Agilent Varian Turbo-V 1001 Turbomolecular Vacuum Pump, ISO-200K Inlet Flange, Pumping Speed 950 L/S. Cooling Kit Required, Agilent Varian Part Number 9698931. These Agilent Varian Turbo-V 1001 turbomolecular high-vacuum pumps have an ISO-200K inlet flange, an ultimate pressure of 1x10-8 Torr (which is limited by outgassing from the rubber O-ring seal in the intake ISO centering ring), and have an Agilent Varian part number 9698931. The Conflat version, with all metal-sealed conflat intake gasket, are true ultra-high vacuum pumps having an ultimate pressure as low as 1x10-10 Torr when used correctly. The Turbo-V 1001 turbo pumps have a maximize performance at minimum cost and size, with a pumping speed of 950 l/s of nitrogen (N2). We recommend a primary pump size as small as 14 CFM (e.g., IDP-15 dry scroll or DS402 rotary vane vacuum pumps) which can be used to operate the Turbo V 1001 in all its pumping profiles. The Turbo-V 1001 are compound pumps which include the MacroTorr drag stage technology to achieve the high-compression ratios for light gases and maximize the throughput of the pump. By definition, the Navigator version of the Turbo-V 1001 has the turbo pump controller locally mounted below the turbo pump, the Navigator controller part number is 9698978. However, when the Turbo-V 1001 is powered instead by its rack-mount controller, it is not called a Navigator, it is simply called a Turbo V 1001 turbo pump. The rack-mount controller has Agilent part number X3501-64003. Agilent Varian Turbo-V 1001 Navigators (with below pump mounted controller) are often integrated into many analytical instrumentation applications, including Electron Microscopy (SEM, TEM), Focused Ion-beam Systems (FIB) and Surface Analysis Modern focused-beam systems such as SEM’s, TEM’s and FIB’s utilize columns that project electrons or ions onto microscopic samples for detailed analysis. These Agilent Varian Turbo-V 1001 Navigator turbo pumps are a key component in modern focused-beam systems because they offer fast, oil-free air evacuation of large sample chambers (oil-free operation is a key requirement of many modern analysis applications such as semiconductor manufacturing). Agilent Varian Turbo-V 1001 Features:High compression ratios for light gases enabling operation at low base pressure Hydrocarbon free for clean vacuum system Remote controller allows operation from 100 m away Installation in any position allows easy integration Maintenance-free bearings for zero operating cost Ready for wireless control via Vacuum Link app for pump operation on the go Radiation and magnetic field-proof design No embedded electronics allows operation in demanding magnetic field and radiation environments Low electromagnetic emission guarantees no interferences with application process Low vibration and noise levels for zero impact on the system Agilent Varian Turbo-V 1001 Specifications:Ambient Operating Temperature: +5 to +35 °C Ambient Storage Temperature: -20 to +70 °C Base Pressure: 1x10-8 Torr (limited by ISO O-ring seal) Compression Ratio H2: 1 x 10^6 FlangeType: Conflat CF 10 Inch Foreline Flange Size: KF 40 NW Maximum Gas Throughput - Ar, Water Cooling: 7.5 mbar L/s; 444 sccm Maximum Gas Throughput - N2, Water Cooling: 10 mbar L/s; 592 sccm Noise Level: 45 dB(A) Nominal Rotation Speed: 38 KRPM Operating Position: Any Pumping Speed - H2: 900 L/s (ISO-200 Inlet flange) Pumping Speed - He: 870 L/s (ISO-200 Inlet flange) Pumping Speed - N2: 950 L/s (ISO-200 Inlet flange) Recommended Forepump Capacity: 15 m³/h Start Up Time: < 4 min Weight: 21.2 kg

