Home >

Vacuum Pumps >

Diffusion Vacuum Pumps >

New Agilent Varian Diffusion Pumps and Parts >

VHS 400 Diffusion Pumps >

Agilent Varian VHS400 Diffusion Pump Heater 380VAC, 2550W, 6.7A, 56.6 Ohms, 1 ea., 647310165

Load

Agilent Varian VHS400 Diffusion Pump Heater 380VAC, 2550W, 6.7A, 56.6 Ohms, 1 ea., 647310165

Condition:

New

Part Number:

P106957

Warranty:

Against Product Defect

Available Now 2

Sale: Ft175,965.78

Currency: Hungarian Forint (HUF)

Description

Agilent Varian VHS400 Diffusion Pump Tubular Heater 380VAC, 2550W, 6.7A, 56.6 Ohms, Per Heater,
PN 647310165 (sold as one each)

These Agilent Varian VHS-400 diffusion vacuum pump Tubular-Style replacement heaters are for use with 380 VAC input power. These heaters pull 2550 Watts, 6.7 Amps and have a room temperature resistance of 56.6 Ohms. These heaters are designed to be operated by 380 VAC, two heaters are required for (5100 Watts of heating power). For heater assembly replacement instructions see page 43 in the instruction manual .pdf below. The Agilent Varian part number for this heater is 647310165 and its location is item #10 in graphic diagram and description below. Other diffusion pump accessories are available on this web site.

Downloads

Agilent Varian VHS-10, VHS-400 High Vacuum Diffusion Pump Manual.pdf

PDF

Brochure

Specifications
Specification	Value
Pumping Speed, Operating Range	4,500 l/s air, 5,625 l/s He/H₂
Maximum Pumping Speed	8,000 l/s air w/standard cold cap
Maximum Throughput	3.3 T-l/s (8.4 mbar-l/s) in operating range, 7.5 T-l/s (10.0 mbar-l/s) @ 0.01 Torr
Operating Range	1.4x10⁻³ to < 5x10⁻⁹ Torr at 4,400 W. (1.9 x 10⁻³ to < 6.5 x 10⁻⁹ mbar)
Maximum Forepressure	No Load: 0.65 Torr (0.85 mbar) Full Load: 0.55 Torr (0.72 mbar)
Recommended Backing Pump	≥ 30 cfm (51 m³/hr)
Backstreaming Rate	< 1.0 x 10⁻⁴ mg/cm²/min (with standard cold cap)
Warmup Time	15 minutes
Cooldown Time	25 minutes (with quick cool coil)
Fluid Charge	1,000 cc
Electrical Requirements	3 ph, 50/60 Hz, 208/380/480 VAC
Pump Power	4,400 Watts
Cooling Water Requirements	0.40 gpm (80 l/h)
Water Connections	⅛ in. FPT Tee

VHS-400 Diffusion Pump Replacement Parts List

Description	Part No.	Item
Standard Cold Cap Assembly	K4823301	1
Jet Assembly	F0428401	2
Jet Coupling	L6367301	3
Splash Baffle	F0431301	4
Foreline Baffle Assembly	F0435301	5
Sight Glass Repair Kit consisting of:	L8908301	6
Sight Glass	L8816001	5.1
Gasket, Teflon	L9694001	5.1
O-ring, Viton, Parker No. 2-113	CommI	5.1
O-ring, Viton, Parker No. 2-226	CommI	5.1
Thermal Switch Includes:	L8912301	7
Switch (set at 300 °F – 147 °C)	642906025	7a
Lug	648056680	7b
Wire	656179100	7c
Box Insulator	89867001	7d
Heater wire, 10 AWG, 42 inches (3 per pump required)	X3901-68003	8
Heater Wiring Kit, Includes:	L8913301
15 ft. wire	L8913301	5.1
Nickel lug	648056680	5.1
Terminal Strip Molex 39100-1512	648091065	5.1
Heaters (two heaters required per pump)		9
208 V / 2200 watt Heater Element	647310140	5.1
240 V / 2200 watt Heater Element, 1Ph	647310150	5.1
380 V / 2200 watt Heater Element	647310160	5.1
480 V / 2200 watt Heater Element, wired open Delta, unbalanced load	647310170	5.1
208 V / 2550 watt Heater Element	647310145	5.1
240 V / 2550 watt Heater Element, 1Ph	647310155	5.1
380 V / 2550 watt Heater Element, wired open Delta, unbalanced load	647310165	5.1
480 V / 2550 watt Heater Element, wired open Delta, unbalanced load	647310175	5.1
Heater Crush Plate (replace when either heater is replaced)	K7667001	10
Heater Clamping Plate A36 Steel	K4928001	11
Heater Clamping Plate Retrofit, Slotted	R2667301
Heater Insulation Blanket	L8914001	12
Heater Cover	L8903301	13
Viton Centering ring for ISO inlet flange, 400K		15
Centering ring for ISO foreline flange ISO-63K	IC063SV	16
O-Ring Kit includes:	K0377189
1 inlet flange O-ring, Butyl No. 2-385	F0430001	15
1 foreline flange O-ring, Butyl No. 2-338	660893338	16
10 Viton fill and drain O-rings (Old style), Viton No. 2-112		5.1
10 Viton fill and drain O-rings (new style, Parker No. 2-113		5.1
1 Sight glass O-ring, Parker No. 2-226		5.1
1 PTFE gasket		5.1
Included with the pump:		5.1
1 inlet flange O-ring, Butyl No. 2-385	F0430001	5.1
1 Butyl foreline flange O-ring, Butyl No. 2-338	660893338	5.1
13/8 Hose 1/8 Pipe Barbed Connectors	264301102	5.1
		5.1
DC-702 diffusion pump fluid, 500 cc (2 required)	695472005
DC-704 diffusion pump fluid, 500 cc (2 required)	695474005
DC-705 diffusion pump fluid, 500 cc (2 required)	695475005
Installation and Operation Manual	699901021

Kit Components

Availability Of Kit Components 2 Kit: P106957 - Agilent Varian VHS400 Diffusion Pump Heater 380VAC, 2550W, 6.7A, 56.6 Ohms, 1 ea., 647310165
Component	Desc.	Req'd	Avail
Non-Standard	No Component Description Available On Website	1	2