Leybold TURBOVAC 1350i Turbo Vacuum Pump with ISO-K 200 Inlet, 1350 l/s Pumping Speed, Water Cooled. Leybold Part Number: 850092V1000. These Leybold TURBOVAC 1350i turbomolecular high-vacuum pumps have a pumping speed up to 1350 liters per second (l/s) for Helium, with an ISO-K 200 inlet flange, an ISO KF-40 exhaust foreline flange, and are water cooled. These1350i turbo pumps require 48 VDC input power at a maximum of 800 Watts and have an integrated controller. All TURBOVAC i-series turbo pumps include a compact standard interface with RS485, USB and Digital I/O interfaces with 3 status LED’s and the possibility to control one accessory (Valves, Relay box...). All that is needed is a power supply, start/stop logic, and a water source for water cooling. Power supply is sold separately. These 1350i pumps have Leybold part number 850092V1000. Leybold TURBOVAC 1350i Specifications: Part Number: 850092V1000 Inlet Flange: ISO-K 200 Base Pressure: 7.5 x 10-9 mbar (5.6 x 10-9 Torr) Operating Speed: 42000 RPM Operating Position: From Vertical (right-side up) to Horizontal Pumping Speed: 1350 l/s Cooling: Water Exhaust Flange: KF-40 Operating Voltages: 48 VDC Maximum Power: 800 Watts Compact Standard Interface with RS485, USB and Digital I/O One accessory port Recommended Roughing Pump:Trivac D16B or ScrollVac SC18 Leybold TURBOVAC 1350i turbo pumps with ISO-K or ISO-F flanges are true ultra-high vacuum (UHV) pumps with an ultimate pressure into the 10-9 Torr range. Ultimate pressure is limited by permeation and outgassing of rubber/elastomer O-ring seals and other factors. You can choose to power the pump from your instrument’s auxillary power source or purchase the Leybold TURBO.POWER 800 integra power supply. The TURBO.POWER 800 integra is a local power supply only, which is mounted to the bottom of the turbo pump. The Leybold TURBOVAC i-series pumps, with the TURBO.POWER 800 integra power supply mounted under the pump, is a compact, low-cost, high-vacuum pumping solution that is often integrated into many analytical instrumentation applications, including Electron Microscopy (SEM, TEM) and Focused Ion-beam Systems (FIB). Designed to offer maximum performance, the Leybold TURBOVAC i-Series turbomolecular vacuum pumps feature a cutting-edge rotor and drag-stage design which provide unparalleled speed, especially for light gases. A wide selection of interface options, housing and flange configurations as well as accessories completes this product line. The unique oil-free hybrid bearing system with maintenance-free ball bearings will boost your productivity and reduce cost of ownership. With a light gas pumping speed of up to 60% above current reference products and compression values around 100 times higher than previous generation products, they are especially suitable for operation with small backing pumps. Your benefits: a considerably smaller vacuum system, lower initial and operating costs along with a more compact footprint. Performance: Industry-leading pumping speed for light gases (up to 60% higher than existing products) Optimized rotor diameter to provide maximum pumping performance Flexibility: Vacuum port design flexibility Rotatable fore-vacuum port Onboard turbo controller Only requires power along with start/stop logic Compact design with optional TURBO.POWER 800 integra power supply Installation, operation and control: Integrated 48V DC drive electronics to avoid expensive cabling Widest range of communication interfaces: USB, RS485, and remote 15 pin digital I/O as standard options Highly efficient motor Thermal isolation by design for optimized cooling of bearing and improved pump lifetime Innovative shaft support system reduces vibration Maintenance free upper passive magnetic bearing Oil free, lifetime lubricated, lower mechanical ceramic ball bearing is field-replaceable The Leybold TURBOVAC i-series turbo pumps are plug and play. They are simple and easy to install, operate and control, thanks to their flexible product design, integrated electronics, and a wide range of communication interfaces. They offer superior reliability due to an innovative pump design and the unique oil-free hybrid bearing concept with maintenance-free ball bearings available in the market today. The innovative shaft support system reduces vibration, noise, mechanical stress, and alleviates potential negative impact on vibration sensitive applications. Optimized cooling of the bearings is ensured through thermal isolation and a highly efficient motor. The pump is also equipped with a purge port to protect the bearings from critical gases and particles. As a result, the up-time and lifespan of the pump as well as your productivity are increased considerably. In combination with low costs of ownership, your vacuum system will be more efficient than ever. Typical Turbo Pump Applications include: General clean pumping applications Scanning Electron Microscopes - SEM Beam lines and high energy physics Mass Spectrometry Electron Microscopy Sample Preparation Research and Development High Energy Physics Industrial Semiconductor Coatings Surface Science Instruments The operating instructions manual and Leybold i-series TURBOVAC product brochures are available in the downloads.

