MKS HPS 910 DualTrans Micropirani Absolute Piezo Transducer KF16 RS485, 10-5 to 1500 Torr 910-12030

The 910-12030 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer is designed specifically for wide-range pressure measurement applications and features a size NW16 ISO-KF flange fitting. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. The 910 combines two pressure measurement technologies to provide superior performance and functionality. The 910 provides gas independent absolute pressure measurement from 11 to 1500 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 910 can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 910 can be mounted in any orientation without compromising accuracy.

The Piezo is an absolute pressure sensor, providing a direct pressure reading, allowing the measurement to be gas independent. The Piezo sensor measures from less than 1 Torr to 1500 Torr. The 910 has RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. The 910 also has an analog pressure output of 1VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The 910 has three mechanical relays which can be used for process control, for example interlocking isolation valves and vacuum pumps. Each set point can be assigned either to the piezo measurement or the combined absolute MicroPirani/Piezo measurement. The 910 compact design significantly reduces the amount of space occupied by a vacuum gauge. This is particularly appealing to system designers and allows for a more compact vacuum system.