mesh) is used to filter the vacuum flow and keep objects from being sucked into the TURBOVAC turbo pump. This screen has a flange size of ISO-K DN63. Depending on the gas used, some pump speed reduction will occur when using this screen. This screen fits: TURBOVAC 90i with ISO-K 63 inlet, Leybold pump part number: 810031V1000 This fine screen centering ring has Leybold part number 800133V0012.

Leybold Fine Centering Ring Inlet Screen (0.8 mm), Splinter Guard, fits TURBOVAC with CF 4.5 in. Flange. Leybold Part Number: 800132V0012. This Leybold fine screened centering ring (0.8 mm mesh) is used to filter the vacuum flow and keep objects from being sucked into the TURBOVAC turbo pump. This screen has a flange size of CF 4.5 Inch. Depending on the gas used, some pump speed reduction will occur when using this screen. This screen fits: TURBOVAC 90i with CF 4.5 inch inlet, Leybold pump part number: 810041V1000 This fine screen centering ring has Leybold part number 800132V0012.

Leybold Coarse Centering Ring Inlet Screen (3.2 mm), Splinter Guard, fits TURBOVAC with ISO-K DN 63 Flange. Leybold Part Number: 800133V0011. This Leybold coarse screened centering ring (3.2 mm mesh) is used to filter the vacuum flow and keep objects from being sucked into the TURBOVAC turbo pump. This screen has a flange size of ISO-K DN63. Depending on the gas used, some pump speed reduction will occur when using this screen. This screen fits: TURBOVAC 90i with ISO-K 63 inlet, Leybold pump part number: 810031V1000 This coarse screen centering ring has Leybold part number 800133V0011.

Leybold Coarse Centering Ring Inlet Screen (3.2 mm), Splinter Guard, fits TURBOVAC with CF 4.5 in. Flange. Leybold Part Number: 800132V0011. This Leybold coarse screened centering ring (3.2 mm mesh) is used to filter the vacuum flow and keep objects from being sucked into the TURBOVAC turbo pump. This screen has a flange size of CF 4.5 Inch. Depending on the gas used, some pump speed reduction will occur when using this screen. This screen fits: TURBOVAC 90i with CF 4.5 inch inlet, Leybold pump part number: 810041V1000 This fine screen centering ring has Leybold part number 800132V0011.

Leybold AXIAL Air Cooling Fan Unit for TURBOVAC i Series Turbo Pumps. Leybold Part Number: 800136V0008. This Leybold AXIAL air cooling fan unit is designed to mount to the bottom of TURBOVAC 90i and 250i turbo pumps and provides forced-air flow colinear to the pump’s shaft. The air cooling facility is powered via the pump and will always run when the pump is on. This unit attaches to the bottom of the pump with three included mounting screws. High gas throughputs, cyclic operation or high ambient temperatures will necessitate forced air or water cooling. The TURBO.POWER Integra power supply must be used remotely when the axial air cooling fan unit is installed, and a longer pump-to-power supply cable must be used (1m long, part number P109190, or 3m long, part number P108858). This AXIAL air cooling fan unit fits: TURBOVAC 90i TURBOVAC 250i This axial air cooling unit has Leybold part number: 800136V0008.

Leybold RADIAL Air Cooling Fan Unit for TURBOVAC i Series Turbo Pumps. Leybold Part Number: 800136V0007. This Leybold RADIAL air cooling fan unit fits the TURBOVAC 90i turbo pump and provides air flow perpendicular to the pump. The air cooling facility is powered via the pump and will always run when the pump is on. This radial air cooling unit should be purchased when plans are to mount the TURBO.POWER integra power supply below the turbo pump. A mounting kit (part number P1012440) will be required. High gas throughputs, cyclic operation or high ambient temperatures will necessitate forced air or water cooling. This RADIAL air cooling fan unit fits: TURBOVAC 90i This radial air cooling unit has Leybold part number: 800136V0007.

Leybold Y Connector for TURBOVAC Turbo Pump Accessories, M8 Connectors. Leybold Part Number: 800110V0020. This Leybold Y Connector attaches to the M8 Accessory port (X201) on any TURBOVAC i series turbo pump and allows two accessories to be connected at the same time. Both devices are switched parallelly (i.e. de-energized active / in-active). The factory-set accessories interface features a plug-and-play mode, and is instantly ready for operation with the connected device (energized with pump switched on). Secondary devices, such as air cooling units, venting or purge valves, and relays can be directly energized and activated via the accessory connection. The Leybold Accessory Y Connector is compatible with all TURBOVAC i-series turbo pumps including: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This Y Connector has Leybold part number 800110V0020.

