MKS 946 Half-Rack Vacuum Gauge Controller Power Supply and Readout, NO Cards, RS232 and RS485, 6 Channels. MKS Part Number: 946-US-NANANA-NA. The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. This is a raw unit without cards. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables and optional cards for the MKS 946 are available on this website.

MKS Control Card Mass Flow Controller Series 946 and Dual Mass Flow Controllers. MKS Part Number: 20000712. The MKS Control Card Mass Flow Controller is compatible with the 946 and dual Mass Flow controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

MKS GM50A Mass Flow Controller (MFC) Digitally-Controlled, Range of 0.4 to 20 sccm, 15-pin D-subminiature, 4 VCR Male. MKS Part Number: GM50A013201RMM020. The MKS GM50A Mass Flow Controller is capable of being configured to control N2 or equivalent, having a Full-Scale Flow Range of 20 sccm and a control range of 0.4 to 20 sccm. It has a 15-pin D-subminiature analog connector with tied grounds, a 0-5 VDC flow input/output signal and a Swagelok® 4 VCR® male input and output fittings. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables. Swagelok, VCR-TM Swagelok Company

MKS GM50A Mass Flow Controller (MFC) Digitally-Controlled, Ranged of 1 to 50 sccm, 15-pin Connector, 4 VCR Male. PN: GM50A013501RMM020. MKS Part Number: GM50A013501RMM020. The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 50 sccm and a control range of 1 to 50 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables. Swagelok, VCR-TM Swagelok Company

MKS GM50A Mass Flow Controller (MFC) Digitally-Controlled, Range of 2 to 100 sccm, 15-pin D-subminiature, 4 VCR Male. PN: GM50A013102RMM020. MKS Part Number: GM50A013102RMM020. The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 100 sccm and a control range of 2 to 100 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables. Swagelok, VCR-TM Swagelok Company

MKS GM50A Mass Flow Controller (MFC) Digitally-Controlled, Range of 4 to 200 sccm, 15-pin D-subminiature. MKS Part Number: GM50A013202RMM020. The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 200 sccm and a control range of 4 to 200 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables. Swagelok, VCR-TM Swagelok Company

MKS GM50A Mass Flow Controller (MFC) Digitally-Controlled, Range of 10 to 500 sccm, 15-pin D-subminiature, 4 VCR male. MKS Part Number: GM50A013502RMM020. The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR®. It has a Full Scale Flow Range of 500 sccm and a control range of 10 to 500 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Digital calibration yields 1% of set point accuracy on the calibration gas. Typical response times are on the order of 500 milliseconds. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables. Swagelok, VCR-TM Swagelok Company

MKS GM50A Mass Flow Controller (MFC) Digitally-Controlled, Range of 20 to 1000 sccm, 15-pin D-subminiature Connector, 4 VCR Male. MKS Part Number: GM50A013103RMM020. The MKS GM50A Mass Flow Controller is capable of being configured to control a wide range of Safe Delivery Source Gasses (SDS). Input and output fittings are Swagelok® 4 VCR® male. It has a Full Scale Flow Range of 1000 sccm and a control range of 20 to 1000 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. The multi-range capabilities can be configured through a web browser based application accessed by plugging the MFC into a router or a computer via Ethernet cable. The E-diagnostics application allows a user to monitor the MFC’s performance in real time as well as plot data and select variables. Swagelok, VCR-TM Swagelok Company

MKS Vacuum Gauge Cable Connects 946 Controller to 179, 1179, 1462, 1479, 1559, 2179, GE50A, GM50A, IE50A, IM50A, IM250A, P250A, 10 ft. (3m) Long. MKS Part Number: 100016744. The MKS Mass Flow Controller Cable connects 179, 1179, 1462, 1479, 1559, 2179, GE50A, GM50A, IE50A, IM50A, IM250A, P250A mass flow controllers to 946 controllers with 15-pin type D High-density subminiature to 15-pin standard subminiature connectors. This is the Cable ONLY. The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables for the MKS 946 are available on this website.

MKS Vacuum Gauge Cable Connects 946 Controller to 179, 1179, 1462, 1479, 1559, 2179, GE50A, GM50A, IE50A, IM50A, IM250A, P250A, 25 ft. (7.5m) Long. MKS Part Number: 100016745. The MKS Mass Flow Controller Cable connects 179, 1179, 1462, 1479, 1559, 2179, GE50A, GM50A, IE50A, IM50A, IM250A, P250A mass flow controllers to 946 controllers with 15-pin type D High-density subminiature to 15-pin standard subminiature connectors. This is the Cable ONLY. The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables for the MKS 946 are available on this website.

MKS Vacuum Sensor Card Capacitance Manometer and Piezo, for Series 937B and 946 Controllers. MKS Part Number: 100015267. The MKS Vacuum Sensor Card supports capacitance manometers and Piezo sensors with the 937B and 946 vacuum system controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 and 937B Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

MKS 626D 0.1 Torr Baratron Absolute Capacitance Manometer, Vacuum Pressure Gauge Sensor, Vacuum Fitting KF-16, PN 626D.1TDEThe MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system. The MKS 626D Baratron capacitance manometers operate at ambient conditions. They are available in full scale pressure/vacuum ranges from 0.1 to 1000 Torr and are suited for many industrial, electronic, and research applications. These listing is for an MKS Type 626D capacitance manometers having a 15-pin D-subminiature signal connector, a 0.1 Torr full scale maximum vacuum pressure reading value, a KF-16 vacuum flange connection, and have MKS part number 626D.1TDE. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 15-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition Long-term output stability for state-of-the-art process repeatability Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment High overpressure limit ensures reliability during system mishaps Specified in percent of reading for best accuracy and improved process yield

MKS 626D 0.1 Torr Baratron Absolute Capacitance Manometer, Vacuum Pressure Gauge Sensor, UHV Vacuum Fitting Conflat CF 1.33 Inch Flange, 626D.1TCEThe MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system. The MKS 626D Baratron capacitance manometers operate at ambient conditions. They are available in full scale pressure/vacuum ranges from 0.1 to 1000 Torr and are suited for many industrial, electronic, and research applications. These listing is for an MKS Type 626D capacitance manometers having a 15-pin D-subminiature signal connector, a 0.1 Torr full scale maximum vacuum pressure reading value, a Conflat CF 1.33 inch ultra-high vacuum UHV flange connection, and have MKS part number 626D.1TCE. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 15-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition Long-term output stability for state-of-the-art process repeatability Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment High overpressure limit ensures reliability during system mishaps Specified in percent of reading for best accuracy and improved process yield

MKS 626D 1 Torr Baratron Absolute Capacitance Manometer, Vacuum Pressure Gauge Sensor, Vacuum Fitting KF-16, PN 626D01TDEThe MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system. The MKS 626D Baratron capacitance manometers operate at ambient conditions. They are available in full scale pressure/vacuum ranges from 0.1 to 1000 Torr and are suited for many industrial, electronic, and research applications. These listing is for an MKS Type 626D capacitance manometers having a 15-pin D-subminiature signal connector, a 1 Torr full scale maximum vacuum pressure reading value, a KF-16 vacuum flange connection, and have MKS part number 626D01TDE. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 15-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition Long-term output stability for state-of-the-art process repeatability Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment High overpressure limit ensures reliability during system mishaps Specified in percent of reading for best accuracy and improved process yield

MKS 626D 10 Torr Baratron Absolute Capacitance Manometer, Vacuum Pressure Gauge Sensor, Vacuum Fitting KF-16, PN 626D11TDEThe MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system. The MKS 626D Baratron capacitance manometers operate at ambient conditions. They are available in full scale pressure/vacuum ranges from 0.1 to 1000 Torr and are suited for many industrial, electronic, and research applications. These listing is for an MKS Type 626D capacitance manometers having a 15-pin D-subminiature signal connector, a 10 Torr full scale maximum vacuum pressure reading value, a KF-16 vacuum flange connection, and have MKS part number 626D11TDE. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 15-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition Long-term output stability for state-of-the-art process repeatability Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment High overpressure limit ensures reliability during system mishaps Specified in percent of reading for best accuracy and improved process yield

