Agilent Varian TwisTorr 804 FS Turbomolecular Vacuum Pump, ISO-200K Inlet Flange, 720 L/S Pumping Speed. Cooling Kit Required, Agilent Varian Part Number X3511-64023. These Agilent Varian TwisTorr 804 FS turbomolecular vacuum pumps are air cooled, with ISO-200K inlet flange, and have the Agilent Floating Suspension with patented TwisTorr drag stages. These Agilent Varian TwisTorr 804 FS turbomolecular high-vacuum pumps have new and improved performance, including a newly designed labyrinth Twistorr drag stage technology and the Agilent Floating Suspension (AFS) along with optimized thermal design mapping. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. These Agilent Varian 804 FS turbomolecular high-vacuum pumps have an ISO-200K inlet flange, an ultimate pressure of 1x10-8 Torr (which is limited by outgassing from the rubber O-ring seal in the intake ISO centering ring), and have an Agilent Varian part number X3511-64023. The Conflat version, with all metal-sealed conflat intake gasket, are true ultra-high vacuum pumps having an ultimate pressure as low as 1x10-10 Torr when used correctly. The required fan air cooling kit is sold separately.This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension System (AFS) reduces noise and vibration, and ensures optimal bearing operating conditions to extend operating life, minimize system downtime, and assure stable pumping performance over long periods of time. The unique ceramic ball bearings with permanent lubrication eliminate oil and maintenance, and permit operation of the pump in any orientation. These TwisTorr 804 FS turbo pumps require a cooling kit, either fan forced-air or water cooling, along with an outboard remote rack-mount or onboard pump-side-mounted controller, all are sold separately by Ideal Vacuum.Agilent turbo pumps are designed for optimum performance in real world applications and include integration of pumping systems and multi-flow pumps. Compact sized pumps meet the needs of industries with stringent space requirements. These new Agilent TwisTorr 804 FS turbo pumps require minimal to no maintenance and provide protection from misuse. These pumps go through a variety of quality and reliability tests to include: Long life, Shock, Vibration, Packaging, Thermal, and Noise. The Agilent Varian TwistTorr 804 FS turbo pump with ISO-200K flange has a pumping speed of 720 l/s of nitrogen, KF-25 (and spare KF-40 interchangable) foreline flange and ambient operating temperature from 5 °C to +35 °C. These 804 FS pumps have a start up time of 3 minutes, Rotational speed up to 49,500 rpm. Recommend foreline pumps are dry IDP-10, IDP-15 or wet DS-302. The cooling requirements are a minimum of forced air when conditions are 5 to 35 °C ambient air temperature or water cooling with water temperature between 15 to 25 °C at a 100 l/h and water pressure max of 75 psi. The new Agilent Twistorr 804 FS offers a blend of performance and features that is suited for a wide range of applications. It is a very versatile turbo and can be used in a variety of fields: Typical Turbo Pump Applications include: Mass Spectrometry Gas Chromatography Mass Spectrometry (GC/MS) Liquid Chromatography Mass Spectrometry (LC/MS) Inductively Coupled Plasma Mass Spectrometry (ICP-MS) Time-of-Flight Mass Spectrometry (TOF) Vacuum in Research and Development: High Energy Physics Fusion Technology General UHV Research Synchrotron Light Sources Particle Accelerators Nanotechnology Instruments: Electron Microscopy Scanning Electron Microscopy (SEM) Transmission Electron Microscopy (TEM) Focused Ion-beam Systems (FIB) Surface Analysis Semiconductor Manufacturing Industrial Vacuum Processing: Thin Film Deposition Glass coating equipment (architectural and automotive glass, flat panel displays) Thin film solar cells production (photo-voltaic) Optical data media (CD, DVD, Magneto Optical Discs) Magnetic storage media Surface treatments Optical coating (ophthalmic, precision opto-electronics) Roll/Web coating on films or foils Device Processing: TV & Monitor picture tube manufacture Evacuation of lamps (motorway lighting, beamers) X-Ray tubes & electron devices General Processes: Vacuum Furnaces Metallurgy