Leybold TURBO.CONTROL i Display Unit And Remote User Interface For All TURBOVAC i-Series Turbo Pumps. Leybold Part Number PN: 800100V0004. The Leybold TURBO.CONTROL i remote user-interface has a display & front soft keys to allow monitoring and control of all TURBOVAC i-series turbo pumps. These i-Series pumps are operation ready, having a fully functional built-in controller. The TURBO.CONTROL i can issue start & stop along with read & write parameters to the i-series turbo pump’s integrated controller by either RS 485 (maximum cable length 30 meters) or USB (maximum cable length 5 meters). This unit can only operate one pump at a time and requires an external 24 VDC AC/DC adapter providing 1.5 Amps (sold separately). They can be rack mounted or placed on the benchtop with the optional tabletop housing. The Leybold TURBO.CONTROL i remote user-interface also includes an integrated networking communication port (RJ-45). Operations can be carried out via the pre-installed webserver software. A local area network (LAN) computer can be used through the Ethernet to access the unit’s independent webserver with any common web browser. All turbo pump parameters can then be easily viewed and adjusted by PC or mobile device. The Leybold TURBO.CONTROL i unit has ports for the connection of up to two vacuum pressure gauge sensors. They are compatible with the Leybold THERMOVAC and PENNINGVAC series vacuum pressure gauge sensors. The connected gauge sensors are Plug and Play, they are automatically recognized, and can be configured to user selectable pressure units (Torr, Pascal, and Mbar) along with a selectable gas correction factor. Compatible Vacuum Gauge Sensors: PTR 90 PENNINGVAC Pirani & Cold Cathode Ionization Gauge PTR 90N PENNINGVAC Pirani & Cold Cathode Ionization Gauge TTR 91 Thermovac MEMS-Pirani Vacuum Transducer TTR 91N Thermovac MEMS-Pirani Vacuum Transducer TTR 101 Thermovac Pirani & Capacitance Gauge TTR 101N Thermovac Pirani & Capacitance Gauge The Leybold TURBO.CONTROL i creates and saves a log file that the operator can easily view with our free DataViewer PC software, available in the Downloads section. This software is intuitive, with simple operating menus, allowing the user to quickly access real-time turbo pump status data along with the key parameters recorded in its event log files. TURBO.CONTROL i Interface Functions: Monitor TURBOVAC pump during operation Read and write parameters Issue pump start, stop, and standby commands Observe pump’s speed, current, and bearing temperature View warnings, error messages, and descriptions Set functions of the 24-VDC accessory connections X201, X202, X203 Activate TURBOVAC based on pressure Attach laptop and operate TURBOVAC pump via web server View logged data in real-time Read out log memory and analyze with data viewer PC tool Read out parameter set and error memory of the turbo pump with a PC The Leybold TURBO.CONTROL i is compatible with all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This TURBO.CONTROL i Display unit has Leybold part number 800100V0004.

Leybold 24 VDC, 1.5A Plug In Power Supply for TURBO.CONTROL i Display Unit, 110-240 AC with Universal Adapters. Leybold Part Number: 800110V0027. This is the correct 24 VDC, 1.5A, center-positive power supply for the Leybold TURBO.CONTROL i Display Unit. Input is 110-240VAC and the power supply comes with a set of universal input plug adapters for most countries. TheTURBO.CONTROL i Display Unit is compatible with these TURBOVAC pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This 24 VDC 1.5A power supply for the TURBO.CONTROL i Display Unit has Leybold part number 800110V0027.

Leybold Table Top Housing for TURBO.CONTROL i Display Unit, Used with TURBOVAC Pumps. Leybold Part Number: 800110V0028. This table top display housing is a perfect compliment to the Leybold TURBO.CONTROL i Display Unit (part number P109168). It allows the display unit to be safely placed on a benchtop for easy access and use. Communication between the TURBOVAC pump and TURBO.CONTROL i display unit requires an RS485 serial cable that can be up to 30m in length (1m cable part number P1011242, 5m cable part number P1012476). The TURBO.CONTROL i Display Unit is compatible with these TURBOVAC pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This table top housing for the TURBO.CONTROL i Display unit has Leybold part number 800110V0028.

