MKS HPS® Series 974 QuadMag MicroPirani™ Piezo Cold Cathode Transducer, KF-40, RS-232. MKS Part Number: 974-91020 The 974 QuadMag offers a measurement range from 1x10-8 to 1500 Torr and combines cold cathode inverted magnetron, MicroPirani™ and Piezo differential sensor technologies. The 974 has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-8Torr and atmospheric switching capabilities. Subsequently, OEM’s can reduce costs with a simplified loadlock design. The 974 can be used on loadlocks or any vacuum chamber requiring both absolute pressure measurement and atmospheric switching capabilities. The Series 974 QuadMag has RS232 or RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. The 974 QuadMag transducers also has an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface.The Series 974 QuadMag has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps. The 974 QuadMag Transducer has a user changeable cold cathode anode module that offers easy serviceability without disassembling of transducer electronics. Customers requiring both a power supply and display can use the 974 QuadMag with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.Specifications and prices are subject to change without notice. HPS® is a registered trademark and MicroPirani™ is a Registered Trademark of ©2009 MKS Instruments, Inc. All rights reserved.Options, (PN) Part Number and Pricing : NEW MKS HPS® Series 974 QuadMag MicroPirani™ Piezo Cold Cathode TransducerNW25 KF, RS-232, SUBD 15pinHD male-no relayPN 974-21020, 2009 Price $12952 3/4 CF, RS-232, SUBD 15pinHD male-no relayPN 974-71020, 2009 Price $1365NW40 KF, RS-232, SUBD 15pinHD male-no relayPN 974-91020, 2009 Price $1325NW25 KF, RS-485, SUBD 15pinHD male-no relayPN 974-22020, 2009 Price $12952 3/4 CF, RS-485, SUBD 15pinHD male-no relayPN 974-72020, 2009 Price $1335NW40 KF, RS-485, SUBD 15pinHD male-no relayPN 974-92020, 2009 Price $1275NW25 KF, RS-232, SUBD 15pinHD male-3 relaysPN 974-21030, 2009 Price $13052 3/4 CF, RS-232, SUBD 15pinHD male-3 relaysPN 974-71030, 2009 Price $1375NW40 KF, RS-232, SUBD 15pinHD male-3 relaysPN 974-91030, 2009 Price $1315NW25 KF, RS-485, SUBD 15pinHD male-3 relaysPN 974-22030, 2009 Price $13052 3/4 CF, RS-485, SUBD 15pinHD male-3 relaysPN 974-72030, 2009 Price $1395NW40 KF, RS-485, SUBD 15pinHD male-3 relaysPN 974-92030, 2009 Price $1315?All Prices subject to change without notice?

MKS 974B QuadMag Cold Cathode Transducer KF-25, 1 x 10-8 to 1500 Torr. RS232, Absolute Process Measurement. MKS Part Number: 974B-21020 The MKS 974B QuadMag Cold Cathode Transducer belongs to the MKS 970 Series, a family of compact, low cost, general-purpose transducers that utilize from one to four sensors- cold cathode, MicroPirani™, and Piezo technologies. Combining these sensing technologies enables a wide measurement range from atmosphere to 10-8 Torr. In addition to its small size, broad range and lower cost, the 970 Series can be operated via digital communication or as an autonomous analog unit. The transducer measurement range is 10-5 to 1,500 Torr. The Piezo is a direct-reading absolute pressure sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range. The Piezo will measure from 10-1 to 1,500 Torr.The MicroPirani performs an autozero function to the Piezo when pressure is below 10-2 Torr. Unlike traditional Pirani gauges, the element in the MicroPirani™ is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. A traditional Pirani sensor has a measuring range from 10-3 to about 100 Torr, rapidly losing sensitivity above 10 Torr. Because the size of the sensing portion of the MicroPirani™ is so small, it has a range down to 10-5 Torr. The design minimizes the effects of convection, so operation is possible in any position without compromising accuracy, for simplified installation. The transducer includes a push button zero control than can be used when pressure is below 10-5 Torr. The MKS 974B QuadMag Cold Cathode Transducer with digital communication allows for all adjustments and monitoring to be delivered real-time, via a host computer. The MKS 974B Transducer supports RS485 or RS232 communication as a standard feature. This 974B QuadMag Cold Cathode Transducer provides a 1 to 9 volt DC analog output signal at the male 15 pin high density D-sub connector. The transducer output is smoothed between the two sensors and reads from both sensors in the 5 to 15 Torr range. For process control, the 974B has three independent relay setpoints. Features of the setpoints can be set, adjusted and monitored through the digital port. Like all thermal conductivity sensors, the MicroPiraniTM is gas-type sensitive. The Piezo measures independent of gas type. The 974B provides a digital leak detection output that measures differential reading between the Piezo and MicroPirani™. This makes it a simple solution for locating medium to fine leaks in vacuum systems. Customers requiring both a power supply and display can use the 974B DualTrans with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.