Agilent Varian TwisTorr 804 FS Turbomolecular Vacuum Pump, Conflat CF 10 Inch Inlet Flange, 720 L/S Pumping Speed Cooling Kit Required, Agilent Varian Part Number X3511-64027. These Agilent Varian TwisTorr 804 FS turbomolecular vacuum pumps have a Conflat CF 10 inch inlet flange and have the Agilent Floating Suspension with patented TwisTorr drag stages. These Agilent Varian TwisTorr 804 FS turbomolecular high-vacuum pumps have new and improved performance, including a newly designed labyrinth Twistorr drag stage technology and the Agilent Floating Suspension (AFS) along with optimized thermal design mapping. TwisTorr drag stages create high compression ratios for light gases such as Hydrogen and Helium to deliver high throughput and high tolerance of foreline pressure, thereby permitting the use of smaller and more economical backing pumps. The Agilent Varian TwisTorr 804 FS turbo pumps, with conflat intake, are true ultra-high vacuum (UHV) pumps having an ultimate pressure as low as 1x10-10 Torr when used correctly, for example, the Conflat versions of these pumps allow the intake flange to be baked up to 120 degrees Celsius. The required fan air cooling kit is sold separately.This technology results in a compact rotor design that is energy-efficient and maintains a low operating temperature. The Agilent Floating Suspension System (AFS) reduces noise and vibration, and ensures optimal bearing operating conditions to extend operating life, minimize system downtime, and assure stable pumping performance over long periods of time. The unique ceramic ball bearings with permanent lubrication eliminate oil and maintenance, and permit operation of the pump in any orientation. These TwisTorr 804 FS turbo pumps require a cooling kit, either fan forced-air or water cooling, along with an outboard remote rack-mount or onboard pump-side-mounted controller, all are sold separately by Ideal Vacuum.Agilent turbo pumps are designed for optimum performance in real world applications and include integration of pumping systems and multi-flow pumps. Compact sized pumps meet the needs of industries with stringent space requirements. These new Agilent TwisTorr 804 FS turbo pumps require minimal to no maintenance and provide protection from misuse. These pumps go through a variety of quality and reliability tests to include: Long life, Shock, Vibration, Packaging, Thermal, and Noise. The Agilent Varian TwistTorr 804 FS turbo pump with a Conflat CF 10 inch inlet flange has a pumping speed of 720 l/s of nitrogen, KF-25 (and spare KF-40 interchangable) foreline flange and ambient operating temperature from 5 °C to +35 °C. These 804 FS pumps have a start up time of 3 minutes, Rotational speed up to 49,500 rpm. Recommend foreline pumps are dry IDP-10, IDP-15 or wet DS-302. The cooling requirements are a minimum of forced air when conditions are 5 to 35 °C ambient air temperature or water cooling with water temperature between 15 to 25 °C at a 100 l/h and water pressure max of 75 psi. The new Agilent Twistorr 804 FS offers a blend of performance and features that is suited for a wide range of applications. It is a very versatile turbo and can be used in a variety of fields: Typical Turbo Pump Applications include: Mass Spectrometry Gas Chromatography Mass Spectrometry (GC/MS) Liquid Chromatography Mass Spectrometry (LC/MS) Inductively Coupled Plasma Mass Spectrometry (ICP-MS) Time-of-Flight Mass Spectrometry (TOF) Vacuum in Research and Development: High Energy Physics Fusion Technology General UHV Research Synchrotron Light Sources Particle Accelerators Nanotechnology Instruments: Electron Microscopy Scanning Electron Microscopy (SEM) Transmission Electron Microscopy (TEM) Focused Ion-beam Systems (FIB) Surface Analysis Semiconductor Manufacturing Industrial Vacuum Processing: Thin Film Deposition Glass coating equipment (architectural and automotive glass, flat panel displays) Thin film solar cells production (photo-voltaic) Optical data media (CD, DVD, Magneto Optical Discs) Magnetic storage media Surface treatments Optical coating (ophthalmic, precision opto-electronics) Roll/Web coating on films or foils Device Processing: TV & Monitor picture tube manufacture Evacuation of lamps (motorway lighting, beamers) X-Ray tubes & electron devices General Processes: Vacuum Furnaces Metallurgy

Agilent Varian TwisTorr 404 FS, 704 FS, and 804 FS Turbo Pump Rack-Mount Controller, RS232/485 Communication. Agilent Varian Part Number X3501-64016. The Agilent Varian rack-mount medium turbo controller powers the TwistTorr 404 FS, 704 FS & 804 FS turbo molecular pumps, their cooling fan, and their vent valve. These Agilent Varian 404, 704, & 804 FS medium TMP rack mount turbo pump controllers can operate on 100, 120, 220, or 240 volts AC input power. The turbo pump to controller cable is integral, being built into the rack-mount controller and is standard 10 foot length. A P1 connector on the back side of the rack-mount controller handles interlock and other logic (see photos). All optional accessories, pumps, controllers, and different configurations are available from us at Ideal Vacuum Products. The user’s manual and Agilent Varian TwistTorr 404/704/804 FS medium TMP rack mount controller catalog brochure sections are available for download in PDF format below.