Leybold RS485 Serial Communication Cable, 1 m, for Connecting TURBO.CONTROL i Display Unit to any TURBOVAC Turbo Pump. Leybold Part Number: 800103V0027. This is the RS485 serial cable which allows the TURBO.CONTROL i Display Unit to communicate with any TURBOVAC i series turbo pump. This cable is 1m long. The Leybold TURBO.CONTROL i is compatible with all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This 1m long RS485 serial communication cable has Leybold part number 800103V0027.

Leybold RS485 Serial Communication Cable, 5 m, for Connecting TURBO.CONTROL i Display Unit to any TURBOVAC Turbo Pump. Leybold Part Number: 800103V0029. This is the RS485 serial cable which allows the TURBO.CONTROL i Display Unit to communicate with any TURBOVAC i series turbo pump. This cable is 5m long. The Leybold TURBO.CONTROL i is compatible with all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This 3m long RS485 serial communication cable has Leybold part number 800103V0029.

Leybold TURBO.POWER 800 Power Supply for large TURBOVAC i Series Turbo Pumps. Leybold Part Number: 800100V0010. This Leybold TURBO.POWER 800 is an 800 Watt power supply providing 48 VDC output at a maximum of 17.1 Amps and is designed to power the TURBOVAC i series pump models: 850i, 950i, 1350i, and 1450i. It supplies 48 VDC clean fused power from a 100-240 VAC input source (power cable part number P108678 is required). The TURBO.POWER 800 can be fitted to the pump or used as a benchtop unit. To mount the TURBO.POWER 800 to the side of the turbo pump, an adaptor mounting kit is required (part number P1012449). It could alternatively be used as a remote benchtop power supply. When using the power supply away from the pump, a longer interconnecting power cable is needed. A 3-meter cable (part number P1012450) and 5-meter cable (part number P1012477) are available. This TURBO.POWER 800 power supply has Leybold part number 800100V0010. The Leybold TURBO.POWER 800 power supply is compatible with these pumps: TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i

Leybold Input Power Cord/Mains Cable for TURBO.POWER 800 Power Supply, 2.5m long, US 115 VAC. Leybold Part Number: 411340V03. This is a Leybold power cord (mains cable), 115 VAC, 2.5m long, special for the TURBO.POWER 800 power supply. It has a 4 pin screw lock plug which connects to the TURBO.POWER 800 on one end and a US plug 5-15P on the other.This OEM power cord is for: TURBO.POWER 800 power supply This Leybold 2.5 meter long input power cord has Leybold part number 411340V03.

IVP Input Power Cord/Mains Cable for Leybold TURBO.POWER 800 Power Supply, 2.5m long, US 5-15 Plug, Input 115 VAC., Output 48 VDC. This is a Ideal Vacuum Products power cord (mains cable), 115 VAC, 2.5m long, special for the Leybold TURBO.POWER 800 power supply. It has a 4 pin screw lock plug which connects to the TURBO.POWER 800 on one end and a US plug 5-15P on the other. Guaranteed to meet or exceed OEM specifications.

IVP Input Power Cord/Mains Cable for Leybold TURBO.POWER 800 Power Supply, US 240 VAC 5-15P Plug, 2.5m Long. This is an IVP power cord (mains cable), 240 VAC, 2.5m long, special for Leybold TURBO.POWER 800 power supply. It has a 4 pin screw lock plug which connects to the Leybold TURBO.POWER 800 power supply on one end, and a US plug 5-15P on the other. This IVP power cord is for: Leybold TURBO.POWER 800 power supply

Leybold 3m Power Supply Extension Cable, connects TURBO.POWER 800 Power Supply to larger TURBOVAC turbo Pumps, 3m Long. Leybold Part Number: 800096V0303. This Leybold extension power supply cable connects between the TURBOVAC turbo pump and the TURBO.POWER 800 power supply. It is used on TURBOVAC 850i, 950i 1350i and 1450i turbo pumps when the TURBO.POWER 800 power supply is used remotely from the pump on a table or bench top. The larger TURBOVAC pumps have a 1 meter long permanently attached power cable. This 3 meter extension cable has 3-pole Hastings connectors on either end, and increases the overall length of the pump-to-power supply cable to 4 meters. This Leybold extension cable is compatible with the TURBO.POWER 800 power supply and these TURBOVAC i series turbo pumps: TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This 3 meter long extension power cable has Leybold part number 800096V0303.

