Ideal Vacuum 3-Position UHV Pneumatic Operated Gate Valve, Throttled 3rd position, With Solenoid and Reed Sensors, 24VDC, CF 10.0 Inch (DN CF200) Flange, Viton O-ring Standard Seal, 1x10-10 mbar, SUS304 Body, 50,000 cycles CF 10.0 inch Bolt Down Flange with 5/16-24 UNF Threads This Ideal Vacuum 3-Position Throttle Gate Valve is pneumatically operated with a Conflat CF 10.0 inch (DN CF200) flange. It has a 3rd position that can be set to partially open. It is rated for ultra-high vacuum (UHV) and comes with a standard Viton O-ring seal for the gate and Viton O-ring or OFHC copper gasket for the bonnet with a pneumatic controlled solenoid valve. The valves have a typical life of 50,000 cycles before needing service. They are made with corrosion resistant 304 stainless-steel gates and valve bodies. This 3-position control provides flexibility and precision in maintaining optimal conditions for various vacuum deposition processes, particularly in thin films deposition process chamber systems. Application in Physical Vapor Deposition Coating Chambers This 3-position gate valve is designed for dependable High and Ultra- High Vacuum (UHV) applications and are often used in combination with cryo, turbo, and ion high vacuum pumps. It has found increased usage in throttled vacuum processes like PVD magnetron sputtering deposition. In a PVD coating chamber, such as in sputtering systems, a 3-position gate valve is often used to control the connection between the turbo-molecular pump and the main process chamber. These gate valves allow for precise control of the vacuum system and can isolate the pump, protect the chamber, and adjust the pumping speed. The three positions of a typical 3-position gate valve are:1. Fully Open Position: Maximum conductance, full turbo pumping speed, used for initial evacuation or when maintaining high vacuum during deposition.2. Partially Open (Throttling Position): Purpose: In the partially open position, the gate valve is only partially open, throttling the conductance between the chamber and the turbo pump.Throttling is important when working with reactive gases (e.g., oxygen or nitrogen in reactive sputtering) or when you need to fine-tune the pressure for optimal film growth. This partially open position is manually set and adjusted one time during installation and can be changed anytime to run a different process condition. 3. Fully Closed Position: Purpose: In the fully closed position, the gate valve completely isolates the turbo pump from the main chamber. Use Case: This position is used to protect the turbo pump during processes like chamber venting, load-lock chamber sample loading, or when the chamber is being exposed to atmospheric pressure. It prevents contaminants or atmospheric air from entering the turbo pump, which could damage it. Specifications: Specifications and features: Material Body SUS304 Carriage Linkage type - SUS304 Ball type Size under 10” - SUS304 Ball type Size above 10”(included) - SUS304, A6061-T6 Gate Linkage type - SUS304 Ball type Size under 10” - SUS304 Ball type Size above 10”(included) - A6061-T6 Bellows AM350 Life Cycle HV :DN200 - 300,000 cycles UHV :DN200 - 50,000 cycles Helium leak rates at 1 atm differential <2×10-9 mbar·l /sec for O-ring <5×10-10 mbar·l /sec for gasket seal Bake Temperature Open - 200 °C Viton bonnet seal Closed - 150 °C Viton bonnet seal Pressure Range (mbar) HV: 1x10-8 ~ 1000 UHV: 1x10-10 ~1000 Maximum delta P (mbar) < 30 before opening Standard Seal Gate - Viton O-ring Bonnet - Viton O-ring or OFHC copper gasket Actuator - Pneumatic Compressed air supply Tube connection - 6mm Pressure range - 4-6 Kg/cm2(overpressure) Surface Treatment - Scotch Polished Options Position indicator Pneumatic control solenoid valve Roughing port Other material Gate O-ring seal Please see the downloads for more information on this gate valve and other related valve configurations.

Ideal Vacuum 3-Position HV Pneumatic Operated Gate Valve, Throttled 3rd position, With Solenoid and Reed Sensors, 24VDC, ISO-F 200 (DN 200) Flange, Viton O-ring Standard Seal, 1x10-8 Torr, SUS304 Body, 300,000 cycles This Ideal Vacuum 3-Position Throttle Gate Valve is pneumatically operated with a ISO-F 200 (DN CF200) flange. It has a 3rd position that can be set to partially open. It is rated for high vacuum (HV) and comes with a standard Viton O-ring seal for the gate and Viton O-ring or OFHC copper gasket for the bonnet with a pneumatic controlled solenoid valve. This ISO-F flanged gate valve use Viton O-rings for the bellows and bonnet plate seals and are therefore limited to high-vacuum (HV) applications with ultimate pressures down to 1x10-8 Torr. The valves have a typical life of 300,000 cycles before needing service. They are made with corrosion resistant 304 stainless-steel gates and valve bodies. This 3-position control provides flexibility and precision in maintaining optimal conditions for various vacuum deposition processes, particularly in thin films deposition process chamber systems. Application in Physical Vapor Deposition Coating Chambers This 3-position gate valve is designed for dependable high vacuum applications and are often used in combination with cryo, turbo, and ion high vacuum pumps. It has found increased usage in throttled vacuum processes like PVD magnetron sputtering deposition. In a PVD coating chamber, such as in sputtering systems, a 3-position gate valve is often used to control the connection between the turbo-molecular pump and the main process chamber. These gate valves allow for precise control of the vacuum system and can isolate the pump, protect the chamber, and adjust the pumping speed. The three positions of a typical 3-position gate valve are:1. Fully Open Position: Maximum conductance, full turbo pumping speed, used for initial evacuation or when maintaining high vacuum during deposition.2. Partially Open (Throttling Position): Purpose: In the partially open position, the gate valve is only partially open, throttling the conductance between the chamber and the turbo pump.Throttling is important when working with reactive gases (e.g., oxygen or nitrogen in reactive sputtering) or when you need to fine-tune the pressure for optimal film growth. This partially open position is manually set and adjusted one time during installation and can be changed anytime to run a different process condition. 3. Fully Closed Position: Purpose: In the fully closed position, the gate valve completely isolates the turbo pump from the main chamber. Use Case: This position is used to protect the turbo pump during processes like chamber venting, load-lock chamber sample loading, or when the chamber is being exposed to atmospheric pressure. It prevents contaminants or atmospheric air from entering the turbo pump, which could damage it. Specifications: Specifications and features: Material Body SUS304 Carriage Linkage type - SUS304 Ball type Size under 10” - SUS304 Ball type Size above 10”(included) - SUS304, A6061-T6 Gate Linkage type - SUS304 Ball type Size under 10” - SUS304 Ball type Size above 10”(included) - A6061-T6 Bellows AM350 Life Cycle HV :DN200 - 300,000 cycles UHV :DN200 - 50,000 cycles Helium leak rates at 1 atm differential <2×10-9 mbar·l /sec for O-ring <5×10-10 mbar·l /sec for gasket seal Bake Temperature Open - 200 °C Viton bonnet seal Closed - 150 °C Viton bonnet seal Pressure Range (mbar) HV: 1x10-8 ~ 1000 UHV: 1x10-10 ~1000 Maximum delta P (mbar) < 30 before opening Standard Seal Gate - Viton O-ring Bonnet - Viton O-ring or OFHC copper gasket Actuator - Pneumatic Compressed air supply Tube connection - 6mm Pressure range - 4-6 Kg/cm2(overpressure) Surface Treatment - Scotch Polished Options Position indicator Pneumatic control solenoid valve Roughing port Other material Gate O-ring seal Please see the downloads for more information on this gate valve and other related valve configurations.