Agilent Varian TwisTorr 404 FS, 704 FS, and 804 FS Onboard Navigator Turbo Pump Controller, RS232/485 Communication. Agilent Varian Part Number PN: X3512-64016. The Agilent Varian onboard navigator turbo controller powers the TwistTorr 404 FS, 704 FS, & 804 FS turbo molecular pumps, their cooling fan, and their vent valve. These Agilent Varian 404 FS, 704 FS, and 804 FS onboard navigator turbo pump controllers can operate on 100, 120, 220, or 240 volts AC input power. A P3 connector on the back side of the controller handles the external vent valve while a p4 connector handles the the external fan. All optional accessories, pumps, controllers, and different configurations are available from us at Ideal Vacuum Products. The user’s manual and Agilent Varian TwistTorr 404/704/804 FS onboard navigator controller catalog brochure sections are available for download in PDF format below.

Varian Agilent AC Main Power Cable NEMA Plug, For Turbo Pump Controllers, 3 Meters. Agilent Varian Part Number PN: 9699958. This Agilent turbomolecular vacuum pump AC main power cable has a NEMA 5-15 plug wall outlet connection and works with most Agilent turbo pump controllers. It is 3 meters long, has Agilent Varian part number 9699958, and works with the following turbo pump models:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent A-Plus Software FREE Download and 3m Long Serial Cable, Interfaces All Agilent Turbos and Turbo Systems to a PC, Formerly T-Plus. Agilent Part Number: 9699883 The Agilent A-Plus software, formerly T-Plus turbo pump control software, and the LabVIEW driver pack can now be downloaded for free from Ideal Vacuum (see free download links below). The downloads include both 32 and 64 bit versions. This listing is for the sale of the Agilent OEM 3 meter long, DB9, male-to-female serial cable that is needed to connect the turbo or turbo system to a PC when using the A-Plus software. Agilent Technologies A-Plus software is a user friendly communication, control, and monitoring application for Agilent Varian turbomolecular pumps and all the other Agilent products that use the Agilent Windows serial protocol. A-Plus software can simultaneously control and drive one or more turbo pumps connected to a PC through an RS232 or an RS485 serial communication port. If the PC has no serial port, a serial to USB cable is available (part number P104165). A-Plus software includes auto recognition of connected pumps and displays the behavior of each connected pump. Descriptions of each command are always present on screen for ease of use. A-Plus software includes options such as data logging, chart representation and network configuration in order to help you quickly configure vacuum devices and to check the vacuum system status at any time. Exhaustive online help is included in the software package. This 3 meter long Agilent cable for A-Plus software has part number 9699883. Agilent A-Plus Software Works with these Pump Models (and others): TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS Varian TPS-Compact Varian TPS-MiniTask

RS232 Serial to USB Adapter Cable for Agilent Varian T-Plus Software when Computer has NO Serial Port. 3 ft. This 3 foot long RS232 to USB adapter cable allows the Agilent Varian T-plus turbo pumps to be controlled from a remote computer that has a USB port, but no serial port. T-Plus software requires a serial connection. For PC''s that do not have an RS232 or RS485 serial comm port but only a USB 2 connection port, this cable allows you to connect a T-plus turbo pump to a USB 2 port and have the same T-Plus software functions as if you had a serial comm port on your PC.

Agilent Varian Turbo Pump Inlet Screen, For Large TwisTorr and Turbo-V Pumps With ISO-200 or Conflat CF 10 Inch Inlet Flange. Agilent Varian Part Number PN: 969-9316. These Agilent Varian inlet screens are designed to protect the large TwisTorr FS and Turbo-V turbo molecular vacuum pumps with ISO-200 or CF 10 inch intake flanges. The inlet screen (splinter guard) is a small accessory that is often overlooked but a very important part of a vacuum system. It is used to protect the turbo from small objects or debris that may fall or be sucked into the rotor. These turbo intake splinter shields help protect the pump from foreign objects and have Agilent Varian part number is 9699316.Works With Agilent TwisTorr and Turbo-V Turbo Pump Models: TwisTorr 804 FS Turbo-V 1001

