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HS-2 확산 펌프용 Agilent Varian 반사경. PN 82917301

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HS-2 확산 펌프용 Agilent Varian 반사경. PN 82917301

상태:

새로운

부품 번호:

P106763

보증:

Varian Warranty

지금 이용 가능 1

판매: ₩861,161.74

통화: South Korean Won (KRW)

설명

Agilent Varian HS-2 확산 펌프, 반사경
Agilent Varian 부품 번호 82917301

교체용 반사경 입니다. Agilent Varian HS-2 확산 펌프에 적합합니다.

0.47 MB, PDF

PDF

Specifications
Specification	Value
Optimum Operating Range	2x10⁻³ Torr (2.7 mbar) to < 5x10⁻⁸ Torr (6.7 mbar)
Maximum Pumping Speed	285 l/s, Air
Maximum Throughput (Air), Max.	0.5 Torr l/s (.67 mbar)
Maximum Forepressure	No Load 5.5 x 1010⁻± (.73 mbar) Full Load 4.0 x 1010⁻± (.53 mbar)
Backstreaming Rate at Pump Inlet	1x10⁻³ mg/cm2/min (with cold cap)
Power Requiered (Approximately)	450 Watts
Warmup Time	15 minutes
Cooldown Time	Less than 5 minutes to break jet Less than 10 minutes to vent pump
Fluid Charge	100 cc All conventional and high performance pump fluids
Cooling Water Requirements	0.1 gpm at 60° °F (15.6 ° °C to 26.7 ° °C) Inlet temperature
Backing Pump Size	5 cfm or larger for optimum throughput

HS-2 Diffusion Pump Replacement Parts List

Description	Part No.	Item
Heaters (one heater required per pump)		1
120 V / 450 watt Heater Assembly	647302125	5.1
240 V / 450 watt Heater Assembly	647302150	5.1
Heater Block	82920001	2
Heater Platen	82918301	3
Jet Assembly	F0310301	4
Top Cap		5
Cold Cap Assembly	F0600301	6
Teflon Button	F0597001	7
Butly O-ring Kit, Parker 2-238 for 2in DP	K0377159	8
Foreline Baffle	84166301	9
Baffle Retaining Ring	660156010	10
Heater Clip	648018010	11
2-56 x 1/8 R.H.M.S. SS	Standard	12
#4-40 x 3/16 Rd. Hd. MS Ni-Plated	Standard	13
10-32 Hex Hd. SS	648018010	14
1/4 - 20 x 13/8, Hex. Hd. Cap Screw/Lock Washer SS	Standard	15
Reflector	82917301	16
Santovac 5 diffusion pump fluid, 100 cc	P102288