Leybold Water Cooling Unit for TURBOVAC i Series Turbo Pumps, G 1/8 in. Connections. Leybold Part Number: 800135V0005. This water cooling unit fits TURBOVAC 90i, 250i, 350i, and 450i turbo pumps. It attaches to the side of the pump with two included bolts. This water cooling block has push-fit connectors for the supply and discharge hoses (6mm OD plastic hose). The hose connections may be unscrewed and removed to make use of the integrated G 1/8” threads. This water cooling kit is required when using a flange heater band with a CF flanged pump. Leybold TURBOVAC pumps also benefit from water cooling when there are high gas throughputs, cyclic operations and/or high ambient temperatures. In order to ensure long trouble-free operation, the cooling water must be clean and not contain any oils, greases or suspended solids. This G 1/8" water cooling unit has Leybold part number 800135V0005. This water cooling unit is compatible with these pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i

Leybold Water Cooling Unit for TURBOVAC i Series Turbo Pumps, G 1/4 in. Connections. Leybold Part Number: 800135V0006. This water cooling unit fits TURBOVAC 90i, 250i, 350i, and 450i turbo pumps. It attaches to the side of the pump with two included bolts. This water cooling block has push-fit connectors for the supply and discharge hoses (10mm OD plastic hose). The hose connections may be unscrewed and removed to make use of the integrated G 1/4” threads. This water cooling kit is required when using a flange heater band with a CF flanged pump. Leybold TURBOVAC pumps also benefit from water cooling when there are high gas throughputs, cyclic operations and/or high ambient temperatures. In order to ensure long trouble-free operation, the cooling water must be clean and not contain any oils, greases or suspended solids. This G 1/4" water cooling unit has Leybold part number 800135V0006. This water cooling unit is compatible with these pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i

Leybold Intake Flange Heater Band, CF 4.5 Inch, DN 63 CF, 115 VAC, for TURBOVAC 90i. Leybold Part Number: 800137V0004. This is a 115 VAC Leybold intake flange heater for the TURBOVAC 90i turbo pump with CF 4.5 inch flange (DN 63 CF). The intake flange may be baked up to 100 °C if the turbo pump is water cooled. Operate the pump with water cooling when baking out.Do not use this intake flange heater band on an air cooled pump - damage to the pump will occur. The band heater has an attached 1m power cable terminated with a C19 power entry plug (male C19). This Leybold heater band has part number 800137V0004. We recommend using the Ideal Vacuum PID plug and play heater controller (part number P107361). The heater band power cable will plug directly into it. The input voltage of the controller must be the same as the heater. The P107361 controller includes a 115 VAC input power cable with a 5-20P (20A) plug. Heater Band Specs: Fits: TURBOVAC 90i turbo pump with CF 4.5 in. flange (P109102) Water Cooling Option (required): P109163 or P1012447 Heater Band Voltage: 115 VAC Recommended Controller: Ideal Vacuum P107361 (115 VAC power cord with 5-20P plug included)

Leybold Intake Flange Heater Band, CF 4.5 Inch, DN 63 CF, 230 VAC, for TURBOVAC 90i. Leybold Part Number: 800137V0003. This is a 230 VAC Leybold intake flange heater for the TURBOVAC 90i turbo pump with CF 4.5 inch flange (DN 63 CF). The intake flange may be baked up to 100 °C if the turbo pump is water cooled. Operate the pump with water cooling when baking out. Do not use this intake flange heater band on an air cooled pump - damage to the pump will occur. The band heater has an attached 1m power cable terminated with a C19 power entry plug (male C19). This Leybold heater band has part number 800137V0003. We recommend using the Ideal Vacuum PID plug and play heater controller (part number P107361). The heater band power cable will plug directly into it. Our P107361 controller can be operated at 100-240 VAC. The input voltage of the controller must be the same as the heater. For use with 230 volt applications you must supply your own power cord. Heater Band Specs: Fits: TURBOVAC 90i turbo pump with CF 4.5 in. flange (P109102) Water Cooling Option (required): P109163 or P1012447 Heater Band Voltage: 230 VAC Recommended Controller: Ideal Vacuum P107361 (requires customer supplied power cable)

Leybold Start/Stop Switch for all TURBOVAC i Series Turbo Pumps. Leybold Part Number: 800110V0021. This Leybold start/stop switch fits all TURBOVAC i series turbo pumps including 90i, 250i, 350i, 450i, 850i, 950i, 1350i, and 1450i. It attaches directly to the pump’s remote 15 pin HD (X1) connector and allows the operator to manually switch the pump from run to standby. This start/stop switch fits: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This start/stop switch has Leybold part number 800110V0021.