Fan Air Cooling Kit for Agilent Large TwisTorr and Turbo-V Turbomolecular Pumps with Remote Rack Mount Controller, X3501-68016, X3501-64003. This is an air fan cooling kit for Agilent TwisTorr FS 404, 704, 804 and Turbo-V 1001 turbomolecular vacuum pumps. It mounts to the base of the pump, and provides radial cooling to the pump. It connects to the round J3 FAN connector on the back of rack mounted X3501-68016 or X3501-64003 turbo pump controllers. This fan air cooling kit has an attached 20 ft. long cable and includes all necessary mounting hardware. This is a direct replacement for the Agilent X3501-68001 fan air cooling kit. Compatible with these Agilent Turbomolecular Pump Models: TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001 Compatible with these Rack Mount Agilent Turbomolecular Pump Controller Models: X3501-68016 X3501-64003 This fan kit is not compatible with Agilent Onboard Navigator Turbo Pump Controllers. We offer fan cooling kits for onboard controllers, as well as the complete line of Agilent Turbo pumps and accessories in other listings. Please see the downloads for more information about pumps and controllers.

Agilent Varian Fan Air Cooling Kit For Large TwisTorr and Turbo-V Turbomolecular Pumps With Local Navigator Controller. Agilent Varian Part Number PN: 9699297. These Agilent Varian TwistTorr and Turbo-V air cooling fan kits are designed to work with the local Navigator (bottom or side pump mounted) controllers and have Agilent Varian part number 9699297. These kits include the air cooling fan, power cable to connect the cooling fan to 24 VDC supply on the Navigator controller through a P4 connector, and bottom of pump mounting style bracketing. This is very important when ordering, there are two different air cooling fan kits for the Agilent Varian large TwistTorr and Turbo-V turbo molecular pumps: one is designed to work with the remote Rack-Mount controller where the cooling fan operates on 115 VAC. The other which is being sold here, is designed to work with the bottom or side mounted local Naviagator controller operating on 24VDC (see middle graphic to the side) . Works With Agilent TwisTorr Navigator Controller Powered Turbo Pump Models: TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Water Cooling Kit With Plastic Hose Fittings, Fits Most Agilent Turbo Molecular Pumps. For 4 mm I.D. x 6 mm O.D. Plastic Hose, Agilent Varian Part Number PN: 9699347. These plastic tubing water cooling kits are designed to provide water cooling of Agilent Varian TwisTorr 305 FS, 750 FS, and 850 FS turbomolecular vacuum pumps. They are designed to allow easy connection to 4 mm I.D. x 6 mm O.D. plastic hose, and have Agilent Varian part number PN 9699347.Fits most Agilent Varian turbo pumps, including models: TwisTorr 305 FS TwisTorr 305 IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Water Cooling Kit With Metal Hose Barbs, Fits Most Agilent Turbo Molecular Pumps Designed For 6x8 mm Tubing Size, Agilent Varian Part Number PN: 9699337 These metal water cooling kits are designed to provide water cooling of Agilent Varian TwisTorr 305 FS, 750 FS, and 850 FS turbomolecular vacuum pumps. They are designed to allow easy connection to 6 mm I.D. x 8 mm O.D. plastic hose, e.g., high quality Polyurethane (PUR), and have Agilent Varian part number PN 9699337.Fits most Agilent Varian turbo pumps, including models:TwisTorr 305 FS TwisTorr 305 IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Tubro-V 1001