MKS 626D 10 Torr Baratron Absolute Capacitance Manometer, Vacuum Pressure Gauge Sensor, Vacuum Fitting VCR 8 Female, PN 626D11TBEThe MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system. The MKS 626D Baratron capacitance manometers operate at ambient conditions. They are available in full scale pressure/vacuum ranges from 0.1 to 1000 Torr and are suited for many industrial, electronic, and research applications. These listing is for an MKS Type 626D capacitance manometers having a 15-pin D-subminiature signal connector, a 10 Torr full scale maximum vacuum pressure reading value, a VCR 8 female vacuum flange connection, and have MKS part number 626D11TBE. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 15-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition Long-term output stability for state-of-the-art process repeatability Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment High overpressure limit ensures reliability during system mishaps Specified in percent of reading for best accuracy and improved process yield

MKS 626D 20 Torr Baratron Absolute Capacitance Manometer, Vacuum Pressure Gauge Sensor, Vacuum Fitting VCR 8 Female, PN: 626D21TBEThe MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system. The MKS 626D Baratron capacitance manometers operate at ambient conditions. They are available in full scale pressure/vacuum ranges from 0.1 to 1000 Torr and are suited for many industrial, electronic, and research applications. These listing is for an MKS Type 626D capacitance manometers having a 15-pin D-subminiature signal connector, a 20 Torr full scale maximum vacuum pressure reading value, a VCR 8 female vacuum flange connection, and have MKS part number 626D21TBE. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 15-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition Long-term output stability for state-of-the-art process repeatability Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment High overpressure limit ensures reliability during system mishaps Specified in percent of reading for best accuracy and improved process yield

MKS 626D 100 Torr Baratron Absolute Capacitance Manometer, Vacuum Pressure Gauge Sensor, Vacuum Fitting KF-16. MKS Part Number: 626D12TDE. The MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system. The MKS 626D Baratron capacitance manometers operate at ambient conditions. They are available in full scale pressure/vacuum ranges from 0.1 to 1000 Torr and are suited for many industrial, electronic, and research applications. These listing is for an MKS Type 626D capacitance manometers having a 15-pin D-subminiature signal connector, a 100 Torr full scale maximum vacuum pressure reading value, a KF-16 vacuum flange connection, and have MKS part number 626D12TDE. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 15-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition Long-term output stability for state-of-the-art process repeatability Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment High overpressure limit ensures reliability during system mishaps Specified in percent of reading for best accuracy and improved process yield

MKS 626D 100 Torr Baratron Absolute Capacitance Manometer, Vacuum Pressure Gauge Sensor, Vacuum Fitting VCR 8 Female, PN 626D12TBEThe MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system. The MKS 626D Baratron capacitance manometers operate at ambient conditions. They are available in full scale pressure/vacuum ranges from 0.1 to 1000 Torr and are suited for many industrial, electronic, and research applications. These listing is for an MKS Type 626D capacitance manometers having a 15-pin D-subminiature signal connector, a 100 Torr full scale maximum vacuum pressure reading value, a VCR 8 female vacuum flange connection, and have MKS part number 626D12TBE. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 15-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition Long-term output stability for state-of-the-art process repeatability Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment High overpressure limit ensures reliability during system mishaps Specified in percent of reading for best accuracy and improved process yield

MKS 626D 1000 Torr Baratron Absolute Capacitance Manometer, Vacuum Pressure Gauge Sensor, Vacuum Fitting KF-16, PN 626D13TDE. The MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system. The MKS 626D Baratron capacitance manometers operate at ambient conditions. They are available in full scale pressure/vacuum ranges from 0.1 to 1000 Torr and are suited for many industrial, electronic, and research applications. These listing is for an MKS Type 626D capacitance manometers having a 15-pin D-subminiature signal connector, a 1000 Torr full scale maximum vacuum pressure reading value, a KF-16 vacuum flange connection, and have MKS part number 626D13TDE. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 15-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition Long-term output stability for state-of-the-art process repeatability Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment High overpressure limit ensures reliability during system mishaps Specified in percent of reading for best accuracy and improved process yield

MKS 626D 1000 Torr Baratron Absolute Capacitance Manometer, Vacuum Pressure Gauge Sensor, Vacuum Fitting VCR 8 Female, PN 626D13TBEThe MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system. The MKS 626D Baratron capacitance manometers operate at ambient conditions. They are available in full scale pressure/vacuum ranges from 0.1 to 1000 Torr and are suited for many industrial, electronic, and research applications. These listing is for an MKS Type 626D capacitance manometers having a 15-pin D-subminiature signal connector, a 1000 Torr full scale maximum vacuum pressure reading value, a VCR 8 female vacuum flange connection, and have MKS part number 626D13TBE. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 15-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition Long-term output stability for state-of-the-art process repeatability Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment High overpressure limit ensures reliability during system mishaps Specified in percent of reading for best accuracy and improved process yield

MKS 626D 1000 Torr Baratron Absolute Capacitance Manometer, Vacuum Pressure Gauge Sensor, UHV Vacuum Fitting Conflat CF 1.33 Inch Flange, PN 626D13TCEThe MKS 626D unheated absolute Baratron® capacitance manometers are the latest analog, capacitance-based, high-performance vacuum and pressure transducers. They require ±15 VDC input voltage and provide a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS PDR2000 pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements. Changes in pressure/vacuum are determined by measuring the change in capacitance between the sensor’s diaphragm and an adjacent electrode disk. This capacitance change is converted to a useable output by patented signalconditioning electronic circuits. The radially-tensioned Inconel® diaphragm in the sensor provides very fast response (<20 msec in many cases), low hysteresis, excellent repeatability, very high resolution (to 0.001% of Full Scale), exceptionally high corrosion resistance, and double-walled welded construction for operator safety. The sensor itself can withstand repeated exposures to 45 psia (3.1 bar) without permanent degradation or shifting, allowing it to operate in virtually any process system. The MKS 626D Baratron capacitance manometers operate at ambient conditions. They are available in full scale pressure/vacuum ranges from 0.1 to 1000 Torr and are suited for many industrial, electronic, and research applications. These listing is for an MKS Type 626D capacitance manometers having a 15-pin D-subminiature signal connector, a 1000 Torr full scale maximum vacuum pressure reading value, a Conflat CF 1.33 inch ultra-high vacuum UHV flange connection, and have MKS part number 626D13TCE. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 15-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition Long-term output stability for state-of-the-art process repeatability Inconel® and Incoloy® nickel alloy construction of basic sensor operates without damage in virtually any chemical environment High overpressure limit ensures reliability during system mishaps Specified in percent of reading for best accuracy and improved process yield

MKS 627H 0.02 Torr Heated 45 °C, Absolute Baratron Capacitance Manometer, Vacuum Fitting VCR 8 Female, Accuracy 0.25% of Reading, Vertical Calibration. MKS Part Number PN: 627HU2TBE1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices. These listing is for an MKS Type 627H capacitance manometer which is heated to 45 °C, have a 15-pin D-subminiature signal connector with Thread Lock, a 0.02 Torr full scale maximum vacuum pressure reading value, a VCR 8 female vacuum flange connection, an accuracy 0.25% of reading, with vertical calibration, and have MKS part number 627HU2TBE1B. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: Excellent long-term stability Percent of Reading accuracy for more precise output signal in lower pressure ranges Full Scale ranges low as 20 mTorr (0.03 mbar) for precise measurement of low pressure processes All-Inconel corrosion-resistant wetted surfaces Faster warm-up time Visual and electrical status of temperature and heater control circuit Compatible with earlier Baratron capacitance manometers, MKS power supply/readout mod­ules, and pressure controllers Measures total pressure directly, independent of gas composition High overpressure rating for improved reliability Cleanroom-compatible stainless steel package

