Ebara EV-A03-1 Air Cooled Dry Vacuum Pump 115VAC, 1-Phase, 9cfm, Gas Ballast Port. PN: 202507 These Ebara EV-A 03 series dry rotary lobe vacuum pumps are air-cooled and are designed for light duty dry vacuum applications. The EV-A 03 pumps dry pumps have a large 9 cfm (250 L/Min) pumping speed, have KF-25 inlet and exhaust ports, operate very quiet at 56 dB (A) operating noise level, and have an ultimate pressure without gas ballast of is 7.5 mTorr (75 mTorr with gas ballast on). Save money with low operating power consumption, as low as 1.1 kW at ultimate pressure. This unit has Ebara reference number EV-A03-1 which includes standard accessories, such as, the vertical exhaust orientation, external silencer & built-in check valve, operates on 1-phase 115 VAC, and port for optional gas ballast, having Ebara model EV-A03-1 and part number 202507. The Ebara EVA 03 dry pumps employee multi-stage Roots roughing pump technology to achieve a totally clean dry vacuum, includes 6 internal pumping stages. The pump operates on a pair of hybrid Roots which synchronously rotate to keeping a given clearance while transferring the gas from the inlet to the outlet exhaust port. Gears are installed on the other side of the rotors where lubricating oil is used. These are dry vacuum pumps, the oil is not inside the vacuum volume of the pump and is only located inside the gear section. The EV-A 03 and EV-A 06 models use mineral gear oil while the EV-A 10 models use Fomblin PFPE gear oil. The Ebara EV-A pumps produce a clean dry vacuum thanks to its frictionless design, being non-contact, multi-stage roots, reliable, and providing particle-free vacuum generation. Unlike scroll pumps, the EV-A pumps do not have tip seals that wear and generate particulate dust that can be a contaminant of the roughing line and processes chamber during suckback issues. The highly reliable design of the Ebara EV-A vacuum pumps allow for dry vacuum at lower cost of ownership. These pumps eliminate the hassle of tip seal & bearing replacements and do not have base pressure drifts that occurs as tips seals wear in dry scroll pumps. The improved rotary lobes pump design provides a constant ultimate pressure over the entire life of the pump, 7 mTorr base pressure. The Ebara EV-A pumps are fan cooled but are designed to run at higher internal temperatures which allows them to have a large condensable vapor pumping capacity, 250 grams per of water per hour for the EV-A 03 models. Friction from the shaft seals and bearings along with heat that is generated as the gas is compressed help to increase the internal operating temperature of the vacuum pump. When pumping of condensable vapors, installation of the optional gas ballast is required, to prevent condensation inside the pump. Air or nitrogen introduced by the gas ballast reduces the partial pressure of the pumped gases to exceed their saturation vapor pressure (keep them in the vapor phase). It is recommended to use the atmospheric air gas ballast when pumping of non-flammable vapor and condensable solvents. When pumping gas vapors of flammable solvents the N2 ballast must be correctly used following the operation manual. It is effective to keep the pump running about one hour after process completion with the gas ballast valve open when pumping condensable gases like water vapor. This helps to remove all traces of water before the pump is turned off. A major improvement in the Ebara EV-A design is that the first vacuum stage is located in the second position on the rotor. This orientation of the pumping stage design prevents the rotor bearings from being exposed to the high vacuum which will increase their operating life. The improved pump design also includes hard anodized aluminum body, stainless steel rotors, and internal exhaust check valves, features which help the Ebara EV-A pumps handle pumping of condensable vapors. The optional gas ballast is designed to injecting to the 3 and 4 stages in an optimal positions to increase the pumps vapor handling capacity while limiting its effect on the pumps base pressure. The robust design of the Ebara EV-A pumps offer a service life which is typically 3 to 5 years depending on the application and how the pumps are used. The Ebara EV-A dry rotary lobe vacuum pumps include an operation panel and LED display to adjust the pump conditions and control pump settings, such as, run frequency, current, run hours, and error monitoring. These pump motors include a Variable Frequency Drive (VFD) that starts the pump slowly from rest to full speed, reducing noise and vibration, while providing a low start up current. The pumps also include an I/O connector D-sub port which provides dry contactor functions like remote start and alarm status monitoring. The Ebara EV-A 03 series dry vacuum pumps are simple to use, simply plug them in and turn them on (it’s that simple). They can be ordered to operate on 1-phase 115, 1-phase 208 VAC, or 3-phase 208 VAC, the current part number being sold here, 202507 is for the 1-phase 115 VAC pump. The Ebara EV-A pumps can operate continuously at atmospheric pressure without over heating or locking up. The Ebara EV-A vacuum pumps are compact and are quite during operation <56dB(A). Optional rolling casters are available for easy moving about the facility. Please see the additional information in the user’s manual and products brochure downloads below. Benefits and Features of the Ebara EV-A series dry rotary lobe pumps. Air-Cooled Small, Compact Size Non-Contact Design Constant Ultimate Pressure No Production of Tip Seal Dust High Atmospheric Pumping Speeds CE and NRTL rated Single-Phase and Three-Phase Models Available Low Vibration Low Noise Maintenance Free Highest Water Vapor Pumping of Any Air Cooled Dry Pump (with gas ballast open) Applications Load Lock Analytical Instruments (LCMS Liquid Chromatography–Mass Spectrometry, GCMS Gas Chromatography Mass Spectrometry) Metrology - SEM (Scanning Electron Microscopes), TEM (Transmission Electron Microscopy) PVD (Physical Vapor Deposition) Sputter Systems Drying Vacuum Ovens Oxygen Plasma Systems Wet Pump Replacement Scroll Pump Replacement Clean Application Glove Boxes Lyophilization (Freeze Drying) Sterilizers (Vaporized Hydrogen Peroxide Sterilizer medical devices Vacuum Steam Sterilization for Hospital Applications). Leak Detectors Beam Line & Synchrotrons High Energy Physics (Research & Development Laboratories – R&D) Space Simulation Chambers Turbo Pump Backing Flexible LED Video Display Manufacturing Absolutely Clean & Dry Vacuum for Medical Devices & PCB Board Manufacturing Medium Duty, compete with PFPE Rotary Vane Pumps, Pumping Oxygen Applications. Plasma O2 CF4

