关键词 零件号:
销售: NT$14,788.15
Specifications | |
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Specification | Value |
Pumping Speed, Operating Range | 3,650 l/s air, 4,560 l/s He/H₂ |
Maximum Pumping Speed | 5,300 l/s air w/standard cold cap; 4,200 w/extended cold cap |
Maximum Throughput | 6.3 T-l/s (8.4 mbar-l/s) in operating range, 7.5 T-l/s (10.0 mbar-l/s) @ 0.01 Torr |
Operating Range | 1.7x10⁻³ to < 5x10⁻⁹ Torr at 4,400 W. (2.3 x 10⁻³ to < 6.5 x 10⁻⁹ mbar) |
Maximum Forepressure | No Load: 0.65 Torr (0.85 mbar) Full Load: 0.55 Torr (0.72 mbar) |
Recommended Backing Pump | ≥ 30 cfm (51 m³/hr) |
Backstreaming Rate | < 5x10⁻⁴ mg/cm²/min (with standard cold cap) |
Warmup Time | 15 minutes |
Cooldown Time | 25 minutes (with quick cool coil) |
Fluid Charge | 1,000 cc |
Electrical Requirements | 3 ph, 50/60 Hz, 208/240/380/480 VAC |
Pump Power | 4,400 Watts |
Cooling Water Requirements | 0.40 gpm (80 l/h) |
Water Connections | ⅛ in. FPT Tee |
Description | Part No. | Item |
---|---|---|
Standard Cold Cap Assembly | F0429301 | 1 |
Extended Cold Cap Assembly | L8917301 | 2 |
Sight Glass Repair Kit consisting of: | L8908301 | 3 |
Sight Glass | L8816001 | 5.1 |
Gasket, Teflon | L9694001 | 5.1 |
O-ring, Viton, Parker No. 2-113 | CommI | 5.1 |
O-ring, Viton, Parker No. 2-226 | CommI | 5.1 |
Jet Assembly | F0428401 | 4 |
Jet Coupling | L6367301 | 5 |
Splash Baffle | F0431301 | 6 |
Foreline Baffle Assembly | F0435301 | 7 |
Thermal Switch Includes: | L8912301 | 8 |
Switch (set at 300 °F – 147 °C) | 642906025 | 8a |
Lug | 648056680 | 8b |
Wire | 656179100 | 8c |
Box Insulator | 89867001 | 8d |
Heater wire, 10 AWG, 42 inches (3 per pump required) | X3901-68003 | 9 |
Heater Wiring Kit, Includes: | L8913301 | 9 |
15 ft. wire | L8913301 | 5.1 |
Nickel lug | 648056680 | 5.1 |
Terminal Strip Molex 39100-1512 | 648091065 | 5.1 |
Heaters (two heaters required per pump) | 10 | |
208 V / 2200 watt Heater Element | 647310140 | 5.1 |
240 V / 2200 watt Heater Element, 1Ph | 647310150 | 5.1 |
380 V / 2200 watt Heater Element | 647310160 | 5.1 |
480 V / 2200 watt Heater Element, wired open Delta, unbalanced load | 647310170 | 5.1 |
208 V / 2550 watt Heater Element | 647310145 | 5.1 |
240 V / 2550 watt Heater Element, 1Ph | 647310155 | 5.1 |
380 V / 2550 watt Heater Element, wired open Delta, unbalanced load | 647310165 | 5.1 |
480 V / 2550 watt Heater Element, wired open Delta, unbalanced load | 647310175 | 5.1 |
Heater Crush Plate (replace when either heater is replaced) | K7667001 | 11 |
Heater Clamping Plate A36 Steel | K4928001 | 12 |
Heater Clamping Plate Retrofit, Slotted | R2667301 | 12 |
Heater Insulation Blanket | L8914001 | 13 |
Heater Cover | L8903301 | 14 |
O-Ring Kit includes: | K0377185 | 15 |
1 inlet flange O-ring, Butyl No. 2-385 | F0430001 | |
1 foreline flange O-ring, Butyl No. 2-338 | 660893338 | |
10 Viton fill and drain O-rings (Old style), Viton No. 2-112 | 5.1 | |
10 Viton fill and drain O-rings (new style, Parker No. 2-113 | 5.1 | |
1 Sight glass O-ring, Parker No. 2-226 | 5.1 | |
1 PTFE gasket | 5.1 | |
Viton Centering ring for ISO inlet flange, 320K | 16 | |
Centering ring for ISO foreline flange ISO-63K | IC063SV | 17 |
Screw, Socket hd cap, no. 8-32x11/44, stainless steel | Screw | 18 |
Centering ring for ISO inlet flange, 160K | IC160SV | 19 |
Centering ring for ISO foreline flange, KF40 | KC40SV | 20 |
Included with the pump: | 5.1 | |
1 inlet flange O-ring, Butyl No. 2-385 | F0430001 | 5.1 |
1 Butyl foreline flange O-ring, Butyl No. 2-338 | 660893338 | 5.1 |
13/8 Hose 1/8 Pipe Barbed Connectors | 264301102 | 5.1 |
5.1 | ||
DC-702 diffusion pump fluid, 500 cc (2 required) | 695472005 | |
DC-704 diffusion pump fluid, 500 cc (2 required) | 695474005 | |
DC-705 diffusion pump fluid, 500 cc (2 required) | 695475005 | |
Installation and Operation Manual | 699901021 |
Availability Of Kit Components 2 Kit: P106982 - Agilent Varian VHS10 扩散泵加热器 208VAC,2200W,10.6A,19.6Ohms,1 个,647310140 |
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Component |
Desc. |
Req'd |
Avail |
Non-Standard |
No Component Description Available On Website | 1 |
17 |
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