This is a manually operated 90° right angle Ideal Vacuum Super-Seal bellows valve with Conflat CF 1.33" (1-1/3") flanges on the inlet and outlet ports. Conflat flanged Super-Seal valves have rotatable flanges for optimal connectivity to vacuum lines. This valve is rated for ultra-high-vacuum use (10^-10 Torr) and can be used up to the 60-80 psig positive pressure range. These Super-Seal valves have a leak rate of 10^-11 Torr l/s (He). All ultra-high vacuum rated Super-Seal valves use 304L stainless steel for the valve body and mechanism, OFHC copper gaskets for the bonnet seal, and Viton® poppet seal O-rings. These valves operate with low friction and zero abrasion of the polymer elastomer surface allowing for repeatable sealing action over many thousands of cycles. Super-Seal valves provide high-conductance to maximize the evacuated gas flow rate. These valves are bakeable up to 150°C (limited by the Viton O-rings) and can withstand a maximum differential pressure of up to 15 psig. They can be mounted in any orientation.

Manually operated Super-Seal bellows valves are an excellent solution when automation is not required. They are significantly less expensive and more quickly deployed than similar pneumatically operated bellows valves. Manual bellows valves are frequently used in roughing and high-vacuum forelines and make excellent chamber venting valves. Ideal Vacuum manual bellows Super-Seal valves are used in applications ranging from semiconductor manufacturing, plasma physics research, to nuclear accelerators.

Please see the brochure for specs and dimensional data. Download the User Manual for complete information about the Ideal Vacuum Super-Seal family of manually operated bellows valves and accessories. We also have an entire series of Super-Seal solenoid operated pneumatic bellows valves for when automation is needed.