Ebara EV-A03-2 Air Cooled Dry Vacuum Pump 208-240VAC, 1-Phase, 9cfm, Gas Ballast Port. PN: 202549 These Ebara EV-A 03 series dry rotary lobe vacuum pumps are air-cooled and are designed for light duty dry vacuum applications. The EV-A 03 pumps dry pumps have a large 9 cfm (250 L/Min) pumping speed, have KF-25 inlet and exhaust ports, operate very quiet at 56 dB (A) operating noise level, and have an ultimate pressure without gas ballast of is 7.5 mTorr (75 mTorr with gas ballast on). Save money with low operating power consumption, as low as 1.1 kW at ultimate pressure. This unit has Ebara reference number EV-A03-2 which includes standard accessories, such as, the vertical exhaust orientation, external silencer & built-in check valve, operates on 1-phase 200-240 VAC, and port for optional gas ballast, having Ebara model EV-A03-2 and part number 202549. The Ebara EVA 03 dry pumps employee multi-stage Roots roughing pump technology to achieve a totally clean dry vacuum, includes 6 internal pumping stages. The pump operates on a pair of hybrid Roots which synchronously rotate to keeping a given clearance while transferring the gas from the inlet to the outlet exhaust port. Gears are installed on the other side of the rotors where lubricating oil is used. These are dry vacuum pumps, the oil is not inside the vacuum volume of the pump and is only located inside the gear section. The EV-A 03 and EV-A 06 models use mineral gear oil while the EV-A 10 models use Fomblin PFPE gear oil. The Ebara EV-A pumps produce a clean dry vacuum thanks to its frictionless design, being non-contact, multi-stage roots, reliable, and providing particle-free vacuum generation. Unlike scroll pumps, the EV-A pumps do not have tip seals that wear and generate particulate dust that can be a contaminant of the roughing line and processes chamber during suckback issues. The highly reliable design of the Ebara EV-A vacuum pumps allow for dry vacuum at lower cost of ownership. These pumps eliminate the hassle of tip seal & bearing replacements and do not have base pressure drifts that occurs as tips seals wear in dry scroll pumps. The improved rotary lobes pump design provides a constant ultimate pressure over the entire life of the pump, 7 mTorr base pressure. The Ebara EV-A pumps are fan cooled but are designed to run at higher internal temperatures which allows them to have a large condensable vapor pumping capacity, 250 grams per of water per hour for the EV-A 03 models. Friction from the shaft seals and bearings along with heat that is generated as the gas is compressed help to increase the internal operating temperature of the vacuum pump. When pumping of condensable vapors, installation of the optional gas ballast is required, to prevent condensation inside the pump. Air or nitrogen introduced by the gas ballast reduces the partial pressure of the pumped gases to exceed their saturation vapor pressure (keep them in the vapor phase). It is recommended to use the atmospheric air gas ballast when pumping of non-flammable vapor and condensable solvents. When pumping gas vapors of flammable solvents the N2 ballast must be correctly used following the operation manual. It is effective to keep the pump running about one hour after process completion with the gas ballast valve open when pumping condensable gases like water vapor. This helps