Agilent Varian Cooling Fan Extension Cable For Large TwisTorr and Turbo-V Turbo Pumps With Remote Rack-Mount Controller, 30 Meters. Agilent Varian Part Number PN: X3501-68011. This Agilent Varian cooling fan extension cable, 30 meters long, is used with the large TwisTorr FS and Turbo-V turbomolecular vacuum pumps, connects to the cooling fan to the rack-mount controller (see bottom graphic to the side). The fan cable plugs into J3 FAN on the back of the rack mount controller. Works with the following Agilent Varian turbo pumps:TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Vent Flange Replacement, KF-10 Vacuum Flange With M8x1.2, Fits Most Agilent Turbomolecular Vacuum PumpsAgilent Varian Part Number PN: 9699108 These Agilent Varian turbo pump vent flanges are designed to work with most Agilent turbomolecular vacuum pumps. They have KF-10 vacuum flange with M8 x 1.2 thread and Agilent Varian part number PN: 969-9108.Works with the following Agilent Varian turbo pumps:TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Pump Vent Valve Kit, Delayed Vent, Normally Open (N.O.), 1.2 mm Orifice, For TwisTorr and Turbo-V Rack-Mount Controllers. Agilent Varian Part Number PN: X3501-68002. These Agilent Varian turbo pump vent valve kits have 1.2 mm orifice, M8 x 1.2 mm threaded, has a 5 meter cable length, are normally open (N.O.), and are closed when the turbo controller is powered on. In the event that power is lost this vent valve will open and start introducing air into the turbo at a rate that will bring it to a safe stop. This helps extend the life of the turbo by limiting the amount of time it spends while passing through resonant frequecies, which are hard on the pump''s bearings (you can hear the pump actually get louder when it passes through these resonances). Venting after power loss is also important to prevent backstreaming from the backing pump, if vacuum is left on the turbo after power failure oils or debrises from the backing pump could be sucked back into the turbo pump. We recommend a vent valve and or a roughing line normally closed (N.C.) isolation valve to protect the turbo during power failure. This kit includes the hardware needed to mount to the side of a the Agilent Varian turbo pump. It is designed to plug into the back side of the Agilent Varian rack-mount turbo pump controller, see J4 PURGE VENT in center photograph, and have Agilent Varian Part Number X3501-68002. Please see the available instruction manuals in our PDF download section Below. Works with the following Agilent Varian turbo pumps:TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Vent Valve, Normally Open (N.O.), 1.2 mm Orifice, For TwisTorr or Turbo-V (Integrated Controller or Onboard Navigator) Turbo Pumps. Agilent Varian Part Number PN: 9699834. These Agilent Varian vent valves are designed for the TwisTorr FS and Turbo-V (with Integrated Controller or Onboard Navigator) turbo pumps. An adapter is also required so that the vent valve can get power and logic from the integrated controllers, the required adapter has Agilent Varian part number X3514-68001 (see center photograph). These Agilent Varian turbo pump vent valve kits have 1.2 mm orifice, are normally open (N.O.), and are closed when the turbo controller is powered on. In the event that power is lost this vent valve will open and start introducing air into the turbo at a rate that will bring it to a safe stop. This helps extend the life of the turbo by limiting the amount of time it spends while passing through resonant frequecies, which are hard on the pump’s bearings (you can hear the pump actually get louder when it passes through these resonances). Venting after power loss is also important to prevent backstreaming from the backing pump, if vacuum is left on the turbo after power failure oils or debrises from the backing pump could be sucked back into the turbo pump. We recommend a vent valve and or a roughing line normally closed (N.C.) isolation valve to protect the turbo during power failure. This kit includes the hardware needed to mount to the side of a the Agilent Varian turbo pump. We also sell a vent valve extension cable 5 meters for these 305-IC vent valves, Agilent Varian part number 9699949, which would be used to control venting by logic from a local tool or laboratory instrument. Please see the available instruction manuals in our PDF download section below.Works with the following Agilent Varian turbo pumps:TwisTorr 305-IC TwisTorr 404 FS Onboard Navigator TwisTorr 704 FS Onboard Navigator TwisTorr 804 FS Onboard Navigator Turbo-V 1001 Onboard Navigator

Agilent Varian Turbo Purge Valve, 10 SCCM KF-16 x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 969-9239. These Agilent Varian turbo purge valves have a fixed 10 SCCM flow rate, a KF-16 flanged gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9239.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 10 SCCM 1/4 Swagelok x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699240. These Agilent Varian turbo purge valves have a fixed 10 SCCM flow rate, a 1/4 Swagelok gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9240.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 20 SCCM KF-16 x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699241. These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, a KF-16 gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9241.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 20 SCCM 1/4 Swagelok x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699242. These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, a 1/4 Swagelok gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9242.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 10 SCCM has 7/16 and 1/4 Swagelok Fittings, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699232. These Agilent Varian turbo purge valves have a fixed 10 SCCM flow rate, has 7/16 and 1/4 Swagelok gas supply fittings, and are designed to insert into the purge gas supply line of most medium sized turbomolecular vacuum pumps. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9232.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 20 SCCM has 7/16 and 1/4 Swagelok Fittings, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699236. These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, has 7/16 and 1/4 Swagelok gas supply fittings, and are designed to insert into the purge gas supply line of most medium sized turbomolecular vacuum pumps. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9236.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001