Agilent Varian Turbo-V 1001 Turbomolecular Vacuum Pump, Conflat CF 10 Inch Inlet Flange, Pumping Speed 950 L/S. Cooling Kit Required, Agilent Varian Part Number 9698932. These Agilent Varian Turbo-V 1001 turbomolecular high-vacuum pumps have a Conflat 10 inch inlet flange, an ultimate pressure of 1x10-10 Torr, and Agilent Varian part number 9698932. The Turbo-V 1001 turbo pumps have a maximize performance at minimum cost and size, with a pumping speed of 950 l/s of nitrogen (N2). We recommend a primary pump size as small as 14 CFM (e.g., IDP-15 dry scroll or DS402 rotary vane vacuum pumps) which can be used to operate the Turbo V 1001 in all its pumping profiles. The Turbo-V 1001 are compound pumps which include the MacroTorr drag stage technology to achieve the high-compression ratios for light gases and maximize the throughput of the pump. The Agilent Varian Turbo-V 1001 turbo pumps, with conflat intake, are true ultra-high vacuum (UHV) pumps having an ultimate pressure as low as 1x10-10 Torr when used correctly, for example, the Conflat versions of these pumps allow the intake flange to be baked up to 120 degrees Celsius. By definition, the Navigator version of the Turbo-V 1001 has the turbo pump controller locally mounted below the turbo pump, the Navigator controller part number is 9698978. However, when the Turbo-V 1001 is powered instead by its rack-mount controller, it is not called a Navigator, it is simply called a Turbo V 1001 turbo pump. The rack-mount controller has Agilent part number X3501-64003. Agilent Varian Turbo-V 1001 Navigators (with below pump mounted controller) are often integrated into many analytical instrumentation applications, including Electron Microscopy (SEM, TEM), Focused Ion-beam Systems (FIB) and Surface Analysis Modern focused-beam systems such as SEM’s, TEM’s and FIB’s utilize columns that project electrons or ions onto microscopic samples for detailed analysis. These Agilent Varian Turbo-V 1001 Navigator turbo pumps are a key component in modern focused-beam systems because they offer fast, oil-free air evacuation of large sample chambers (oil-free operation is a key requirement of many modern analysis applications such as semiconductor manufacturing). Agilent Varian Turbo-V 1001 Features:High compression ratios for light gases enabling operation at low base pressure Hydrocarbon free for clean vacuum system Remote controller allows operation from 100 m away Installation in any position allows easy integration Maintenance-free bearings for zero operating cost Ready for wireless control via Vacuum Link app for pump operation on the go Radiation- and magnetic field-proof design No embedded electronics allows operation in demanding magnetic field and radiation environments Low electromagnetic emission guarantees no interferences with application process Low vibration and noise levels for zero impact on the system Agilent Varian Turbo-V 1001 Specifications:Ambient Operating Temperature: +5 to +35 °C Ambient Storage Temperature: -20 to +70 °C Base Pressure: <1 x 10-10 Torr Compression Ratio H2: 1 x 10^6 FlangeType: Conflat 10 Inch Foreline Flange Size: KF 40 NW Maximum Gas Throughput - Ar, Water Cooling: 7.5 mbar L/s; 444 sccm Maximum Gas Throughput - N2, Water Cooling: 10 mbar L/s; 592 sccm Noise Level: 45 dB(A) Nominal Rotation Speed: 38 KRPM Operating Position: Any Pumping Speed - H2: 900 L/s (CF 10 Inch flange) Pumping Speed - He: 870 L/s (CF 10 Inch flange) Pumping Speed - N2: 950 L/s (CF 10 Inch flange) Recommended Forepump Capacity: 15 m³/h Start Up Time: < 4 min Weight: 21.2 kg

