Edwards iXL120N Dry Vacuum Pump, 200-460VAC, Nitrogen Purge Connection, Customized, 3/8 QC Quick Disconnect Water Fitting Added. Edwards Part Number: A54114010. The XL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment!. Class leading chamber pump down time reduces Total Average Cycle Time (TACT) Only 0.55kW power consumption helps minimize customer cost of ownership Green Mode can reduce power consumption by up to 92% during idle periods Up to 35oC water supply helps reduce facility cooling water requirements Extremely small and light, helping to save valuable fab space Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Edwards iXL120N Features and Benefits: Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Green Mode can reduce power consumption by up to 92% during idle periods Class leading chamber pump down time reduces total average cycle time (TACT) Up to 35°C water supply helps reduce facility cooling water requirements Only 0.55 kW1 power consumption helps minimise customer cost of ownership A single variant covers the supply voltage range 200-460 V, 50/60 Hz Extremely small and light, helping to save valuable fab space

Edwards iXL120 E 200-460VAC Dry Vacuum Pump, 3/8 QC Water Fitting. Compact, Small & Light. Edwards Part Number A54113010. The XL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment. Class leading chamber pump down time reduces Total Average Cycle Time (TACT) Only 0.55kW power consumption helps minimize customer cost of ownership Green Mode can reduce power consumption by up to 92% during idle periods Up to 35oC water supply helps reduce facility cooling water requirements Extremely small and light, helping to save valuable fab space Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Edwards iXL120 Features and Benefits: Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Green Mode can reduce power consumption by up to 92% during idle periods Class leading chamber pump down time reduces total average cycle time (TACT) Up to 35°C water supply helps reduce facility cooling water requirements Only 0.55 kW1 power consumption helps minimise customer cost of ownership A single variant covers the supply voltage range 200-460 V, 50/60 Hz Extremely small and light, helping to save valuable fab space

Edwards Dry Vacuum Pump iXL120 E 200-460VAC Dry 1/4 QC Water Fitting. Compact, Small & Light. Edwards Part Number A54113020. The XL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment. Class leading chamber pump down time reduces Total Average Cycle Time (TACT) Only 0.55kW power consumption helps minimize customer cost of ownership Green Mode can reduce power consumption by up to 92% during idle periods Up to 35oC water supply helps reduce facility cooling water requirements Extremely small and light, helping to save valuable fab space Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Edwards iXL120 Features and Benefits: Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Green Mode can reduce power consumption by up to 92% during idle periods Class leading chamber pump down time reduces total average cycle time (TACT) Up to 35°C water supply helps reduce facility cooling water requirements Only 0.55 kW1 power consumption helps minimise customer cost of ownership A single variant covers the supply voltage range 200-460 V, 50/60 Hz Extremely small and light, helping to save valuable fab space

Edwards Dry Vacuum Pump iXL120 E 200-460VAC HIT 3/8 QC Water Fittings. Compact, Small & Light. Edwards Part Number A54113610. The XL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment. Class leading chamber pump down time reduces Total Average Cycle Time (TACT) Only 0.55kW power consumption helps minimize customer cost of ownership Green Mode can reduce power consumption by up to 92% during idle periods Up to 35oC water supply helps reduce facility cooling water requirements Extremely small and light, helping to save valuable fab space Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Edwards iXL120 Features and Benefits: Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Green Mode can reduce power consumption by up to 92% during idle periods Class leading chamber pump down time reduces total average cycle time (TACT) Up to 35°C water supply helps reduce facility cooling water requirements Only 0.55 kW1 power consumption helps minimise customer cost of ownership A single variant covers the supply voltage range 200-460 V, 50/60 Hz Extremely small and light, helping to save valuable fab space

Edwards Dry Vacuum Pump iXL120 E 200-460VAC MCM 3/8 QC Water Fittings. Compact, Small & Light. Edwards Part Number A54113710. The XL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment. Class leading chamber pump down time reduces Total Average Cycle Time (TACT) Only 0.55kW power consumption helps minimize customer cost of ownership Green Mode can reduce power consumption by up to 92% during idle periods Up to 35oC water supply helps reduce facility cooling water requirements Extremely small and light, helping to save valuable fab space Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Edwards iXL120 Features and Benefits: Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Green Mode can reduce power consumption by up to 92% during idle periods Class leading chamber pump down time reduces total average cycle time (TACT) Up to 35°C water supply helps reduce facility cooling water requirements Only 0.55 kW1 power consumption helps minimise customer cost of ownership A single variant covers the supply voltage range 200-460 V, 50/60 Hz Extremely small and light, helping to save valuable fab space