MKS 627H 0.05 Torr Heated 45 °C, Absolute Baratron Capacitance Manometer, Vacuum Fitting VCR 8 Female, Accuracy 0.15% of Reading, Vertical Calibration. MKS Part Number PN: 627HU5TBD1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices. These listing is for an MKS Type 627H capacitance manometer which is heated to 45 °C, have a 15-pin D-subminiature signal connector with Thread Lock, a 0.05 Torr full scale maximum vacuum pressure reading value, a VCR 8 female vacuum flange connection, an accuracy 0.15% of reading, with vertical calibration, and have MKS part number 627HU5TBD1B. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: Excellent long-term stability Percent of Reading accuracy for more precise output signal in lower pressure ranges Full Scale ranges low as 20 mTorr (0.03 mbar) for precise measurement of low pressure processes All-Inconel corrosion-resistant wetted surfaces Faster warm-up time Visual and electrical status of temperature and heater control circuit Compatible with earlier Baratron capacitance manometers, MKS power supply/readout mod­ules, and pressure controllers Measures total pressure directly, independent of gas composition High overpressure rating for improved reliability Cleanroom-compatible stainless steel package

MKS 627H 0.1 Torr Heated 45 °C, Absolute Baratron Capacitance Manometer, Vacuum Fitting VCR 8 Female, Accuracy 0.15% of Reading, Vertical Calibration. MKS Part Number PN: : 627H.1TBD1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices. These listing is for an MKS Type 627H capacitance manometer which is heated to 45 °C, have a 15-pin D-subminiature signal connector with Thread Lock, a 0.1 Torr full scale maximum vacuum pressure reading value, a VCR 8 female vacuum flange connection, an accuracy 0.15% of reading, with vertical calibration, and have MKS part number : 627H.1TBD1B. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: Excellent long-term stability Percent of Reading accuracy for more precise output signal in lower pressure ranges Full Scale ranges low as 20 mTorr (0.03 mbar) for precise measurement of low pressure processes All-Inconel corrosion-resistant wetted surfaces Faster warm-up time Visual and electrical status of temperature and heater control circuit Compatible with earlier Baratron capacitance manometers, MKS power supply/readout mod­ules, and pressure controllers Measures total pressure directly, independent of gas composition High overpressure rating for improved reliability Cleanroom-compatible stainless steel package

MKS 627H 1 Torr Heated 45 °C, Absolute Baratron Capacitance Manometer, Vacuum Fitting VCR 8 Female, Accuracy 0.12% of Reading, Vertical Calibration. MKS Part Number PN: 627H01TBC1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices. These listing is for an MKS Type 627H capacitance manometer which is heated to 45 °C, have a 15-pin D-subminiature signal connector with Thread Lock, a 1 Torr full scale maximum vacuum pressure reading value, a VCR 8 female vacuum flange connection, an accuracy 0.12% of reading, with vertical calibration, and have MKS part number 627H01TBC1B. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: Excellent long-term stability Percent of Reading accuracy for more precise output signal in lower pressure ranges Full Scale ranges low as 20 mTorr (0.03 mbar) for precise measurement of low pressure processes All-Inconel corrosion-resistant wetted surfaces Faster warm-up time Visual and electrical status of temperature and heater control circuit Compatible with earlier Baratron capacitance manometers, MKS power supply/readout mod­ules, and pressure controllers Measures total pressure directly, independent of gas composition High overpressure rating for improved reliability Cleanroom-compatible stainless steel package

MKS 627H 10 Torr Heated 45 °C, Absolute Baratron Capacitance Manometer, Vacuum Fitting VCR 8 Female, Accuracy 0.12% of Reading, Vertical Calibration. MKS Part Number PN: 627H11TBC1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices. These listing is for an MKS Type 627H capacitance manometer which is heated to 45 °C, have a 15-pin D-subminiature signal connector with Thread Lock, a 10 Torr full scale maximum vacuum pressure reading value, a VCR 8 female vacuum flange connection, an accuracy 0.12% of reading, with vertical calibration, and have MKS part number 627H11TBC1B. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: Excellent long-term stability Percent of Reading accuracy for more precise output signal in lower pressure ranges Full Scale ranges low as 20 mTorr (0.03 mbar) for precise measurement of low pressure processes All-Inconel corrosion-resistant wetted surfaces Faster warm-up time Visual and electrical status of temperature and heater control circuit Compatible with earlier Baratron capacitance manometers, MKS power supply/readout mod­ules, and pressure controllers Measures total pressure directly, independent of gas composition High overpressure rating for improved reliability Cleanroom-compatible stainless steel package

MKS 627H 100 Torr Heated 45 °C, Absolute Baratron Capacitance Manometer, Vacuum Fitting VCR 8 Female, Accuracy 0.12% of Reading, Vertical Calibration. MKS Part Number PN: 627H12TBC1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices. These listing is for an MKS Type 627H capacitance manometer which is heated to 45 °C, have a 15-pin D-subminiature signal connector with Thread Lock, a 100 Torr full scale maximum vacuum pressure reading value, a VCR 8 female vacuum flange connection, an accuracy 0.12% of reading, with vertical calibration, and have MKS part number 627H12TBC1B. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: Excellent long-term stability Percent of Reading accuracy for more precise output signal in lower pressure ranges Full Scale ranges low as 20 mTorr (0.03 mbar) for precise measurement of low pressure processes All-Inconel corrosion-resistant wetted surfaces Faster warm-up time Visual and electrical status of temperature and heater control circuit Compatible with earlier Baratron capacitance manometers, MKS power supply/readout mod­ules, and pressure controllers Measures total pressure directly, independent of gas composition High overpressure rating for improved reliability Cleanroom-compatible stainless steel package

MKS 627H 1,000 Torr Heated 45 °C, Absolute Baratron Capacitance Manometer, Vacuum Fitting VCR 8 Female, Accuracy 0.12% of Reading, Vertical Calibration. MKS Part Number PN: 627H13TBC1B. The 627H Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, 627D, and 627F Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/ readout devices. These listing is for an MKS Type 627H capacitance manometer which is heated to 45 °C, have a 15-pin D-subminiature signal connector with Thread Lock, a 1,000 Torr full scale maximum vacuum pressure reading value, a VCR 8 female vacuum flange connection, an accuracy 0.12% of reading, with vertical calibration, and have MKS part number 627H13TBC1B. Compatible Controller and Cables: P102063 - Ideal Vacuum Cable For MKS PDR 2000 Power Supply and Digital Readout Cable 15-Pin Y Cable, Equivalent To CB2000S-1-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: Excellent long-term stability Percent of Reading accuracy for more precise output signal in lower pressure ranges Full Scale ranges low as 20 mTorr (0.03 mbar) for precise measurement of low pressure processes All-Inconel corrosion-resistant wetted surfaces Faster warm-up time Visual and electrical status of temperature and heater control circuit Compatible with earlier Baratron capacitance manometers, MKS power supply/readout mod­ules, and pressure controllers Measures total pressure directly, independent of gas composition High overpressure rating for improved reliability Cleanroom-compatible stainless steel package

MKS Manometer Cable Connects 937B or 946 Controllers to 626 or 627 Manometers, 10 ft. (3m) Long. MKS Part Number: 100007555. The MKS vacuum gauge signal cable connects 937B or 946 controllers to 626 or 627 manometers. It has 9-pin type D subminiature and 15-pin type D subminiature connectors. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

MKS Manometer Cable Connects 937B or 946 Controllers to 626 or 627 Manometers, 25 ft. (7.5m). Long. MKS Part Number: 100007556. The MKS vacuum gauge signal cable connects 937B or 946 controllers to 626 or 627 manometers. It has 9-pin type D subminiature and 15-pin type D subminiature connectors. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