Agilent Varian Turbo-V 1001 Rack-Mount Controller For Turbo-V 1001 Turbo Pumps. Agilent Varian Part Number PN: X3501-64003. The Agilent Varian Turbo-V 1001 rack-mount controllers can power the Turbo-V 1001 turbo molecular pumps, its cooling fan, and its vent valve. These Agilent Varian TV1001 rack-mount turbo pump controllers can operate on 100, 120, 220, or 240 volts AC input power. A manually operated input voltage selector is integrated into the rack mount controller power supply input (see photo below). A flat-head screwdriver can be used to pop out the voltage selector box, rotate the voltage selector to the desired input voltage, and re-insert. The Agilent Varian TV1001 rack-mount turbo pump controllers also incorporate auxiliary power connectors (1 Amp max output) for powering the cooling fan and vent valve devices. These auxiliary connectors are located in the upper right-hand corner on back side of controller (see figure below). Warning, these auxiliary power connectors are not to be used to power the roughing pump, 1 Amp maximum output! The turbo pump to controller cable is integral being built into the Turbo-V 1001 rack-mount controller and is standard 10 foot length. A P1 connector on the back side of the rack-mount controller handles interlock an other logic (see photo below). A P1 interlock-jumped connector is provided with each new Turbo-V 1001 rack-mount controller and this connector must be in place to by-pass the interlock and allow the pump to start after installation.All optional accessories, pumps, controllers, and different configurations are available from us at Ideal Vacuum. The user’s manual and Agilent Varian Turbo-V 1001 rack-mount controller catalog brochure sections are available for download in PDF format below.

Agilent Varian TV 1001 Navigator Onboard Controller for Turbo-V 1001 Turbo Pumps. Agilent Varian Part Number 9698978. The Agilent Varian TV 1001 Navigator controller is designed to mount below or on the side and provide power for the Turbo-V 1001 turbo molecular pump, its cooling fan, and its vent valve. These Agilent Varian TV 1001 Navigator controllers are built to automatically operate on any input voltage between 100 to 240 VAC. The Agilent Varian TV 1001 Navigator turbo pump controllers also incorporate auxiliary 24 VDC power connectors for powering the cooling fan and vent valve devices through ports P4 and P3 respectively (see photos). The turbo pump to controller cable isattached to the TV 1001 Navigator controller and is 1 foot long. The J1 connector on the side of the Navigator controller handles interlock and other logic. A mating J1 interlock-jumped connector is provided with each new TV 1001 Navigator controller and this mating connector must be in place to close the interlock circuit and allow the pump to start after installation. The J2 serial port on the Turbo V 1001 Navigator controller can be used to communicate with the turbo system using Agilent Varian A-Plus software (see optional accessories below).All optional accessories, pumps, controllers, and different configurations are available from Ideal Vacuum. The user’s manual and brochure are available in the downloads.

Varian Agilent AC Main Power Cable NEMA Plug, For Turbo Pump Controllers, 3 Meters. Agilent Varian Part Number PN: 9699958. This Agilent turbomolecular vacuum pump AC main power cable has a NEMA 5-15 plug wall outlet connection and works with most Agilent turbo pump controllers. It is 3 meters long, has Agilent Varian part number 9699958, and works with the following turbo pump models:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Pump Inlet Screen, For Large TwisTorr and Turbo-V Pumps With ISO-200 or Conflat CF 10 Inch Inlet Flange. Agilent Varian Part Number PN: 969-9316. These Agilent Varian inlet screens are designed to protect the large TwisTorr FS and Turbo-V turbo molecular vacuum pumps with ISO-200 or CF 10 inch intake flanges. The inlet screen (splinter guard) is a small accessory that is often overlooked but a very important part of a vacuum system. It is used to protect the turbo from small objects or debris that may fall or be sucked into the rotor. These turbo intake splinter shields help protect the pump from foreign objects and have Agilent Varian part number is 9699316.Works With Agilent TwisTorr and Turbo-V Turbo Pump Models: TwisTorr 804 FS Turbo-V 1001