Edwards Dry Vacuum Pump iXL120 E 200-460VAC 3/8 QC Water Fittings with Flow Control Valve. Edwards Part Number A54113011. The XL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment. Class leading chamber pump down time reduces Total Average Cycle Time (TACT) Only 0.55kW power consumption helps minimize customer cost of ownership Green Mode can reduce power consumption by up to 92% during idle periods Up to 35oC water supply helps reduce facility cooling water requirements Extremely small and light, helping to save valuable fab space Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Edwards iXL120 Features and Benefits: Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Green Mode can reduce power consumption by up to 92% during idle periods Class leading chamber pump down time reduces total average cycle time (TACT) Up to 35°C water supply helps reduce facility cooling water requirements Only 0.55 kW1 power consumption helps minimise customer cost of ownership A single variant covers the supply voltage range 200-460 V, 50/60 Hz Extremely small and light, helping to save valuable fab space

Edwards Dry Vacuum Pump iXL120 E 200-460VAC SPI 1/4 QC Water Fittings with Flow Control Valve. Edwards Part Number A54113221. The XL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment. Class leading chamber pump down time reduces Total Average Cycle Time (TACT) Only 0.55kW power consumption helps minimize customer cost of ownership Green Mode can reduce power consumption by up to 92% during idle periods Up to 35oC water supply helps reduce facility cooling water requirements Extremely small and light, helping to save valuable fab space Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Edwards iXL120 Features and Benefits: Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Green Mode can reduce power consumption by up to 92% during idle periods Class leading chamber pump down time reduces total average cycle time (TACT) Up to 35°C water supply helps reduce facility cooling water requirements Only 0.55 kW1 power consumption helps minimise customer cost of ownership A single variant covers the supply voltage range 200-460 V, 50/60 Hz Extremely small and light, helping to save valuable fab space

Edwards Dry Vacuum Pump iXL120 E 200-460VAC HIT 3/8 QC Water Fittings with Flow Control Valve. Edwards Part Number A54113611. The XL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment. Class leading chamber pump down time reduces Total Average Cycle Time (TACT) Only 0.55kW power consumption helps minimize customer cost of ownership Green Mode can reduce power consumption by up to 92% during idle periods Up to 35oC water supply helps reduce facility cooling water requirements Extremely small and light, helping to save valuable fab space Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Edwards iXL120 Features and Benefits: Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Green Mode can reduce power consumption by up to 92% during idle periods Class leading chamber pump down time reduces total average cycle time (TACT) Up to 35°C water supply helps reduce facility cooling water requirements Only 0.55 kW1 power consumption helps minimise customer cost of ownership A single variant covers the supply voltage range 200-460 V, 50/60 Hz Extremely small and light, helping to save valuable fab space

Edwards Dry Vacuum Pump iXL120 E 200-460VAC MCM 3/8 QC Water Fittings with Flow Control Valve. Edwards Part Number A54113711. The XL120 is a compact, low energy, 110 m3h-1 dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment. Class leading chamber pump down time reduces Total Average Cycle Time (TACT) Only 0.55kW power consumption helps minimize customer cost of ownership Green Mode can reduce power consumption by up to 92% during idle periods Up to 35oC water supply helps reduce facility cooling water requirements Extremely small and light, helping to save valuable fab space Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Edwards iXL120 Features and Benefits: Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance Unique dual inlet arrangement allows efficient foreline routing and location options Green Mode can reduce power consumption by up to 92% during idle periods Class leading chamber pump down time reduces total average cycle time (TACT) Up to 35°C water supply helps reduce facility cooling water requirements Only 0.55 kW1 power consumption helps minimise customer cost of ownership A single variant covers the supply voltage range 200-460 V, 50/60 Hz Extremely small and light, helping to save valuable fab space

Edwards iXL600N Dry Vacuum Pump. 200-460 V 50/60 Hz 3 Phase Supply. 600 m3h-1 Peak Pumping Speed. Includes: 3/8 Quick Connect Water Fittings.Edwards PN: A54134010 The iXL600N is a combination dry pump and booster system. The systems are for use on light duty applications and the N variant are fitted with a gas module that supplies nitrogen purge gas to the pump mechanism areas. The stator, motor, and the inverter drives are water cooled. The pumping systems can be controlled by the front panel, a PDT accessory or by the tool via MicroTIM. The dry pump systems are intended for use on load lock and light duty applications. Common applications include Load Lock, Transfer, Metrology, Lithography, PVD Process and PVD Pre-Clean.