Leybold 5m Power Supply Extension Cable, connects TURBO.POWER 800 Power Supply to larger TURBOVAC Turbo Pumps, 3m Long. Leybold Part Number: 800096V0503. This Leybold extension power supply cable connects between the TURBOVAC turbo pump and the TURBO.POWER 800 power supply. It is used on TURBOVAC 850i, 950i 1350i and 1450i turbo pumps when the TURBO.POWER 800 power supply is used remotely from the pump on a table or bench top. The larger TURBOVAC pumps have a 1 meter long permanently attached power cable. This 5 meter extension cable has 3-pole Hastings connectors on either end, and increases the overall length of the pump-to-power supply cable to 6 meters. This Leybold extension cable is compatible with the TURBO.POWER 800 power supply and these TURBOVAC i series turbo pumps: TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This 5 meter long extension power cable has Leybold part number 800096V0503.

Leybold Mounting Kit Adapts TURBO.POWER Integra Power Supply to TURBOVAC 850i-1450i Turbo Pumps. Leybold Part Number: 800100V0110. This adaptive mounting kit is required for the TURBO.POWER 800 Power Supply to be mounted to the side of TURBOVAC 850i, 950i, 1350i, or 1450i turbo pumps. Mounting hardware is included. The radial air cooling unit for the 850i and 950i turbo pumps (part number P1012451) can be used in combination with this mounting kit. This mounting kit has Leybold part number 800100V0110. This mounting kit is used on these pumps: TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i

Leybold Fine Centering Ring Inlet Screen (0.8 mm), Splinter Guard, fits TURBOVAC 950i, 1350i with ISO-K DN 200 Flange. Leybold Part Number: 800133V0042. This Leybold fine screened centering ring (0.8 mm mesh) is used to filter the vacuum flow and keep objects from being sucked into the TURBOVAC turbo pump. This screen has a flange size of ISO-K DN 200. Depending on the gas used, some pump speed reduction will occur when using this screen. This screen fits: TURBOVAC 950i with ISO-K 200 inlet, Leybold pump part number: 840091V1000 TURBOVAC 1350i with ISO-K 200 inlet, Leybold pump part number: 850092V1000 This fine screen centering ring has Leybold part number 800133V0042.

Leybold Coarse Centering Ring Inlet Screen (3.2 mm), Splinter Guard, fits TURBOVAC 950i, 1350i with ISO-K DN 200 Flange. Leybold Part Number: 800133V0041. This Leybold coarse screened centering ring (3.2 mm mesh) is used to filter the vacuum flow and keep objects from being sucked into the TURBOVAC turbo pump. This screen has a flange size of ISO-K DN 200. Depending on the gas used, some pump speed reduction will occur when using this screen. This screen fits: TURBOVAC 950i with ISO-K 200 inlet, Leybold pump part number: 840091V1000 TURBOVAC 1350i with ISO-K 200 inlet, Leybold pump part number: 850092V1000 This coarse screen centering ring has Leybold part number 800133V0041.

Leybold Start/Stop Switch for all TURBOVAC i Series Turbo Pumps. Leybold Part Number: 800110V0021. This Leybold start/stop switch fits all TURBOVAC i series turbo pumps including 90i, 250i, 350i, 450i, 850i, 950i, 1350i, and 1450i. It attaches directly to the pump’s remote 15 pin HD (X1) connector and allows the operator to manually switch the pump from run to standby. This start/stop switch fits: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i This start/stop switch has Leybold part number 800110V0021.

Leybold USB 2.0 Cable, Type A/B, Connects TURBO.CONTROL i Display Unit to any TURBOVAC i Series Turbo Pump, 1.8m Long. Leybold Part Number: 800110V0108. This USB cable connects any TURBOVAC i series turbo pump to the TURBO.CONTROL i Display Unit (part number P109168). This is a USB 2.0 type A/B cable and is 1.8m long. Through the USB interface, the TURBO.CONTROL i can issue start & stop along with read & write parameters to the i-series turbo pump’s integrated controller. This USB cable has Leybold part number 800110V0108. The Leybold TURBO.CONTROL i is compatible with all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i