Agilent Varian Fan Air Cooling Kit For Large TwisTorr and Turbo-V Turbomolecular Pumps With Local Navigator Controller. Agilent Varian Part Number PN: 9699297. These Agilent Varian TwistTorr and Turbo-V air cooling fan kits are designed to work with the local Navigator (bottom or side pump mounted) controllers and have Agilent Varian part number 9699297. These kits include the air cooling fan, power cable to connect the cooling fan to 24 VDC supply on the Navigator controller through a P4 connector, and bottom of pump mounting style bracketing. This is very important when ordering, there are two different air cooling fan kits for the Agilent Varian large TwistTorr and Turbo-V turbo molecular pumps: one is designed to work with the remote Rack-Mount controller where the cooling fan operates on 115 VAC. The other which is being sold here, is designed to work with the bottom or side mounted local Naviagator controller operating on 24VDC (see middle graphic to the side) . Works With Agilent TwisTorr Navigator Controller Powered Turbo Pump Models: TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Fan Air Cooling Kit for Agilent Large TwisTorr and Turbo-V Turbomolecular Pumps with Remote Rack Mount Controller, X3501-68016, X3501-64003. This is an air fan cooling kit for Agilent TwisTorr FS 404, 704, 804 and Turbo-V 1001 turbomolecular vacuum pumps. It mounts to the base of the pump, and provides radial cooling to the pump. It connects to the round J3 FAN connector on the back of rack mounted X3501-68016 or X3501-64003 turbo pump controllers. This fan air cooling kit has an attached 20 ft. long cable and includes all necessary mounting hardware. This is a direct replacement for the Agilent X3501-68001 fan air cooling kit. Compatible with these Agilent Turbomolecular Pump Models: TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001 Compatible with these Rack Mount Agilent Turbomolecular Pump Controller Models: X3501-68016 X3501-64003 This fan kit is not compatible with Agilent Onboard Navigator Turbo Pump Controllers. We offer fan cooling kits for onboard controllers, as well as the complete line of Agilent Turbo pumps and accessories in other listings. Please see the downloads for more information about pumps and controllers.

Agilent Varian Turbo-V 1001 Turbo Pump Air Cooling Kit for V1000 HT Rack-Mount Controller 120VAC, PN 9699315 ONLY Connects to Controllers V 1000HT Rack Controller 110VAC PN 9699554, NOT the V 1001 Rack Controller. These Agilent Varian air cooling fan kits are designed to work with the V 1000HT rack-mount controllers. These kits include the air cooling fan, power cable to connect the cooling fan to 120 VAC supply on the auxiliary power J6 connectors (1 Amp max output) on back side of V1000HT rack-mount controller, and bottom of pump mounting style bracketing. This is very important when ordering! There are two different air cooling fan kits for the Agilent Varian Turbo-V 1001 turbo molecular pumps: This unit is designed to work with the Rack-Mount V1000 HT controller which is being sold here where the cooling fan operates on 120 VAC. The other is designed to work with the bottom or side mounted Navigator V1001 controller where the cooling fan operates on 24 VDC having Agilent Varian part number 9699297. These are different products and care must be taken when order a system from individual components.

Agilent Varian Turbo Water Cooling Kit With Metal Hose Barbs, Fits Most Agilent Turbo Molecular Pumps Designed For 6x8 mm Tubing Size, Agilent Varian Part Number PN: 9699337 These metal water cooling kits are designed to provide water cooling of Agilent Varian TwisTorr 305 FS, 750 FS, and 850 FS turbomolecular vacuum pumps. They are designed to allow easy connection to 6 mm I.D. x 8 mm O.D. plastic hose, e.g., high quality Polyurethane (PUR), and have Agilent Varian part number PN 9699337.Fits most Agilent Varian turbo pumps, including models:TwisTorr 305 FS TwisTorr 305 IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Tubro-V 1001

