Home >

Vacuum Pumps >

Diffusion Vacuum Pumps >

New Agilent Varian Diffusion Pumps and Parts >

VHS 6 Diffusion Pumps >

Agilent Varian VHS-6 & VHS-250 Foreline Baffle Assembly, Diffusion Pump Replacement Parts PN L9172301

Load

Agilent Varian VHS-6 & VHS-250 Foreline Baffle Assembly, Diffusion Pump Replacement Parts PN L9172301

Condition:

New

Part Number:

P106811

Warranty:

Full Manufacturer's Warranty

Out of Stock

Sale: $330.01

Expecting 1
Anticipated Arrival 1 on 2025-01-10

Currency: US Dollar (USD)

Description

Agilent Varian VHS-6 & VHS-250 Foreline Baffle Assembly, Diffusion Pump Replacement Parts
Agilent Varian Part Number L9172301

These Agilent Varian VHS-6 & VHS-250 diffusion pump replacement foreline baffle assemblies are OEM Agilent Varian replacement parts with part number L9172301. The foreline baffle is located in the roughing line exhaust arm of the diffusion pump. They are designed to help prevent diffusion pump oil from being transported to the roughing pump under high throughput conditions. See the VHS-6 diffusion pump roughing line arm noted by balloon #6 in the illustration below.

Downloads

Agilent Varian VHS4 VHS6 & VHS250 Diffusion Vacuum Pumps.pdf

0.84 MB, PDF

Agilent Diffusion Pumps Catalog.pdf

PDF

Brochure

Specifications
Specification	Value
Pumping Speed, Operating Range	1500 l/s air, 1,930 l/s He/H₂
Maximum Pumping Speed	2,400 l/s air w/standard cold cap; 950 w/extended cold cap
Maximum Throughput	2.4 T-l/s (3.2 mbar-l/s) in operating range, 3.5 T-l/s (4.5 mbar-l/s) @ 0.01 Torr
Operating Range	1.5x10⁻³ to < 5x10⁻⁹ Torr (2.10 x 10⁻³ < 6.5 x 10⁻⁹ mbar)
Maximum Forepressure	No Load: 0.65 Torr (0.85 mbar) Full Load: 0.55 Torr (0.72 mbar)
Recommended Backing Pump	≥ 17 cfm (29 m³/hr)
Backstreaming Rate	< 5x10⁻⁴ mg/cm²/min (with standard cold cap)
Warmup Time	10 minutes
Cooldown Time	10 minutes (with quick cool coil)
Fluid Charge	500 cc - exact fluid charge available
Electrical Requirements	1 ph, 50/60 Hz, 120/208/240 VAC
Pump Power	2,200 Watts
Cooling Water Requirements	0.25 gpm (50 l/h) at 60-80 °F (15-26 °C)
Water Connections	⅛ in. FPT Tee

VHS-6 Diffusion Pump Replacement Parts List

Description	Part No.	Item
Standard Cold Cap Assembly	86488301	1
Extended Cold Cap Assembly	F6455001	2
Sight Glass Repair Kit consisting of:	L8908301	3
Sight Glass	L8816001	5.1
Gasket, Teflon	L9694001	5.1
O-ring, Viton, Parker No. 2-113	CommI	5.1
O-ring, Viton, Parker No. 2-226	CommI	5.1
Jet Assembly	F3365301	4
Splash Baffle	F4780301	5
Foreline Baffle Assembly	L9172301	6
Thermal Switch Includes:	L8912301	7
Switch (set at 300 °F – 147 °C)	642906025	7a
Lug	648056680	7b
Wire	656179100	5.1
Box Insulator	89867001	7d
Heaters (one heater required per pump)		8
120 V / 2200 watt Heater Element	647306125	5.1
208 V / 2200 watt Heater Element	647306175	5.1
240 V / 2200 watt Heater Assembly	647306225	5.1
VHS-4 heater wire, 10 AWG, 24 inches (3 per pump required)	X3901-68001	9
Lugs, Replacement, nickel	648056680	10
Heater Clamping Plate	86086301	11
Heater Insulation	86087001	12
Baffle Retaining Ring	699992156	13
O-Ring Kit includes:	K0377184	14
3 Butyl inlet flange O-ring, Parker No. 2-258		5.1
10 Viton fill and drain O-rings (old style), Parker No. 2-112		5.1
10 Viton fill and drain O-rings (new style, Parker No. 2-113		5.1
1 Sight glass O-ring, Parker No. 2-226		5.1
1 PTFE gasket		5.1
Screw, Rd hd machine, no. 8-32x31/416, stainless steel	Screw	15
Stud, no. 8-32 x 1/2, stainless steel	Stud	16
Screw, Socket hd cap, no. 8-32x11/44, stainless steel	Screw	17
Centering ring for ISO inlet flange, 160K	IC160SV	18
Centering ring for ISO foreline flange, KF40	KC40SV	19
Santovac 5 diffusion pump fluid, 500 cc	695405005
Installation and Operation Manual	699901021