Leybold Venting Valve for any TURBOVAC i Series Turbo Pump, 24 VDC, NC, G 1/8 in Connector. Leybold Part Number: 800120V0012. This Leybold venting valve can be installed in any TURBOVAC i series turbo pump in the VENT port. This is a normally closed (NC) valve and operates at 24 VDC. It is plumbed into the G 1/8" (BSPP) VENT port, and powered by the 24 VDC (X201) accessory port. This venting valve vents the pump and the forevacuum line when the pump is switched off and thus keeps oil vapor from diffusing back from the forevacuum line. A choke nozzle in the vent port ensures that the pump is not vented too fast. The maximum permissible pressure in the pump must not exceed 1.4 bar (abs.). Use the TURBO.CONTROL i display unit (part number P109168) to set the correct parameters for this valve. See the Serial Interface download for instructions. This normally closed Leybold venting valve has part number 800120V0012. This Leybold venting valve fits all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i

Leybold Purge Gas Valve for any TURBOVAC i Series Turbo Pump, 24 VDC,24 sccm, G 1/8 in. Connector. Leybold Part Number: 800120V0013. This Leybold purge gas valve can be installed in any TURBOVAC i series turbo pump in the PURGE port. This valve operates at 24 VDC and throttles gas inlet to 24 sccm. It is plumbed into the G 1/8" (BSPP) PURGE port, and powered by the 24 VDC (X201) accessory port. Use the TURBO.CONTROL i display unit (part number P109168) to set the correct parameters for this valve. See the Serial Interface download for instructions. This Leybold purge gas valve has part number 800120V0013. This Leybold purge gas valve fits all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i

Leybold Power Failure Venting Valve for any TURBOVAC i Series Turbo Pump, 24 VDC, Normally Open, G 1/8 in. Connector. Leybold Part Number: 800120V0022. This Leybold venting valve can be installed in any TURBOVAC i series turbo pump in the VENT port. This is a normally open (NO) valve and operates at 24 VDC. It is plumbed into the G 1/8" (BSPP) accessory port, and powered by the 24 VDC (X201) accessory port. When a power failure occurs, this valve closes and vents the pump and the forevacuum line and thus keeps oil vapor from diffusing back from the forevacuum line. A choke nozzle in the vent port ensures that the pump is not vented too fast. The maximum permissible pressure in the pump must not exceed 1.4 bar (abs.). Use the TURBO.CONTROL i display unit (part number P109168) to set the correct parameters for this valve. See the Serial Interface download for instructions. This normally open Leybold power failure venting valve has part number 800120V0022. This Leybold power failure venting valve fits all TURBOVAC i-series turbo pumps: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i

Leybold Purge Gas Throttle for any TURBOVAC i Series Turbo Pump, 24 sccm, G 1/8 in. Connector. Leybold Part Number: 800120V0014. This Leybold purge gas throttle is installed onto the G 1/8" (BSPP) inlet of the venting valve (part number P1012442), or the power failure venting valve (part number P1012443). It throttles gas input through the valve to 24 sccm. This purge gas throttle can be used on any TURBOVAC i series turbo pump with a valve plumbed to the turbo pump’s VENT port. Use the TURBO.CONTROL i display unit (part number P109168) to set the correct parameters for the valve. See the Serial Interface download for instructions. This Leybold purge gas valve has part number 800120V0014. This Leybold purge gas throttle fits all TURBOVAC i series turbo pumps with a vent valve: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i

Leybold Air Filter for Venting Valves on any TURBOVAC i Series Pump, G 1/8 in. Connector. Leybold Part Number: 800110V0022. This Leybold air filter can be installed onto the G 1/8" (BSPP) inlet of the venting valve (part number P1012442), the power failure venting valve (part number P1012443) or the purge gas throttle (part number P1012444). This air filter helps keep dirt and dust from entering the pump when the valve is actuated. This air filter can be used on any TURBOVAC i series turbo pump with a valve plumbed to the VENT port. Use the TURBO.CONTROL i display unit (part number P109168) to set the correct parameters for the valve. See the Serial Interface download for instructions. This Leybold air filter has part number 800110V0022. This Leybold air filter fits all TURBOVAC i series turbo pumps with a vent valve: TURBOVAC 90i TURBOVAC 250i TURBOVAC 350i TURBOVAC 450i TURBOVAC 850i TURBOVAC 950i TURBOVAC 1350i TURBOVAC 1450i