Edwards GX, iGX, iXH, iXM, and iXL Pump Display Terminal, 5Way, XLR Plug, Hand Held Key Pad Display Module. Edwards Part Number: D37280700 Edwards GX, iGX, iXH, IXM, and iXL Pump Display Terminal 5 Way XLR Plug. Hand held display for Edwards GX, iGX and iXL120 Series Dry Pump Systems with 5 way XLR connection. Edwards Vacuum Part Number D37280700.

Edwards SPI Micro TIM ModuleD37360310SPI Micro TIM module provides Edwards SPI tool interface for dry pumps with a Micro TIM slot. A SPI Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The SPI Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series Also for use on multi pump systems with a System Controller. Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards MCM Micro TIM ModuleD37360320MCM MicroTIM module provides Edwards MCM tool interface for dry pumps with a MicroTIM slot. A MCM Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using a parallel digital interface. The MCM Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series GXS Series(MCM Version only) CXS Series(MCM version only) Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. For example a pump may be upgraded from an iH to an iHs without changing the interface module. The MCM Micro TIM has AUC compatibility with GXS and CXS series pumps. Equivalent to iH iTIM D37422000 - MCM. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards TEL Micro TIM ModuleD37360330TEL Micro TIM module provides Edwards TEL tool interface for dry pumps with a Micro TIM slot. A TEL Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The TEL Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series Also for use on multi pump systems with a System Controller. Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards Semi E73 Micro TIM ModuleD37360340Semi E73 Micro TIM module provides Semi E73 compliant tool interface for dry pumps with a MicroTIM slot. A Semi E73 Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The Semi E73 Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series Also for use on multi pump systems with a System Controller. Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards LAM Alliance Micro TIM ModuleD37360350LAM Alliance MicroTIM provides a tool interface to LAM Alliance platforms for dry pumps with a MicroTIM slot. A LAM Alliance Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The LAM Alliance Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series Also for use on multi pump systems with a System Controller. Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards Novellus C3 Micro TIM ModuleD37360360Novellus C3 Micro TIM provides a tool interface to Novellus C3 platforms for dry pumps with a MicroTIM slot. A Novellus C3 Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The Novellus C3 Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series Also for use on multi pump systems with a System Controller. Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards Hitachi Micro TIM ModuleD37360370Hitachi MicroTIM provides Hitachi tool interface for dry pumps with a MicroTIM slot. A Hitachi Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The Hitachi Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series Also for use on multi pump systems with a System Controller. Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards iXL Dry Semiconductor Pump Plug Used to Make Power Cable for iXL Series Vacuum Pumps. This is a Edwards iXL dry semiconductor pump plug kit to make input mains power cable for Edwards iXL series semiconductors vacuum pumps. Works with iXL120 and other models.

Edwards EMO Cable for Installing A New-Style iXL or iXH Series Dry Semiconductor Pump On A Tool With Existing Old-Style iH Series Pumps. Ideal Vacuum supplies our own interface cable, which allows replacement of an older style iH series pump with the style IXL120N, iXH100, or iXH610. This EMO cabling is useful for applications where a semiconductor tool has multiple old style iH pumps attached in the sub fab. This interface module cable continues the EMO circuit across the remaining old-style iH pumps and through the new style iXL120N replacement pump. The connections and different interface modules are described in detail below. This cable is typically connected from P2 (output) of iTIM on left side iH, to Emergency Stop (EMS) connector on iXL120N, to J1 (input) of iTIM on right side iH pump (see details in our Application Note in pdf format). The issue is that the Edwards iH series pumps are now discontinued and no longer available. Ideal Vacuum stocks the replacement pumps, iXL120N for load lock, iXH100 (replaces iH80), iXH610 (replaces iH600), and so on. The new iXL120N pump does not have an EMO button on the front like the old style IH pumps (see details in our Application Note). The Edwards iTIM was often configured with older style Edwards iH series dry semiconductor vacuum pumps where multiple pumps are connected to a single semiconductor tool in the sub-fab. The EMO cabling is set up to shut down the tool if an EMO is pressed on any of the iH series pumps, they are typically cabled in series, in a daisy chain configuration.