Agilent Varian Turbo Water Cooling Kit With Plastic Hose Fittings, Fits Most Agilent Turbo Molecular Pumps. For 4 mm I.D. x 6 mm O.D. Plastic Hose, Agilent Varian Part Number PN: 9699347. These plastic tubing water cooling kits are designed to provide water cooling of Agilent Varian TwisTorr 305 FS, 750 FS, and 850 FS turbomolecular vacuum pumps. They are designed to allow easy connection to 4 mm I.D. x 6 mm O.D. plastic hose, and have Agilent Varian part number PN 9699347.Fits most Agilent Varian turbo pumps, including models: TwisTorr 305 FS TwisTorr 305 IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent A-Plus Software FREE Download and 3m Long Serial Cable, Interfaces All Agilent Turbos and Turbo Systems to a PC, Formerly T-Plus. Agilent Part Number: 9699883 The Agilent A-Plus software, formerly T-Plus turbo pump control software, and the LabVIEW driver pack can now be downloaded for free from Ideal Vacuum (see free download links below). The downloads include both 32 and 64 bit versions. This listing is for the sale of the Agilent OEM 3 meter long, DB9, male-to-female serial cable that is needed to connect the turbo or turbo system to a PC when using the A-Plus software. Agilent Technologies A-Plus software is a user friendly communication, control, and monitoring application for Agilent Varian turbomolecular pumps and all the other Agilent products that use the Agilent Windows serial protocol. A-Plus software can simultaneously control and drive one or more turbo pumps connected to a PC through an RS232 or an RS485 serial communication port. If the PC has no serial port, a serial to USB cable is available (part number P104165). A-Plus software includes auto recognition of connected pumps and displays the behavior of each connected pump. Descriptions of each command are always present on screen for ease of use. A-Plus software includes options such as data logging, chart representation and network configuration in order to help you quickly configure vacuum devices and to check the vacuum system status at any time. Exhaustive online help is included in the software package. This 3 meter long Agilent cable for A-Plus software has part number 9699883. Agilent A-Plus Software Works with these Pump Models (and others): TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS Varian TPS-Compact Varian TPS-MiniTask

RS232 Serial to USB Adapter Cable for Agilent Varian T-Plus Software when Computer has NO Serial Port. 3 ft. This 3 foot long RS232 to USB adapter cable allows the Agilent Varian T-plus turbo pumps to be controlled from a remote computer that has a USB port, but no serial port. T-Plus software requires a serial connection. For PC''s that do not have an RS232 or RS485 serial comm port but only a USB 2 connection port, this cable allows you to connect a T-plus turbo pump to a USB 2 port and have the same T-Plus software functions as if you had a serial comm port on your PC.

Agilent Varian Turbo Vent Flange Replacement, KF-10 Vacuum Flange With M8x1.2, Fits Most Agilent Turbomolecular Vacuum PumpsAgilent Varian Part Number PN: 9699108 These Agilent Varian turbo pump vent flanges are designed to work with most Agilent turbomolecular vacuum pumps. They have KF-10 vacuum flange with M8 x 1.2 thread and Agilent Varian part number PN: 969-9108.Works with the following Agilent Varian turbo pumps:TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Vent Valve, Normally Open (N.O.), 1.2 mm Orifice, For TwisTorr or Turbo-V (Integrated Controller or Onboard Navigator) Turbo Pumps. Agilent Varian Part Number PN: 9699834. These Agilent Varian vent valves are designed for the TwisTorr FS and Turbo-V (with Integrated Controller or Onboard Navigator) turbo pumps. An adapter is also required so that the vent valve can get power and logic from the integrated controllers, the required adapter has Agilent Varian part number X3514-68001 (see center photograph). These Agilent Varian turbo pump vent valve kits have 1.2 mm orifice, are normally open (N.O.), and are closed when the turbo controller is powered on. In the event that power is lost this vent valve will open and start introducing air into the turbo at a rate that will bring it to a safe stop. This helps extend the life of the turbo by limiting the amount of time it spends while passing through resonant frequecies, which are hard on the pump’s bearings (you can hear the pump actually get louder when it passes through these resonances). Venting after power loss is also important to prevent backstreaming from the backing pump, if vacuum is left on the turbo after power failure oils or debrises from the backing pump could be sucked back into the turbo pump. We recommend a vent valve and or a roughing line normally closed (N.C.) isolation valve to protect the turbo during power failure. This kit includes the hardware needed to mount to the side of a the Agilent Varian turbo pump. We also sell a vent valve extension cable 5 meters for these 305-IC vent valves, Agilent Varian part number 9699949, which would be used to control venting by logic from a local tool or laboratory instrument. Please see the available instruction manuals in our PDF download section below.Works with the following Agilent Varian turbo pumps:TwisTorr 305-IC TwisTorr 404 FS Onboard Navigator TwisTorr 704 FS Onboard Navigator TwisTorr 804 FS Onboard Navigator Turbo-V 1001 Onboard Navigator