to remove all traces of water before the pump is turned off. A major improvement in the Ebara EV-A design is that the first vacuum stage is located in the second position on the rotor. This orientation of the pumping stage design prevents the rotor bearings from being exposed to the high vacuum which will increase their operating life. The improved pump design also includes hard anodized aluminum body, stainless steel rotors, and internal exhaust check valves, features which help the Ebara EV-A pumps handle pumping of condensable vapors. The optional gas ballast is designed to injecting to the 3 and 4 stages in an optimal positions to increase the pumps vapor handling capacity while limiting its effect on the pumps base pressure. The robust design of the Ebara EV-A pumps offer a service life which is typically 3 to 5 years depending on the application and how the pumps are used. The Ebara EV-A dry rotary lobe vacuum pumps include an operation panel and LED display to adjust the pump conditions and control pump settings, such as, run frequency, current, run hours, and error monitoring. These pump motors include a Variable Frequency Drive (VFD) that starts the pump slowly from rest to full speed, reducing noise and vibration, while providing a low start up current. The pumps also include an I/O connector D-sub port which provides dry contactor functions like remote start and alarm status monitoring. The Ebara EV-A 03 series dry vacuum pumps are simple to use, simply plug them in and turn them on (it’s that simple). They can be ordered to operate on 1-phase 115, 1-phase 208 VAC, or 3-phase 208 VAC, the current part number being sold here, 202549 is for the 1-phase 200-240 VAC pump. The Ebara EV-A pumps can operate continuously at atmospheric pressure without over heating or locking up. The Ebara EV-A vacuum pumps are compact and are quite during operation <56dB(A). Optional rolling casters are available for easy moving about the facility. Please see the additional information in the user’s manual and products brochure downloads below. Benefits and Features of the Ebara EV-A series dry rotary lobe pumps. Air-Cooled Small, Compact Size Non-Contact Design Constant Ultimate Pressure No Production of Tip Seal Dust High Atmospheric Pumping Speeds CE and NRTL rated Single-Phase and Three-Phase Models Available Low Vibration Low Noise Maintenance Free Highest Water Vapor Pumping of Any Air Cooled Dry Pump (with gas ballast open) Applications Load Lock Analytical Instruments (LCMS Liquid Chromatography–Mass Spectrometry, GCMS Gas Chromatography Mass Spectrometry) Metrology - SEM (Scanning Electron Microscopes), TEM (Transmission Electron Microscopy) PVD (Physical Vapor Deposition) Sputter Systems Drying Vacuum Ovens Oxygen Plasma Systems Wet Pump Replacement Scroll Pump Replacement Clean Application Glove Boxes Lyophilization (Freeze Drying) Sterilizers (Vaporized Hydrogen Peroxide Sterilizer medical devices Vacuum Steam Sterilization for Hospital Applications). Leak Detectors Beam Line & Synchrotrons High Energy Physics (Research & Development Laboratories – R&D) Space Simulation Chambers Turbo Pump Backing Flexible LED Video Display Manufacturing Absolutely Clean & Dry Vacuum for Medical Devices & PCB Board Manufacturing Medium Duty, compete with PFPE Rotary Vane Pumps, Pumping Oxygen Applications. Plasma O2 CF4