MKS 722C General Purpose Baratron Absolute Capacitance Manometer, Pressure Range 1 Torr, VCR 4 Vacuum Fitting, 9-Pin Type D Connector, PN 722C01TCD2FA. Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty. These listing is for an MKS Type 722C general purpose capacitance manometers having a 9-pin D-subminiature signal connector, a 1 Torr full scale maximum vacuum pressure reading value, a VCR 4 female vacuum flange connection, and have MKS part number 722C01TCD2FA. Compatible Controller and Cables: P102061 - MKS PDR 2000 Power Supply and Digital Readout Cable 9-Pin Cable CB2000S-2-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 9-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition High accuracy over a wide operating temperature range Overpressure limit of 45 psia or 2x Full Scale (whichever is greater) assures no degradation in zero repeatability or performance All wetted sensor surfaces are micro-finished to =10 Ra, eliminating inclusion sites for corrosion growth Smaller manometer size helps achieve overall system size reduction Corrosion resistant - all-metal, all-welded con­struction exposes only Inconel and stainless steel to the media Drop in replacement compatible with earlier 722 Baratron capacitance manometers

MKS 722C General Purpose Baratron Absolute Capacitance Manometer, Pressure Range 10 Torr, VCR 4 Vacuum Fitting, 9-Pin Type D Connector, PN 722C11TCD2FA. Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty. These listing is for an MKS Type 722C general purpose capacitance manometers having a 9-pin D-subminiature signal connector, a 10 Torr full scale maximum vacuum pressure reading value, a VCR 4 female vacuum flange connection, and have MKS part number 722C11TCD2FA. Compatible Controller and Cables: P102061 - MKS PDR 2000 Power Supply and Digital Readout Cable 9-Pin Cable CB2000S-2-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 9-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition High accuracy over a wide operating temperature range Overpressure limit of 45 psia or 2x Full Scale (whichever is greater) assures no degradation in zero repeatability or performance All wetted sensor surfaces are micro-finished to =10 Ra, eliminating inclusion sites for corrosion growth Smaller manometer size helps achieve overall system size reduction Corrosion resistant - all-metal, all-welded con­struction exposes only Inconel and stainless steel to the media Drop in replacement compatible with earlier 722 Baratron capacitance manometers

MKS 722C General Purpose Baratron Absolute Capacitance Manometer, Pressure Range 100 Torr, VCR 4 Vacuum Fitting, 9-Pin Type D Connector, PN 722C12TCD2FA. Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty. These listing is for an MKS Type 722C general purpose capacitance manometers having a 9-pin D-subminiature signal connector, a 100 Torr full scale maximum vacuum pressure reading value, a VCR 4 female vacuum flange connection, and have MKS part number 722C12TCD2FA. Compatible Controller and Cables: P102061 - MKS PDR 2000 Power Supply and Digital Readout Cable 9-Pin Cable CB2000S-2-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 9-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition High accuracy over a wide operating temperature range Overpressure limit of 45 psia or 2x Full Scale (whichever is greater) assures no degradation in zero repeatability or performance All wetted sensor surfaces are micro-finished to =10 Ra, eliminating inclusion sites for corrosion growth Smaller manometer size helps achieve overall system size reduction Corrosion resistant - all-metal, all-welded con­struction exposes only Inconel and stainless steel to the media Drop in replacement compatible with earlier 722 Baratron capacitance manometers

MKS 722C General Purpose Baratron Absolute Capacitance Manometer, Pressure Range 1,000 Torr, VCR 4 Vacuum Fitting, 9-Pin Type D Connector, PN 722C13TCD2FA. Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty. These listing is for an MKS Type 722C general purpose capacitance manometers having a 9-pin D-subminiature signal connector, a 1,000 Torr full scale maximum vacuum pressure reading value, a VCR 4 female vacuum flange connection, and have MKS part number 722C13TCD2FA. Compatible Controller and Cables: P102061 - MKS PDR 2000 Power Supply and Digital Readout Cable 9-Pin Cable CB2000S-2-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 9-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition High accuracy over a wide operating temperature range Overpressure limit of 45 psia or 2x Full Scale (whichever is greater) assures no degradation in zero repeatability or performance All wetted sensor surfaces are micro-finished to =10 Ra, eliminating inclusion sites for corrosion growth Smaller manometer size helps achieve overall system size reduction Corrosion resistant - all-metal, all-welded con­struction exposes only Inconel and stainless steel to the media Drop in replacement compatible with earlier 722 Baratron capacitance manometers

MKS 722C General Purpose Baratron Absolute Capacitance Manometer, Pressure Range 5,000 Torr, VCR 4 Vacuum Fitting, 9-Pin Type D Connector, PN 722C53TCD2FA. Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty. These listing is for an MKS Type 722C general purpose capacitance manometers having a 9-pin D-subminiature signal connector, a 5,000 Torr full scale maximum vacuum pressure reading value, a VCR 4 female vacuum flange connection, and have MKS part number 722C53TCD2FA. Compatible Controller and Cables: P102061 - MKS PDR 2000 Power Supply and Digital Readout Cable 9-Pin Cable CB2000S-2-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 9-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition High accuracy over a wide operating temperature range Overpressure limit of 45 psia or 2x Full Scale (whichever is greater) assures no degradation in zero repeatability or performance All wetted sensor surfaces are micro-finished to =10 Ra, eliminating inclusion sites for corrosion growth Smaller manometer size helps achieve overall system size reduction Corrosion resistant - all-metal, all-welded con­struction exposes only Inconel and stainless steel to the media Drop in replacement compatible with earlier 722 Baratron capacitance manometers

MKS 722C General Purpose Baratron Absolute Capacitance Manometer, Pressure Range 10,000 Torr, VCR 4 Vacuum Fitting, 9-Pin Type D Connector, PN 722C14TCD2FA. Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty. These listing is for an MKS Type 722C general purpose capacitance manometers having a 9-pin D-subminiature signal connector, a 10,000 Torr full scale maximum vacuum pressure reading value, a VCR 4 female vacuum flange connection, and have MKS part number 722C14TCD2FA. Compatible Controller and Cables: P102061 - MKS PDR 2000 Power Supply and Digital Readout Cable 9-Pin Cable CB2000S-2-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 9-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition High accuracy over a wide operating temperature range Overpressure limit of 45 psia or 2x Full Scale (whichever is greater) assures no degradation in zero repeatability or performance All wetted sensor surfaces are micro-finished to =10 Ra, eliminating inclusion sites for corrosion growth Smaller manometer size helps achieve overall system size reduction Corrosion resistant - all-metal, all-welded con­struction exposes only Inconel and stainless steel to the media Drop in replacement compatible with earlier 722 Baratron capacitance manometers