Agilent Varian Turbo Pump Vent Valve Kit, Delayed Vent, Normally Open (N.O.), 1.2 mm Orifice, For TwisTorr and Turbo-V Rack-Mount Controllers. Agilent Varian Part Number PN: X3501-68002. These Agilent Varian turbo pump vent valve kits have 1.2 mm orifice, M8 x 1.2 mm threaded, has a 5 meter cable length, are normally open (N.O.), and are closed when the turbo controller is powered on. In the event that power is lost this vent valve will open and start introducing air into the turbo at a rate that will bring it to a safe stop. This helps extend the life of the turbo by limiting the amount of time it spends while passing through resonant frequecies, which are hard on the pump''s bearings (you can hear the pump actually get louder when it passes through these resonances). Venting after power loss is also important to prevent backstreaming from the backing pump, if vacuum is left on the turbo after power failure oils or debrises from the backing pump could be sucked back into the turbo pump. We recommend a vent valve and or a roughing line normally closed (N.C.) isolation valve to protect the turbo during power failure. This kit includes the hardware needed to mount to the side of a the Agilent Varian turbo pump. It is designed to plug into the back side of the Agilent Varian rack-mount turbo pump controller, see J4 PURGE VENT in center photograph, and have Agilent Varian Part Number X3501-68002. Please see the available instruction manuals in our PDF download section Below. Works with the following Agilent Varian turbo pumps:TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 10 SCCM KF-16 x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 969-9239. These Agilent Varian turbo purge valves have a fixed 10 SCCM flow rate, a KF-16 flanged gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9239.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 10 SCCM 1/4 Swagelok x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699240. These Agilent Varian turbo purge valves have a fixed 10 SCCM flow rate, a 1/4 Swagelok gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9240.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 20 SCCM KF-16 x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699241. These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, a KF-16 gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9241.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 20 SCCM 1/4 Swagelok x M12, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699242. These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, a 1/4 Swagelok gas supply fitting, and are designed to work with most medium sized turbomolecular vacuum pumps which have an M12 vent port thread. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9242.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 10 SCCM has 7/16 and 1/4 Swagelok Fittings, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699232. These Agilent Varian turbo purge valves have a fixed 10 SCCM flow rate, has 7/16 and 1/4 Swagelok gas supply fittings, and are designed to insert into the purge gas supply line of most medium sized turbomolecular vacuum pumps. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9232.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001

Agilent Varian Turbo Purge Valve, 20 SCCM has 7/16 and 1/4 Swagelok Fittings, Fits Most Medium Sized Agilent Turbomolecular Vacuum Pumps. Agilent Varian Part Number PN: 9699236. These Agilent Varian turbo purge valves have a fixed 20 SCCM flow rate, has 7/16 and 1/4 Swagelok gas supply fittings, and are designed to insert into the purge gas supply line of most medium sized turbomolecular vacuum pumps. Please see the second and third photos of the vent port and cartoon showing installation, instructions are also shown in the TwisTorr 305 FS manual on page 247. The gas purge valve is a protection device to protect the pump bearings against particulate and corrosive gases that could move into the pump. Every valve is made with a thin calibrate sapphire orifice mounted into a cartridge to provide a precise small leak rate, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. Each version of the valve is suited for a particular application: - the Small leak (~ 10 sccm at 1000 mbar) for mild corrosive operation when the partial pressure of the corrosive gas is maximum 10-5 mbar (analytical instruments, ion implanters); - the Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations (etching, CVD), when the partial pressure of the corrosive gas is >10-5 mbar. If you wish to use a different flowrate, you might change the supply pressure. For a given supply pressure, the gas purge valve can give you a fixed flowrate value. Please note that the flow amount does not depend on the vacuum side pressure of the valve. These turbo purge valves have Agilent Varian part number PN 969-9236.Works with the following Agilent Varian turbo pumps:TwisTorr 74 FS TwisTorr 84 FS TwisTorr 305 FS TwisTorr 305-IC TwisTorr 404 FS TwisTorr 704 FS TwisTorr 804 FS Turbo-V 1001