MKS 974B QuadMag Cold Cathode Transducer KF-40, 1 x 10-8 to 1500 Torr. MKS Part Number: 974B-92020 The MKS 974B QuadMag Cold Cathode Transducer belongs to the MKS 970 Series, a family of compact, low cost, general-purpose transducers that utilize from one to four sensors- cold cathode, MicroPirani™, and Piezo technologies. Combining these sensing technologies enables a wide measurement range from atmosphere to 10-8 Torr. In addition to its small size, broad range and lower cost, the 970 Series can be operated via digital communication or as an autonomous analog unit. The transducer measurement range is 10-5 to 1,500 Torr. The Piezo is a direct-reading absolute pressure sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range. The Piezo will measure from 10-1 to 1,500 Torr.The MicroPirani performs an autozero function to the Piezo when pressure is below 10-2 Torr. Unlike traditional Pirani gauges, the element in the MicroPirani™ is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. A traditional Pirani sensor has a measuring range from 10-3 to about 100 Torr, rapidly losing sensitivity above 10 Torr. Because the size of the sensing portion of the MicroPirani™ is so small, it has a range down to 10-5 Torr. The design minimizes the effects of convection, so operation is possible in any position without compromising accuracy, for simplified installation. The transducer includes a push button zero control than can be used when pressure is below 10-5 Torr. The MKS 974B QuadMag Cold Cathode Transducer with digital communication allows for all adjustments and monitoring to be delivered real-time, via a host computer. The MKS 974B Transducer supports RS485 or RS232 communication as a standard feature. This 974B QuadMag Cold Cathode Transducer provides a 1 to 9 volt DC analog output signal at the male 15 pin high density D-sub connector. The transducer output is smoothed between the two sensors and reads from both sensors in the 5 to 15 Torr range. For process control, the 974B has three independent relay setpoints. Features of the setpoints can be set, adjusted and monitored through the digital port. Like all thermal conductivity sensors, the MicroPiraniTM is gas-type sensitive. The Piezo measures independent of gas type. The 974B provides a digital leak detection output that measures differential reading between the Piezo and MicroPirani™. This makes it a simple solution for locating medium to fine leaks in vacuum systems. Customers requiring both a power supply and display can use the 974B DualTrans with the PDR900 Series Controller sold on this website. For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.

MKS PDR900 Vacuum Gauge Controller for Series 900 Transducers The MKS The PDR900 power supply and readout unit is a stand alone, single channel controller for use with the Series 900 digital vacuum transducers. The instrument sets new standards for vacuum gauge controllers and can be used as a stand-alone power supply readout unit or as a tool for configuration, calibration and diagnostics of system integrated transducers in OEM applications. The PDR900 controller is the ideal solution for vacuum measurement, configuration of digital transducers and advanced system diagnostics. The controller features an easy to use menu-driven user interface, which guides the user through setup and configuration of remote transducer parameters. The readout unit communicates digitally with the transducer which eliminates analog measurement noise coupling via transducer cables. The unit automatically detects the 900 series transducer types, and can be used with both RS232 and RS485 transducers (Not compatible with 909/909A or 903 analog transducers). For Complete Specs and Operation Information See AVAILABLE DOWNLOADS Below.