MKS 722C General Purpose Baratron Absolute Capacitance Manometer, Pressure Range 20,000 Torr, VCR 4 Vacuum Fitting, 9-Pin Type D Connector, PN 722C24TCD2FA. Today’s process environments require small-sized pressure measurement instruments that provide accurate, repeatable, and reliable measurements at a lower cost. MKS has applied its expertise in capacitance manometer design and manufacturing technology to the development of the compact, 722C general purpose absolute Baratron® capacitance manometer. The flexible design of the 722C makes it an ideal solution for retrofit applications as well as new equipment designs. Robust sensor construction provides high overpressure tolerances, reducing errors caused by occasional line pressure spikes. All sensor wetted surfaces are made from Inconel® to ensure maximum compatibility with many process gases1. Sophisticated technology and strict process controls ensure clean, smooth finishes (=10 Ra) on all wetted surfaces. Signal conditioning circuitry is assembled using the latest techniques in surface mount technology. All transducers are backed with a full two-year warranty. These listing is for an MKS Type 722C general purpose capacitance manometers having a 9-pin D-subminiature signal connector, a 20,000 Torr full scale maximum vacuum pressure reading value, a VCR 4 female vacuum flange connection, and have MKS part number 722C24TCD2FA. Compatible Controller and Cables: P102061 - MKS PDR 2000 Power Supply and Digital Readout Cable 9-Pin Cable CB2000S-2-M1 P102062 - MKS PDR 2000 Digital Power Supply and Digital Readout Capacitance Manometer Controller P1010127 - Ideal Vacuum Dual Capacitance Manometer Controller (DCM), Power Supply and Digital Pressure Readout Product Features: 0 to 10 VDC proportional analog output with 9-pin D-sub connector Direct measurement of chamber total pressure independent of gas type or composition High accuracy over a wide operating temperature range Overpressure limit of 45 psia or 2x Full Scale (whichever is greater) assures no degradation in zero repeatability or performance All wetted sensor surfaces are micro-finished to =10 Ra, eliminating inclusion sites for corrosion growth Smaller manometer size helps achieve overall system size reduction Corrosion resistant - all-metal, all-welded con­struction exposes only Inconel and stainless steel to the media Drop in replacement compatible with earlier 722 Baratron capacitance manometers

MKS Manometer Cable Connects 937B or 946 Controllers to 722 Manometers, DB9 Male to DB9 Female, 10 ft. (3m) Long. MKS Part Number: 100016951. The MKS Manometer cable connects 937B or 946 controllers to Series 722 capacitance manometers. It has 9-pin type D subminiature connectors. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

MKS Manometer Cable Connects 937B or 946 Controllers to 722 Manometers, DB9 Male to DB9 Female, 25 ft. (7.5m). Long. MKS Part Number: 100016952. The MKS Manometer cable connects 937B or 946 controllers to Series 722 Manometers, DB9 Male to DB9 Female. It has 9-pin type D subminiature connectors. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

MKS Vacuum Sensor Card Dual Convection Pirani, for Series 937B and 946 Controllers. MKS Part Number: 100015132. The MKS Vacuum Sensor Card supports dual pirani convection sensors and is used with the 937B and 946 vacuum system controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 and 937B Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

MKS HPS® Series 317 Convection Enhanced Pirani Sensor KF16 NW16 (PN 103170010SH) (Compatible with MKS 947 Convection Enhanced Pirani Gauge Controller) The MKS HPS® 317 Convection-Enhanced Pirani Sensor provides dependable and stable pressure measurement at a very low cost. Since the only materials exposed to vacuum are stainless steel, nickel, glass, and platinum, the sensor is compatible with a wide array of process gases and is especially suitable for UHV applications. The platinum filament effectively eliminates any reading variance throughout a convection sensor’s higher measuring range. More accurate than a thermocouple sensor, the 317 Sensor measures over a wider pressure range and responds more rapidly to process pressure changes. The upper measuring limit of a convection-enhanced Pirani sensor is increased over that of a traditional Pirani sensor from 100 Torr to 1,000 Torr. This higher limit is useful when monitoring the pumpdown of a vacuum system from atmosphere to a base pressure. The sensor compensates for any changes in room temperature ranging from 10° to 50°C. Like all thermal conductivity sensors, the 317 sensor is innately gas-type sensitive. This feature makes it a simple solution for locating medium to fine leaks in vacuum systems. It complements a mass spectrometer leak detector, which is more efficient in finding smaller leaks. The sensor, which is shielded against RF noise, meets CE mark requirements and can be baked to 100°C. This 317 Sensor include standard vacuum connections such as this KF16 NW16 flange. The cable for this sensor is not included but available in standard 10 feet lengths. The 317 Sensor can be used with the Series 947 Convection Pirani Vacuum Gauge Controller also sold on this website. A complete specification brochure and operations manual are available download in PDF format below.

MKS HPS® Series 317 Convection Enhanced Pirani Sensor KF25 NW25 (PN 103170027SH) (Compatible with MKS 947 Convection Enhanced Pirani Gauge Controller) The MKS HPS® 317 Convection-Enhanced Pirani Sensor provides dependable and stable pressure measurement at a very low cost. Since the only materials exposed to vacuum are stainless steel, nickel, glass, and platinum, the sensor is compatible with a wide array of process gases and is especially suitable for UHV applications. The platinum filament effectively eliminates any reading variance throughout a convection sensor’s higher measuring range. More accurate than a thermocouple sensor, the 317 Sensor measures over a wider pressure range and responds more rapidly to process pressure changes. The upper measuring limit of a convection-enhanced Pirani sensor is increased over that of a traditional Pirani sensor from 100 Torr to 1,000 Torr. This higher limit is useful when monitoring the pumpdown of a vacuum system from atmosphere to a base pressure. The sensor compensates for any changes in room temperature ranging from 10° to 50°C. Like all thermal conductivity sensors, the 317 sensor is innately gas-type sensitive. This feature makes it a simple solution for locating medium to fine leaks in vacuum systems. It complements a mass spectrometer leak detector, which is more efficient in finding smaller leaks. The sensor, which is shielded against RF noise, meets CE mark requirements and can be baked to 100°C. This 317 Sensor include standard vacuum connections such as this KF25 NW25 flange. The cable for this sensor is not included but available in standard 10 feet lengths. The 317 Sensor can be used with the Series 947 Convection Pirani Vacuum Gauge Controller also sold on this website. A complete specification brochure and operations manual are available for download in PDF format below.

MKS HPS® Series 317 Convection Enhanced Pirani Vacuum Sensor features a 0.001 to 1000 Torr, Conflat CF 1.33 in. MKS Part Number: 103170013SH. The MKS HPS® 317 Convection-Enhanced Pirani Sensor provides dependable and stable pressure measurement at a very low cost, Compatible with MKS 947 Convection Enhanced Pirani Gauge Controller. Since the only materials exposed to vacuum are stainless steel, nickel, glass, and platinum, the sensor is compatible with a wide array of process gases and is especially suitable for UHV applications. The platinum filament effectively eliminates any reading variance throughout a convection sensor’s higher measuring range. More accurate than a thermocouple sensor, the 317 Sensor measures over a wider pressure range and responds more rapidly to process pressure changes. The upper measuring limit of a convection-enhanced Pirani sensor is increased over that of a traditional Pirani sensor from 0.001 to 1,000 Torr. This higher limit is useful when monitoring the pumpdown of a vacuum system from atmosphere to a base pressure. The sensor compensates for any changes in room temperature ranging from 10° to 50°C. Like all thermal conductivity sensors, the 317 sensor is innately gas-type sensitive. This feature makes it a simple solution for locating medium to fine leaks in vacuum systems. It complements a mass spectrometer leak detector, which is more efficient in finding smaller leaks. The sensor, which is shielded against RF noise, meets CE mark requirements and can be baked to 100°C. This 317 Sensor include standard vacuum connections such as this CF 1.33 inch Mini-CF flange fitting. The cable for this sensor is not included but available in standard 10 feet lengths. The 317 Sensor can be used with the Series 947 Convection Pirani Vacuum Gauge Controller also sold on this website. A complete specification brochure and operations manual are available for download in PDF format below.