Leybold USB 2.0 Cable, Type A/B, Connects TURBO.CONTROL i Display Unit to any TURBOVAC i Series Turbo Pump, 1.8m Long. Leybold Part Number: 800110V0108. This USB cable connects any TURBOVAC i series turbo pump to the TURBO.CONTROL i Display Unit (part number P109168). This is a USB 2.0 type A/B cable and is 1.8m long. Through the USB interface, the TURBO.CONTROL i can issue start & stop along with read & write parameters to the i-series turbo pump’s integrated controller. This USB cable has Leybold part number 800110V0108. The Leybold TURBO.CONTROL i is compatible with all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i

Leybold Venting Valve for any TURBOVAC i Series Turbo Pump, 24 VDC, NC, G 1/8 in Connector. Leybold Part Number: 800120V0012. This Leybold venting valve can be installed in any TURBOVAC i series turbo pump in the VENT port. This is a normally closed (NC) valve and operates at 24 VDC. It is plumbed into the G 1/8" (BSPP) VENT port, and powered by the 24 VDC (X201) accessory port. This venting valve vents the pump and the forevacuum line when the pump is switched off and thus keeps oil vapor from diffusing back from the forevacuum line. A choke nozzle in the vent port ensures that the pump is not vented too fast. The maximum permissible pressure in the pump must not exceed 1.4 bar (abs.). Use the TURBO.CONTROL i display unit (part number P109168) to set the correct parameters for this valve. See the Serial Interface download for instructions. This normally closed Leybold venting valve has part number 800120V0012. This Leybold venting valve fits all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i

Leybold Power Failure Venting Valve for any TURBOVAC i Series Turbo Pump, 24 VDC, Normally Open, G 1/8 in. Connector. Leybold Part Number: 800120V0022. This Leybold venting valve can be installed in any TURBOVAC i series turbo pump in the VENT port. This is a normally open (NO) valve and operates at 24 VDC. It is plumbed into the G 1/8" (BSPP) accessory port, and powered by the 24 VDC (X201) accessory port. When a power failure occurs, this valve closes and vents the pump and the forevacuum line and thus keeps oil vapor from diffusing back from the forevacuum line. A choke nozzle in the vent port ensures that the pump is not vented too fast. The maximum permissible pressure in the pump must not exceed 1.4 bar (abs.). Use the TURBO.CONTROL i display unit (part number P109168) to set the correct parameters for this valve. See the Serial Interface download for instructions. This normally open Leybold power failure venting valve has part number 800120V0022. This Leybold power failure venting valve fits all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i

Leybold Purge Gas Valve for any TURBOVAC i Series Turbo Pump, 24 VDC,24 sccm, G 1/8 in. Connector. Leybold Part Number: 800120V0013. This Leybold purge gas valve can be installed in any TURBOVAC i series turbo pump in the PURGE port. This valve operates at 24 VDC and throttles gas inlet to 24 sccm. It is plumbed into the G 1/8" (BSPP) PURGE port, and powered by the 24 VDC (X201) accessory port. Use the TURBO.CONTROL i display unit (part number P109168) to set the correct parameters for this valve. See the Serial Interface download for instructions. This Leybold purge gas valve has part number 800120V0013. This Leybold purge gas valve fits all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i

Leybold Purge Gas Throttle for any TURBOVAC i Series Turbo Pump, 24 sccm, G 1/8 in. Connector. Leybold Part Number: 800120V0014. This Leybold purge gas throttle is installed onto the G 1/8" (BSPP) inlet of the venting valve (part number P1012442), or the power failure venting valve (part number P1012443). It throttles gas input through the valve to 24 sccm. This purge gas throttle can be used on any TURBOVAC i series turbo pump with a valve plumbed to the turbo pump’s VENT port. Use the TURBO.CONTROL i display unit (part number P109168) to set the correct parameters for the valve. See the Serial Interface download for instructions. This Leybold purge gas valve has part number 800120V0014. This Leybold purge gas throttle fits all TURBOVAC i series turbo pumps with a vent valve: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i

Leybold Air Filter for Venting Valves on any TURBOVAC i Series Pump, G 1/8 in. Connector. Leybold Part Number: 800110V0022. This Leybold air filter can be installed onto the G 1/8" (BSPP) inlet of the venting valve (part number P1012442), the power failure venting valve (part number P1012443) or the purge gas throttle (part number P1012444). This air filter helps keep dirt and dust from entering the pump when the valve is actuated. This air filter can be used on any TURBOVAC i series turbo pump with a valve plumbed to the VENT port. Use the TURBO.CONTROL i display unit (part number P109168) to set the correct parameters for the valve. See the Serial Interface download for instructions. This Leybold air filter has part number 800110V0022. This Leybold air filter fits all TURBOVAC i series turbo pumps with a vent valve: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i