Ebara EV-A03-3 Air Cooled Dry Vacuum Pump 208-240VAC, 3-Phase, 9cfm, Gas Ballast Port. PN: 202552 These Ebara EV-A 03 series dry rotary lobe vacuum pumps are air-cooled and are designed for light duty dry vacuum applications. The EV-A 03 pumps dry pumps have a large 9 cfm (250 L/Min) pumping speed, have KF-25 inlet and exhaust ports, operate very quiet at 56 dB (A) operating noise level, and have an ultimate pressure without gas ballast of is 7.5 mTorr (75 mTorr with gas ballast on). Save money with low operating power consumption, as low as 1.1 kW at ultimate pressure. This unit has Ebara reference number EV-A03-3 which includes standard accessories, such as, the vertical exhaust orientation, external silencer & built-in check valve, operates on 3-phase 200-240 VAC, and port for optional gas ballast, having Ebara model EV-A03-3 and part number 202552. The Ebara EVA 03 dry pumps employee multi-stage Roots roughing pump technology to achieve a totally clean dry vacuum, includes 6 internal pumping stages. The pump operates on a pair of hybrid Roots which synchronously rotate to keeping a given clearance while transferring the gas from the inlet to the outlet exhaust port. Gears are installed on the other side of the rotors where lubricating oil is used. These are dry vacuum pumps, the oil is not inside the vacuum volume of the pump and is only located inside the gear section. The EV-A 03 and EV-A 06 models use mineral gear oil while the EV-A 10 models use Fomblin PFPE gear oil. The Ebara EV-A pumps produce a clean dry vacuum thanks to its frictionless design, being non-contact, multi-stage roots, reliable, and providing particle-free vacuum generation. Unlike scroll pumps, the EV-A pumps do not have tip seals that wear and generate particulate dust that can be a contaminant of the roughing line and processes chamber during suckback issues. The highly reliable design of the Ebara EV-A vacuum pumps allow for dry vacuum at lower cost of ownership. These pumps eliminate the hassle of tip seal & bearing replacements and do not have base pressure drifts that occurs as tips seals wear in dry scroll pumps. The improved rotary lobes pump design provides a constant ultimate pressure over the entire life of the pump, 7 mTorr base pressure. The Ebara EV-A pumps are fan cooled but are designed to run at higher internal temperatures which allows them to have a large condensable vapor pumping capacity, 250 grams per of water per hour for the EV-A 03 models. Friction from the shaft seals and bearings along with heat that is generated as the gas is compressed help to increase the internal operating temperature of the vacuum pump. When pumping of condensable vapors, installation of the optional gas ballast is required, to prevent condensation inside the pump. Air or nitrogen introduced by the gas ballast reduces the partial pressure of the pumped gases to exceed their saturation vapor pressure (keep them in the vapor phase). It is recommended to use the atmospheric air gas ballast when pumping of non-flammable vapor and condensable solvents. When pumping gas vapors of flammable solvents the N2 ballast must be correctly used following the operation manual. It is effective to keep the pump running about one hour after process completion with the gas ballast valve open when pumping condensable gases like water vapor. This helps to remove all traces of water before the pump is turned off. A major improvement in the Ebara EV-A design is that the first vacuum stage is located in the second position on the rotor. This orientation of the pumping stage design prevents the rotor bearings from being exposed to the high vacuum which will increase their operating life. The improved pump design also includes hard anodized aluminum body, stainless steel rotors, and internal exhaust check valves, features which help the Ebara EV-A pumps handle pumping of condensable vapors. The optional gas ballast is designed to injecting to the 3 and 4 stages in an optimal positions to increase the pumps vapor handling capacity while limiting its effect on the pumps base pressure. The robust design of the Ebara EV-A pumps offer a service life which is typically 3 to 5 years depending on the application and how the pumps are used. The Ebara EV-A dry rotary lobe vacuum pumps include an operation panel and LED display to adjust the pump conditions and control pump settings, such as, run frequency, current, run hours, and error monitoring. These pump motors include a Variable Frequency Drive (VFD) that starts the pump slowly from rest to full speed, reducing noise and vibration, while providing a low start up current. The pumps also include an I/O connector D-sub port which provides dry contactor functions like remote start and alarm status monitoring. The Ebara EV-A 03 series dry vacuum pumps are simple to use, simply plug them in and turn them on (it’s that simple). They can be ordered to operate on 1-phase 115, 1-phase 208 VAC, or 3-phase 208 VAC, the current part number being sold here, 202552 is for the 3-phase 200-240 VAC pump. The Ebara EV-A pumps can operate continuously at atmospheric pressure without over heating or locking up. The Ebara EV-A vacuum pumps are compact and are quite during operation <56dB(A). Optional rolling casters are available for easy moving about the facility. Please see the additional information in the user’s manual and products brochure downloads below. Benefits and Features of the Ebara EV-A series dry rotary lobe pumps. Air-Cooled Small, Compact Size Non-Contact Design Constant Ultimate Pressure No Production of Tip Seal Dust High Atmospheric Pumping Speeds CE and NRTL rated Single-Phase and Three-Phase Models Available Low Vibration Low Noise Maintenance Free Highest Water Vapor Pumping of Any Air Cooled Dry Pump (with gas ballast open) Applications Load Lock Analytical Instruments (LCMS Liquid Chromatography–Mass Spectrometry, GCMS Gas Chromatography Mass Spectrometry) Metrology - SEM (Scanning Electron Microscopes), TEM (Transmission Electron Microscopy) PVD (Physical Vapor Deposition) Sputter Systems Drying Vacuum Ovens Oxygen Plasma Systems Wet Pump Replacement Scroll Pump Replacement Clean Application Glove Boxes Lyophilization (Freeze Drying) Sterilizers (Vaporized Hydrogen Peroxide Sterilizer medical devices Vacuum Steam Sterilization for Hospital Applications). Leak Detectors Beam Line & Synchrotrons High Energy Physics (Research & Development Laboratories – R&D) Space Simulation Chambers Turbo Pump Backing Flexible LED Video Display Manufacturing Absolutely Clean & Dry Vacuum for Medical Devices & PCB Board Manufacturing Medium Duty, compete with PFPE Rotary Vane Pumps, Pumping Oxygen Applications. Plasma O2 CF4