MKS HPS® Series 317 Convection Enhanced Pirani Vacuum Sensor features a 0.001 to 1000 Torr, Conflat CF 1.33 in. MKS Part Number: 103170013SH. The MKS HPS® 317 Convection-Enhanced Pirani Sensor provides dependable and stable pressure measurement at a very low cost, Compatible with MKS 947 Convection Enhanced Pirani Gauge Controller. Since the only materials exposed to vacuum are stainless steel, nickel, glass, and platinum, the sensor is compatible with a wide array of process gases and is especially suitable for UHV applications. The platinum filament effectively eliminates any reading variance throughout a convection sensor’s higher measuring range. More accurate than a thermocouple sensor, the 317 Sensor measures over a wider pressure range and responds more rapidly to process pressure changes. The upper measuring limit of a convection-enhanced Pirani sensor is increased over that of a traditional Pirani sensor from 0.001 to 1,000 Torr. This higher limit is useful when monitoring the pumpdown of a vacuum system from atmosphere to a base pressure. The sensor compensates for any changes in room temperature ranging from 10° to 50°C. Like all thermal conductivity sensors, the 317 sensor is innately gas-type sensitive. This feature makes it a simple solution for locating medium to fine leaks in vacuum systems. It complements a mass spectrometer leak detector, which is more efficient in finding smaller leaks. The sensor, which is shielded against RF noise, meets CE mark requirements and can be baked to 100°C. This 317 Sensor include standard vacuum connections such as this CF 1.33 inch Mini-CF flange fitting. The cable for this sensor is not included but available in standard 10 feet lengths. The 317 Sensor can be used with the Series 947 Convection Pirani Vacuum Gauge Controller also sold on this website. A complete specification brochure and operations manual are available for download in PDF format below.

MKS Vacuum Gauge Cable for 345 or 317 Connecting to 945, 947, 937B or 946 Controllers, 25 ft. (7.5m) Long. MKS Part Number: 103170007SH. The MKS vacuum gauge signal cable connects 345 or 317 vacuum gauge sensors to 945, 947, 937B, or 946 controllers. It connects to the back of the MKS controllers and to the side of the MKS 345 or 317 Pirani Sensor. This is the Cable ONLY. The Series 947 Convection-Enhanced Pirani Controller offers many standard features and is easy to use. An analog output signal proportional to pressure is standard and is accessible from the rear of the controller, there is where this cable is connected. Processes are controlled with two independent relay set points that are standard on this single-channel controller. The relays can be set to trip anywhere within the controller’s set point range. All of the operating controls are conveniently accessible from the front panel of the controller, including the power on-off switch. Adjust set points from the front panel while viewing the large, easy-to-read display. Set point activation is shown with red LED indicators. Set points can be checked at any time with no break in process control.

MKS Vacuum Gauge Cable for 345 or 317 Connecting to 937B and 946 Controllers, 10 Ft. (3m) Long. MKS Part Number: 103170006SH. The MKS vacuum gauge signal cable connects 345 or 317 vacuum gauge sensors to 945, 947, 937B, and 946 controllers. It connects to the back of the MKS controllers and to the side of the MKS 345 or 317 Pirani Sensor. This is the Cable ONLY. The Series 947 Convection-Enhanced Pirani Controller offers many standard features and is easy to use. An analog output signal proportional to pressure is standard and is accessible from the rear of the controller, there is where this cable is connected. Processes are controlled with two independent relay set points that are standard on this single-channel controller. The relays can be set to trip anywhere within the controller’s set point range. All of the operating controls are conveniently accessible from the front panel of the controller, including the power on-off switch. Adjust set points from the front panel while viewing the large, easy-to-read display. Set point activation is shown with red LED indicators. Set points can be checked at any time with no break in process control.

MKS Granville Phillips 275 Convectron Gauge Vacuum Pressure Measurement Sensor, 1/8 Male NPT MKS Granville Phillips Part Number 275071 The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10-4 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is avaliable but not included at list price).

MKS Granville Phillips 275 Convectron Gauge Vacuum Pressure Measurement Sensor, 1/4 inch Female 4 VCR Fitting MKS Granville Phillips Part Number: 275185 The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10-4 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is not avaliable and is replaced with the MKS Granville Phillips 475).

MKS Granville Phillips 275 Convectron Gauge Vacuum Pressure Measurement Sensor, Conflat 2.75 inch MKS Granville Phillips Part Number: 275238 The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10-4 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is avaliable but not included at list price).

MKS Granville Phillips 275 Convectron Gauge Vacuum Pressure Measurement Sensor, Conflat 8 VCR 1/2 inch flange MKS Granville Phillips Part Number: 275282 The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10-4 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller is replaced by the MKS Granville Phillips 475, not included).

MKS Granville Phillips 275 Convectron Gauge Vacuum Pressure Measurement Sensor, Conflat 1.33 flange MKS Granville Phillips Part Number: 275256 The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10-4 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is avaliable but not included at list price).

MKS Granville Phillips 275 Convectron Gauge Vacuum Pressure Measurement Sensor, NW KF 16 Flange MKS Granville Phillips Part Number: 275203 The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10-4 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is avaliable but not included at list price).

MKS Granville Phillips 275 Convectron Gauge Vacuum Pressure Measurement Sensor, NW KF 25 Flange MKS Granville Phillips Part Number: 275196 The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10-4 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is avaliable but not included at list price).

MKS Granville Phillips 275 Convectron Gauge Vacuum Pressure Measurement Sensor, NW KF 40 Flange MKS Granville Phillips Part Number: 275316 The 275 MKS Granville Phillips convectron pressure measurement gauge tube sensor is the industry standard convection-enhanced Pirani gauge. The MKS Granville Phillips 275 measures vacuum pressure from atmosphere to 1x10-4 Torr and are ideal for roughing and foreline pressure measurement. It provides reliable fast response measurement, in milliseconds rather than seconds as in the case with thermocouple-type gauges. The high accuracy of the MKS Granville Phillips 275 Convectron vacuum gauge sensor and repeatablilty help insure that processes start at the desired pressure time-after-time. However, they are sensitive to the chemical composition of the gases being measured and are termed a relative pressure measurement method, that is, they determine the pressure indirectly from the thermal conductivity property of the gas medium. (MKS Granville Phillips 375 Convectron Controller shown in photographs is avaliable but not included at list price).

MKS Vacuum Gauge Cable Connects 937B Controllers to GP275 Vacuum Gauges, 10 ft. (3m) Long. MKS Part Number: 100016980. The MKS vacuum gauge signal cable connects 937B controllers to GP275 vacuum gauges. It connects to the back of the MKS controllers and to the side of the GP275 vacuum gauges. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

MKS Vacuum Gauge Cable Connects 937B Controllers to GP275 Vacuum Gauges, 25 ft. (7.5m) Long. MKS Part Number: 100016981. The MKS vacuum gauge signal cable connects 937B controllers to GP275 vacuum gauges. It connects to the back of the MKS controllers and to the side of the GP275 vacuum gauges. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

MKS Vacuum Sensor Card Cold Cathode, for Series 937B and 946 Controllers. MKS Part Number: 100018446. The MKS Vacuum Sensor Card Cold Cathode is used with the 937B and 946 vacuum system controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 and 937B Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

MKS HPS® 423 I-Mag® Sensor Cold Cathode Vacuum Gauge KF25, NW25, compatible with MKS 943 Cold Cathode vacuum controller. MKS Part Number: 104230004 Using an inverted magnetron design, the 423 I-Mag® sensor can operate at pressures much lower than a traditional Penning cold cathode sensor, as low as 10-11 Torr with the proper controller. This increased pressure range makes the HPS® Cold Cathode sensor ideal for UHV use. A unique design feature of the HPS® Cold Cathode sensor is a second feedthrough for ion collection. In an ordinary single feedthrough design, any current leakage between the anode and ground would result in pressure measurement errors. Only the ion current from the cathode contributes to a measurement reading in a dual feedthrough design, making it ideal for process monitoring. With no filament to burn out, the 423 I-Mag® sensor is not ruined by sudden inrushes of air and is resistant to vibration damage. Additionally, there is no need to adjust the emission current or to degas the gauge, reducing response time to pressure changes. If bakeout is required, the magnets and sensor connectors can be removed and the sensor can be baked to 400°C. This is a Cold Cathode Sensor ONLY, the MKS signal cable and MKS 943 Controller for this unit are sold separetely on this website. A complete specification brochure and operations manual are available for download in PDF format below.

