Edwards GX100L Dry Vacuum Pump, 62 CFM 200-230V 50/60Hz, 3.75 mtorr. Ultimate Pressure Edwards Part Number A54710958 The Edwards GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. GX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. GX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure GX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote. For more specs and options scroll down to AVAILABLE DOWNLOADS and download datasheet.pdf. These Edwards GX100L dry semiconductor vacuum pump are new and have Edwards part number A547-10-958 (A54710958).

Edwards iGX100L Dry Vacuum Pump, 62 CFM 200-230V 50/60Hz, 3.75 mtorr. Ultimate Pressure Edwards Part Number A54610958 The Edwards iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote. For more specs and options scroll down to AVAILABLE DOWNLOADS and download datasheet.pdf. These Edwards iGX100L dry semiconductor vacuum pump are new and have Edwards part number A546-10-958 (A54610958).

Edwards iGX100M Dry Vacuum Pump, 62 CFM 200-230V 50/60Hz, 3.75 mtorr. Ultimate Pressure Edwards Part Number A54612958 The Edwards iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote. For more specs and options scroll down to AVAILABLE DOWNLOADS and download datasheet.pdf. These Edwards iGX100M dry semiconductor vacuum pump are new and have Edwards part number A546-12-958 (A54612958).

NEW Edwards iGX100M Dry Vacuum Pump, 62 CFM 380-460V 50/60Hz, 3.75 mtorr. Ultimate Pressure Edwards Part Number A54612959 The Edwards iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. iGX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote. For more specs and options scroll down to AVAILABLE DOWNLOADS and download datasheet.pdf. These Edwards iGX100M dry semiconductor vacuum pump are new and have Edwards part number A54612959 (A546-12-959).

Edwards GX, iGX, iXH, iXM, and iXL Pump Display Terminal, 5Way, XLR Plug, Hand Held Key Pad Display Module. Edwards Part Number: D37280700 Edwards GX, iGX, iXH, IXM, and iXL Pump Display Terminal 5 Way XLR Plug. Hand held display for Edwards GX, iGX and iXL120 Series Dry Pump Systems with 5 way XLR connection. Edwards Vacuum Part Number D37280700.

Edwards GXS Wet Process Silencer Rear-Horizontal Mounting Kitt This kit does Not include the M58808162 silencer assembly, only the mounting kit.This is an Edwards GXS Silencer rear-horizontal Mounting Kit. It comes with everything needed to mount an Edwards GXS Wet Process silencer, horizontally, on the rear of GXS model pumps. Fits only Edwards silencer model number M58808162.

Edwards GX & iGX Pump Electrical Plug Input Power Connection Kit, 3-Phase Power, D37370833 This is the Edwards GX & iGX Pump Electrical Plug Input Power Connection Kit, 3-Phase Power, Edwards Vacuum Part Number D37370833.

New Edwards iGX Dry Pumping System Exhaust enclosure kit check valve for process (N and M) Edwards PN A507-44-000, A50744000 This is a check valve kit for the outlet of the exhaust which prevents the suck-back of exhaust vapors after the Edwards iGX Dry Pumping system is shutdown. The check-valve also provides additional attenuation of the pulses in exhaust pressure, for process N and M. Includes Exhaust Check Valve, Elbow, Trapped O Rings, Clamps and Insulation Jackets, for Edwards iGX Dry Pumps N and M models,

Edwards GXS Pump Wet Process Exhaust Silencer There are two types of Silencer used to reduce noise coming from GXS pumping systems: Wet Process Exhaust Silencer and Dry process Exhaust Silencer. This is a Wet Process Exhaust silencer that is made with Painted Carbon Steel and designed to hold liquid or particulates that may be produced during pump processing. The Wet Process Silencer is to be mounted horizontally whereas the Dry process silencers are to be mounted vertically. The silencer can be drained without disassembly and must be cleaned if there is a depreciation in pump performance. It may be mounted in a side or rear position. Link to installation kit for the silencer: P108231