Ebara Remote Controller for EV-A03 and EV-A06 Dry Rotary Lobe Vacuum Pumps. Ebara Technologies Part Number C-5150-011-7600 This is the Ebara Remote Controller for EV-A03 and EV-A06 Dry Rotary Lobe Vacuum Pumps. The Ebara remote controller is an optional accessory for the Ebara EV-A03 and EV-A06 Dry Rotary Lobe Vacuum Pumps. The remote controller connects to CN2 pump side receptacle (far right picture above).

Ideal Vacuum Synthetic Vacuum Oil for Ebara Gear Box EV-A03 and EV-A06 series Dry Rotary Lobe Vacuum Pumps, 1 liter, Equivalent to Neovac SA-H. Ideal Vacuum Synthetic Vacuum Oil for Ebara Gear Box EV-A03 and EV-A06 series Dry Rotary Lobe Vacuum Pumps, this is the gearbox oil for the dry Ebara rotary lobe pumps, 1 liter. Equivalent to Neovac SA-H, Synthetic Vacuum Oil.

Ebara Oil For EV-A Series Air Cooled Pumps, BARRIERTA J100 OIL 1kg. Part Number 927040 This is Ebara Oil For EV-A Series Air Cooled Pumps, BARRIERTA J100 OIL 1kg.

Ebara EV-A03 and EV-A06 Dry Rotary Lobe Vacuum Pump Power Cable, 1-Phase 115 VAC NEMA 5/15, 2 Meters Long, Ebara Technologies Part Number 210685 These Ebara EV-A03 and EV-A06 power cables are designed for 1-Phase 115 VAC having NEMA 5/15 to Ebara Nanaboshi NET 243-PF connector. Each of these power cables are 6 foot (2 meters) long.

Ebara Power Cable AGW14 for EV-A03/A06 Dry Rotary Lobe Vacuum Pumps, 1-Phase 115VAC Ebara Technologies Part Number 210686-006 These Ebara power cable cord assemblies are designed for 1-Phase 115 VAC power and fit the Ebara EV-A03-1 and EV-A06-1 model dry multi-Root's vacuum pumps. These power cables are 6 foot long (2 meters), have 14/3 conductor, and are open-ended (flying lead) design. These Ebara cables include the Nanaboshi NET 243-PF connector that attaches on the vacuum pump side and have Ebara Technologies part number 210686-006.