MKS HPS 423 I-Mag Sensor Cold Cathode Vacuum Gauge Conflat 2.75 Inlet. MKS Part Number: 104230002. (Compatible with MKS 943 Cold Cathode Vacuum Controller) Using an inverted magnetron design, the 423 I-Mag Sensor can operate at pressures much lower than a traditional Penning cold cathode sensor, as low as 10-11 Torr with the proper controller. This increased pressure range makes the HPS Cold Cathode sensor ideal for UHV use. A unique design feature of the HPS Cold Cathode sensor is a second feedthrough for ion collection. In an ordinary single feedthrough design, any current leakage between the anode and ground would result in pressure measurement errors. Only the ion current from the cathode contributes to a measurement reading in a dual feedthrough design, making it ideal for process monitoring. With no filament to burn out, the 423 I-Mag sensor is not ruined by sudden inrushes of air and is resistant to vibration damage. Additionally, there is no need to adjust the emission current or to degas the gauge, reducing response time to pressure changes. If bakeout is required, the magnets and sensor connectors can be removed and the sensor can be baked to 400°C. This is a Brand New Cold Cathode Sensor ONLY the MKS signal cable and MKS 943 Controller for this unit are sold separetely on this website. A complete specification brochure and operations manual are available for download in PDF format below.

MKS Vacuum Gauge Cable Connects 946 Controller to 423 I-Mag® Cold Cathode Sensor, 10 ft. (3m) Long. MKS Part Number: 100016295. The MKS Manometer cable connects 946 controllers to 423 I-Mag® Cold Cathode sensor. This is the cable ONLY. The series 937B digital combination vacuum gauge controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

MKS Vacuum Gauge Cable Connects 946 Controller to 423 I-Mag Cold Cathode Sensor, 25 ft. (7.5m) Long. MKS Part Number: 100016296. The MKS Manometer cable connects 946 controllers to 423 I-Mag Cold Cathode Sensor. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

MKS 431 Cold Cathode Vacuum Sensor, 1x10-11 to 1x10-2 Torr, CF-2.75 in. Flange Fitting. MKS Part Number: 104310002. The MKS 431 Cold Cathode Vacuum Sensor features a 1x10-11 to 1x10-2 Torr vacuum measurement range, high operating temperature and a 2.75 inch size CF flange fitting. It is based on the ionization probability of the gas, with the ionization as a result of a high voltage discharge of electrons. These cold cathode pressure vacuum sensors are based on an inverted magnetron design, for an increased measurement range. The dual feedthrough for ion collection is a unique feature, making the pressure reading more accurate than other cold cathode vacuum and pressure sensors. Signal cables for this cold cathode vacuum sensor are available on this website.

MKS Manometer Cable Connects 937B or 946 Controllers to 431 I-Mag® Cold Cathode Sensor, 10 ft. (3m) Long. MKS Part Number: 100016217. The MKS Manometer cable connects 937B or 946 controllers to 431 I-Mag® Cold Cathode Sensor. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

MKS Manometer Cable Connects 937B or 946 Controllers to 431 I-Mag® Cold Cathode Sensor, 25 ft. (7.5m) Long. MKS Part Number: 100016218. The MKS Manometer cable connects 937B or 946 controllers to 431 I-Mag® Cold Cathode Sensor. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

MKS Vacuum Sensor Card Hot Cathode, for Series 937B and 946 Controllers. MKS Part Number: 100015641. The MKS Vacuum Sensor Card Cold Cathode is used with the 937B and 946 vacuum system controllers. These cards are used on controllers designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 and 937B Vacuum System Controllers simultaneous readout & control of up to 6 sensors and gauges.

MKS Hot Cathode Vacuum Sensor Nude Tube, Iridium Filament for 1x10-2 to 1x10-11 Torr, CF-2.75 in Flange Fitting. MKS Part Number: 100006842. The MKS Nude Tube Vacuum Sensor features a Yttria-coated Iridium filament for a 1x10-2 to 1x10-11 Torr vacuum measurement range and a 2.75 in. CF flange fitting. This Bayard-Alpert style ionization vacuum sensor, which uses a fine wire collector located in the center of a grid. Because of its small area, few x-rays hit the collector, and a vacuum gauge can measure pressures to very low levels. Because the sensing portion of the tube is located within the vacuum system and experiences the system true pressure, nude tubes give a representative pressure measurement and respond more quickly than a glass envelope sensor to pressure changes. Signal cables for this cold cathode vacuum sensor are available on this website.

MKS Hot Cathode Vacuum Sensor Nude Tube, tungsten filament for 1x10-2 to 1x10-11 Torr, CF-2.75 in Flange Fitting. MKS Part Number: 100005980. The MKS Nude Tube Vacuum Sensor features a tungsten filament for a 1x10-2 to 1x10-11 Torr vacuum measurement range and a 2.75 in. CF flange fitting. This Bayard-Alpert style ionization vacuum sensor, which uses a fine wire collector located in the center of a grid. Because of its small area, few x-rays hit the collector, and a vacuum gauge can measure pressures to very low levels. Because the sensing portion of the tube is located within the vacuum system and experiences the system true pressure, nude tubes give a representative pressure measurement and respond more quickly than a glass envelope sensor to pressure changes. Signal cables for this cold cathode vacuum sensor are available on this website.

MKS Vacuum Gauge Cable Connects 937B or 946 to Hot Cathode Low Power Nude, 10 ft. (3m) Long. MKS Part Number: 100010909. The MKS Manometer cable connects 937B or 946 to Hot Cathode Low Power Nude. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

MKS Vacuum Gauge Cable Connects 937B or 946 to Hot Cathode Low Power Nude, 25 ft. (7.5m) Long. MKS Part Number: 100010910. The MKS Manometer cable connects 937B or 946 to Hot Cathode Low Power Nude. This is the Cable ONLY. The Series 937B Digital Combination Vacuum Gauge Controller operates up to six vacuum pressure sensors simultaneously. This highly flexible vacuum gauge controller supports a wide range of sensor technologies, including cold cathode, hot cathode, standard Pirani, convection Pirani, Baratron® capacitance manometers and absolute Piezo sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. The back lit LCD display, intuitive menus and simple push button front panel, allows for ease in setup of the 937B. The 937B, enables the use of any sensor card in each of the sensor card slots. The 937B can be configured with up to three hot or cold cathode type gauges, or three dual sensor cards for a maximum of six gauge connections.

MKS T2BA Butterfly Exhaust Throttle Valve, KF40, "F-Seal" (Viton O-ring on flapper), Low Power Motor (8 in-lbs), 105°C, RS232, with +/-15VDC Sensor Power Supply (for Baratron). MKS Part Number: T2BA01K320003V210025. The MKS T2BA Exhaust Throttle Valve is specifically designed for applications where a simple, yet advanced, pressure control system is desired. The T2BA integrates all control, communication, and driver circuits within a throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The unique model-based control algorithm and high-speed operation drives the system to set point quickly with minimum overshoot, and ensures repeatable process recipes without operator involvement. Product Features:Compact pressure control system - valve with integrated on-board controller electronics - Easy integration, no need for additional cables or rack space High-speed configurations available (<250 msec. open to close) - Faster set point and recovery from flow and pressure perturbations - Enables high tool throughput Selectable high torque drives - Extends uptime in harsh process conditions Dual channel Baratron® sensor input with range auto switching - Supports wide dynamic pressure control range - Allows for high pressure control accuracy Advanced model-based pressure control algorithm - Minimizes time to set point - Ensures repeatable process recipes without operator involvement Available in low conductance soft-sealing versions - Supports high-pressure processes even at low flows (Epi, RTP, SACVD and more) - Suitable for "house exhaust" or atmospheric applications Provides power for connected Baratron capacitance manometers (optional, some models) The T2BA Exhaust Throttle Valve can operate in two primary modes: flapper positioning or pressure control, either of which can be user-activated through the I/O interface. All of the adjustable setup parameters, run time operation, and diagnostics information is available through the communications interface. EtherCAT T2BA is fully compatible with EtherCAT manometers. Analog manometers require a gateway. The downstream pressure control technique provides wide dynamic range, works with all types of pumps, provides fast response, and is tolerant to most effluent gases. The "intelligent instrument" concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions. The T2BA utilizes a direct drive high-speed stepper motor. The valve driver provides high resolution pressure control. The optional, high torque direct drive motor provides extended uptime and extends preventative maintenance cycles — a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The T2BA is also available in geared versions, providing maximum torque and enabling long-term operation in harsh environments.The T2BA valves are optionally heatable up to 200°C with available MKS external heaters (proper selection of seal materials is required). The T2BA is available in unique MKS low-conductance versions, enabling high-speed pressure control in atmospheric applications, including exhaust pressure control, CVD and RTP without a need for relying on O-Ring-based designs to minimize valve conductance. An encoder-based position feedback system is provided for diagnostic purposes. The valve is constructed of corrosion-resistant 316 stainless steel compatible with most process gases and is available in standard ISO flange styles with bore sizes from 1" to 4" (alternate sizes available on a custom basis). Standard seals offered are Viton®, alternate materials can be specified for compatibility with various process chemistries and/or heated applications.