Edwards SPI Micro TIM ModuleD37360310SPI Micro TIM module provides Edwards SPI tool interface for dry pumps with a Micro TIM slot. A SPI Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The SPI Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series Also for use on multi pump systems with a System Controller. Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards MCM Micro TIM ModuleD37360320MCM MicroTIM module provides Edwards MCM tool interface for dry pumps with a MicroTIM slot. A MCM Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using a parallel digital interface. The MCM Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series GXS Series(MCM Version only) CXS Series(MCM version only) Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. For example a pump may be upgraded from an iH to an iHs without changing the interface module. The MCM Micro TIM has AUC compatibility with GXS and CXS series pumps. Equivalent to iH iTIM D37422000 - MCM. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards TEL Micro TIM ModuleD37360330TEL Micro TIM module provides Edwards TEL tool interface for dry pumps with a Micro TIM slot. A TEL Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The TEL Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series Also for use on multi pump systems with a System Controller. Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards Semi E73 Micro TIM ModuleD37360340Semi E73 Micro TIM module provides Semi E73 compliant tool interface for dry pumps with a MicroTIM slot. A Semi E73 Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The Semi E73 Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series Also for use on multi pump systems with a System Controller. Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards LAM Alliance Micro TIM ModuleD37360350LAM Alliance MicroTIM provides a tool interface to LAM Alliance platforms for dry pumps with a MicroTIM slot. A LAM Alliance Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The LAM Alliance Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series Also for use on multi pump systems with a System Controller. Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards Novellus C3 Micro TIM ModuleD37360360Novellus C3 Micro TIM provides a tool interface to Novellus C3 platforms for dry pumps with a MicroTIM slot. A Novellus C3 Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The Novellus C3 Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series Also for use on multi pump systems with a System Controller. Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards Hitachi Micro TIM ModuleD37360370Hitachi MicroTIM provides Hitachi tool interface for dry pumps with a MicroTIM slot. A Hitachi Micro TIM module may be used to provide control and monitoring of a variety of Edwards pumps by your Process Tool, using the parallel digital interface. The Hitachi Micro TIM is compatible with the following Edwards pumps. EPX Series iGX Series GX Series iXH Series iXL Series Also for use on multi pump systems with a System Controller. Where these modules already exist they may be utilized to provide control and monitoring of the pump by your Process Tool or other control equipment. Check the Micro TIM or iTIM manuals.pdf in our downloads section to the left for parallel connection input and compatibility information.

Edwards EMO Cable for Installing A New-Style iXL or iXH Series Dry Semiconductor Pump On A Tool With Existing Old-Style iH Series Pumps. Ideal Vacuum supplies our own interface cable, which allows replacement of an older style iH series pump with the style IXL120N, iXH100, or iXH610. This EMO cabling is useful for applications where a semiconductor tool has multiple old style iH pumps attached in the sub fab. This interface module cable continues the EMO circuit across the remaining old-style iH pumps and through the new style iXL120N replacement pump. The connections and different interface modules are described in detail below. This cable is typically connected from P2 (output) of iTIM on left side iH, to Emergency Stop (EMS) connector on iXL120N, to J1 (input) of iTIM on right side iH pump (see details in our Application Note in pdf format). The issue is that the Edwards iH series pumps are now discontinued and no longer available. Ideal Vacuum stocks the replacement pumps, iXL120N for load lock, iXH100 (replaces iH80), iXH610 (replaces iH600), and so on. The new iXL120N pump does not have an EMO button on the front like the old style IH pumps (see details in our Application Note). The Edwards iTIM was often configured with older style Edwards iH series dry semiconductor vacuum pumps where multiple pumps are connected to a single semiconductor tool in the sub-fab. The EMO cabling is set up to shut down the tool if an EMO is pressed on any of the iH series pumps, they are typically cabled in series, in a daisy chain configuration.