Ebara EV-A03 and EV-A06 Dry Rotary Lobe Vacuum Pump Power Cable, 1-Phase 208-240 VAC Ebara Technologies Part Number 210687-006 These Ebara power cable cord assemblies are designed for 1-Phase 208 to 240 VAC power and fit the Ebara EV-A03-2 and EV-A06-2 model dry multi-Root's vacuum pumps. These power cables are 6 foot long (2 meters), have 14/3 conductor, and are open-ended (flying lead) design. These Ebara cables include the Nanaboshi NET 243-PF connector that attaches on the vacuum pump side and have Ebara Technologies part number 210687-006.

Ebara EV-A03 and EV-A06 Dry Rotary Lobe Vacuum Pump Power Cable, 3-Phase 208-240 VAC, 6 Foot Long Ebara Technologies Part Number 210688-006 These Ebara power cable assemblies are 6 foot long (2 meters), 14/4 conductor, and are open-ended design for three phase models EV-A03-3 and EV-A06-3. These power cable cords are 6 foot (2 meters) long and have Ebara part number 210688-006.

Ebara EV-A03 Dry Rotary Lobe Vacuum Pump Solvent Vapor Trap Kit, Catch Pot For Liquids, With Drain Valve Ebara Technologies Part Number C-3080-003-3200 (FT-119) These Ebara solvent traps are designed for the EV-A03 dry rotary lobe vacuum pumps. These catch-pot traps are used to collect liquids that are present in the vacuum line and help prevent them from entering into the vacuum pump. This kit includes the solvent trap and KF-25 vacuum fittings need to install this solvent trap onto an EV-A03 pumps (see photographs above). The solvent trap includes a manual drain valve with NPT pipe thread fittings. The solvent trap has Ebara Technologies part number C-3080-003-3200 (FT-119). Specifications: KF-25 Vacuum Flanges Corrosive Resistant Stainless Steel Integrated Drain Valve KF-25 Full Nipple Union KF-25 Centering Rings and Clamps

Ebara EV-A03 Air Gas Ballast Adapter, Counter Measures Against Moisture Vapor, Air Admittance Ebara Part Number C-2200-002-7010 (C22000027010) These gas ballast adapters are designed for air admittance use with the Ebara EV-A03 dry vacuum pumps. These adapters are to be used for ballast air introduction to combat moisture vapor. Air or nitrogen introduced by the gas ballast reduces the partial pressure of the pumped gases to exceed their saturation vapor pressure (keep them in the vapor phase). It is recommended to use the atmospheric air gas ballast when pumping of non-flammable condensable solvent vapors. When pumping gas vapors of flammable solvents the N2 ballast must be correctly used following the operation manual. It is effective to keep the pump running about one hour after process completion with the gas ballast valve open when pumping condensable gases like water vapor. This helps to remove all traces of water before the pump is turned off. These air gas ballast adapters for the Ebara EV-A03 pumps have Ebara part number C-2200-002-7010.

Ebara EV-A03 Nitrogen N2 Introduction Adapter, Counter Measures Against Flammable Solvent Vapors, N2 Admittance 1/4 Compression Fittings, Ebara Part Number C-2200-002-7200 (C22000027200) These gas ballast adapters are designed for nitrogen N2 admittance use with the Ebara EV-A03 dry vacuum pumps. These adapters are to be used for ballast nitrogen introduction to combat against flammable solvent vapors. Nitrogen introduced by the gas ballast reduces the partial pressure of the pumped gases to exceed their saturation vapor pressure (keep them in the vapor phase). It is recommended to use the atmospheric air gas ballast when pumping of non-flammable condensable solvent vapors. When pumping gas vapors of flammable solvents the N2 ballast must be correctly used following the operation manual. It is effective to keep the pump running about one hour after process completion with the gas ballast valve open when pumping condensable gases like water vapor. This helps to remove all traces of water before the pump is turned off. These nitrogen N2 gas ballast adapters for the Ebara EV-A03 pumps have Ebara part number C-2200-002-7200.