MKS T2BA Butterfly Exhaust Throttle Valve, ISO100, Non-Sealing (No O-ring; 0.003" Radial Gap), Low Power Motor (8 in-lbs), 105°C,Viton (body seal), RS232, with +/-15VDC Sensor Power Supply (for Baratron). MKS Part Number: T2BA04N220303V210025. The MKS T2BA Exhaust Throttle Valve is specifically designed for applications where a simple, yet advanced, pressure control system is desired. The T2BA integrates all control, communication, and driver circuits within a throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The unique model-based control algorithm and high-speed operation drives the system to set point quickly with minimum overshoot, and ensures repeatable process recipes without operator involvement. Product Features:Compact pressure control system - valve with integrated on-board controller electronics - Easy integration, no need for additional cables or rack space High-speed configurations available (<250 msec. open to close) - Faster set point and recovery from flow and pressure perturbations - Enables high tool throughput Selectable high torque drives - Extends uptime in harsh process conditions Dual channel Baratron® sensor input with range auto switching - Supports wide dynamic pressure control range - Allows for high pressure control accuracy Advanced model-based pressure control algorithm - Minimizes time to set point - Ensures repeatable process recipes without operator involvement Available in low conductance soft-sealing versions - Supports high-pressure processes even at low flows (Epi, RTP, SACVD and more) - Suitable for "house exhaust" or atmospheric applications Provides power for connected Baratron capacitance manometers (optional, some models) The T2BA Exhaust Throttle Valve can operate in two primary modes: flapper positioning or pressure control, either of which can be user-activated through the I/O interface. All of the adjustable setup parameters, run time operation, and diagnostics information is available through the communications interface. EtherCAT T2BA is fully compatible with EtherCAT manometers. Analog manometers require a gateway. The downstream pressure control technique provides wide dynamic range, works with all types of pumps, provides fast response, and is tolerant to most effluent gases. The "intelligent instrument" concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions. The T2BA utilizes a direct drive high-speed stepper motor. The valve driver provides high resolution pressure control. The optional, high torque direct drive motor provides extended uptime and extends preventative maintenance cycles — a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The T2BA is also available in geared versions, providing maximum torque and enabling long-term operation in harsh environments.The T2BA valves are optionally heatable up to 200°C with available MKS external heaters (proper selection of seal materials is required). The T2BA is available in unique MKS low-conductance versions, enabling high-speed pressure control in atmospheric applications, including exhaust pressure control, CVD and RTP without a need for relying on O-Ring-based designs to minimize valve conductance. An encoder-based position feedback system is provided for diagnostic purposes. The valve is constructed of corrosion-resistant 316 stainless steel compatible with most process gases and is available in standard ISO flange styles with bore sizes from 1" to 4" (alternate sizes available on a custom basis). Standard seals offered are Viton®, alternate materials can be specified for compatibility with various process chemistries and/or heated applications.

MKS 248D General Purpose Flow Control Valve, 2000 sccm, 1/4 in. Swagelok tube fitting, Viton Seals. MKS Part Number: 0248D-02000SV When supplied with a controlling current, this general purpose modified solenoid valve will modulate the flow of gas. When used with an MKS controller and appropriate flow sensor, the 248D valve modulates gas flow while maintaining accurate and precise pressure or flow. Applications include flow control, upstream, or downstream pressure control. This model 0248D-02000SV valve features a 2000 standard cubic centimetres per minute (sccm) of Nitrogen full scale range, Swagelok® 1/4 in. tube fittings, and Viton seals. Through closed valve leakage conductance is <1x10-5 scc/sec He.Swagelok-TM Swagelok Company

MKS 248D General Purpose Flow Control Valve, 5000 sccm, 1/4 in. Swagelok tube fitting, Viton Seals. MKS Part Number: 0248D-05000RV. When supplied with a controlling current, this general purpose modified solenoid valve will modulate the flow of gas. When used with an MKS controller and appropriate flow sensor, the 248D valve modulates gas flow while maintaining accurate and precise pressure or flow. Applications include flow control, upstream, or downstream pressure control. This model 0248D-05000RV valve features a 5,000 standard cubic centimetres per minute (sccm) of Nitrogen full scale range, Swagelok® 1/4 in. tube fittings, and Viton seals. Through closed valve leakage conductance is <1x10-5 scc/sec He.Swagelok-TM Swagelok Company

MKS 248D General Purpose Flow Control Valve, 10000 sccm, 1/4 in Swagelok tube fitting, Viton Seals. MKS Part Number: 0248D-10000SV. When supplied with a controlling current, this general purpose modified solenoid valve will modulate the flow of gas. When used with an MKS controller and appropriate flow sensor, the 248D valve modulates gas flow while maintaining accurate and precise pressure or flow. Applications include flow control, upstream, or downstream pressure control. This model 0248D-10000SV valve features a 10000 standard cubic centimetres per minute (sccm) of Nitrogen full scale range, Swagelok® 1/4 in. tube fittings, and Viton seals. Through closed valve leakage conductance is <1x10-5 scc/sec He.Swagelok-TM Swagelok Company

MKS Mass Flow Controller Cable Connects 946 Controller to 248D Flow Control Valves, 10 ft. (3m) Long. MKS Part Number: 100018192. The MKS Mass Flow Controller cable connects 946 Controller to 248D Flow Control Valves. This is the Cable ONLY. The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables for the MKS 946 are available on this website.

MKS Mass Flow Controller Cable Connects 946 Controller to 248D Flow Control Valves, 25 ft. (7.5m) Long. MKS Part Number: 100018192-25. The MKS Mass Flow Controller cable connects 946 Controller to 248D Flow Control Valves. This is the Cable ONLY. The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables for the MKS 946 are available on this website.

MKS Half Rack Mounting Kit for Series 937B and 946 Vacuum Gauge Controllers. MKS Part Number: RM-13. The MKS Half Rack Mounting Kit is compatible with series 937B and 946 Vacuum Gauge Controllers. This is the hardware ONLY. The MKS 946 is a versatile half-rack vacuum gauge measurement and control system, it provides power and simultaneous readout for up to six different vacuum gauges and/or mass flow controllers, with options for controlling pressure. Power Supplies/Readouts are designed to control and display any flow transducer. The flow rate set point can be adjusted either through front panel controls or remotely through the rear panel analog interface. The 946 Vacuum System Controller is a six channel/sequentially selectable single readout. Compatible with mass flow controllers and mass flow readouts. Signal cables for the MKS 946 are available on this website.