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Agilent Varian VHS-10 Diffusion Pump. Std. Cold Cap, 480V, ISO 320K, 14.5 in. OD, 5100W

Condition:
  New
Part Number:
  P106927
Warranty:
  As-Stated*

Out of Stock   

¥2,633,372.31

On Sale: ¥2,212,032.99

Agilent Varian VHS-10 Diffusion Pump. Std. Cold Cap, 480V, ISO 320K, 14.5 in. OD, 5100W 2212032.99
Currency: Japanese Yen (JPY)

Description

Agilent Varian VHS-10 Water Cooled Vacuum Diffusion Pump, ISO 320K Inlet Flange, 14.5 inch OD, Maximum Pumping Speed 5300 l/s
Standard Cold Cap, (2) 480 VAC 2550 Watt Heaters, Agilent Varian.

The Agilent Varian VHS-10 has been designed to fill a special need in applications where high pumping speeds are required and space limitations demand a compact pump. The VHS-10 pump is a rugged, general-purpose unit with an operating range of 1.7 x 10-3 to <5 x 10-9 Torr at 4400W. The Agilent Varian VHS-10 is ideal for applications requiring fast cycling because of its high pumping speed (maximum rated at 5300 l/s with standard cold cap) air combined with high forepressure tolerance (0.65 Torr with no-load and 0.55 Torr when at full gas load). Backstreaming rate of the unit is 5x10-4 mg/cm2/ min, without the use of any cooled cold cap.

This Agilent Varian VHS-10 Diffusion Pump Includes:
  • ISO 320K Inlet Flange (14.5 inch OD Flange, No bolt holes)
  • ISO 63K Outlet Foreline Flange, (3.75 inch OD Flange, No bolt holes)
  • Standard Cold Cap
  • Recommended Roughing Backing Pump: 30 CFM
  • 5300 l/s Maximum Pumping Speed Air
  • 480 VAC 3 ph (5100W) with (2) 2550 Watt Heaters
  • Water Connections 1/8 in. FPT Tee
  • Designed To Be Used With Santovac 5 or IVP 704 Diffusion Pump Oil, 1000cc (1.056 Qt.) full charge
Diffusion pumps use a high-speed jet of vapor to direct gas molecules in the pump throat down into the bottom of the pump and out the outlet. The oil diffusion pump is operated with an oil that has low vapor pressure. Its purpose is to achieve higher vacuum (lower pressure) than possible by use of positive displacement pumps alone. The Agilent Varian VHS-10 can pump down to pressures of <5x10-9 Torr. Diffusion pumps cannot discharge directly into the atmosphere, so a mechanical forepump, roughing pump is typically used to maintain an outlet pressure around 1 mTorr.

These Agilent Varian Diffusion Pumps are very reliable, simple in design and operate with no noise or vibration. Diffusion pumps are still the most economical means for creating high-vacuum pressures. Diffusion pumps also tolerate operating conditions such as excess particles and reactive gases that would destroy other types of high-vacuum pumps. They can be ordered with a 3-phase 208, 240, 380, 480 VAC heater harness and with standard or extended cold cap. We stock and sell Santovac 5 diffusion pump fluids for this pump. Please see below in our “Related” section for additional accessories that may benefit your vacuum applications and maintenance needs. We offer a large variety of vacuum greases, oils, vacuum fittings, hoses, vacuum gauges, sensors/transducers, parts and accessories sold separately on this website.

These Agilent Varian VHS-10 diffusion pumps have ISO 320K inlet flange, operate on 3-phase 480 VAC, standard cold cap and has Agilent Varian part number L5920329. The Agilent Varian VHS-10 diffusion pump user's instruction manuals can be downloaded in PDF format below. These are typical stock items that often ship same day as order is placed.

Brochure

Specifications
Specification Value
Pumping Speed, Operating Range 3,650 l/s air, 4,560 l/s He/H₂
Maximum Pumping Speed 5,300 l/s air w/standard cold cap; 4,200 w/extended cold cap
Maximum Throughput 6.3 T-l/s (8.4 mbar-l/s) in operating range, 7.5 T-l/s (10.0 mbar-l/s) @ 0.01 Torr
Operating Range 1.7x10⁻³ to < 5x10⁻⁹ Torr at 4,400 W. (2.3 x 10⁻³ to < 6.5 x 10⁻⁹ mbar)
Maximum Forepressure No Load: 0.65 Torr (0.85 mbar)
Full Load: 0.55 Torr (0.72 mbar)
Recommended Backing Pump ≥ 30 cfm (51 m³/hr)
Backstreaming Rate < 5x10⁻⁴ mg/cm²/min (with standard cold cap)
Warmup Time 15 minutes
Cooldown Time 25 minutes (with quick cool coil)
Fluid Charge 1,000 cc
Electrical Requirements 3 ph, 50/60 Hz, 208/240/380/480 VAC
Pump Power 4,400 Watts
Cooling Water Requirements 0.40 gpm (80 l/h)
Water Connections ⅛ in. FPT Tee

VHS-10 Diffusion Pump Replacement Parts List

Description Part No. Item
Standard Cold Cap Assembly F0429301 1
Extended Cold Cap Assembly L8917301 2
Sight Glass Repair Kit consisting of: L8908301 3
   Sight Glass L8816001 5.1
   Gasket, Teflon L9694001 5.1
   O-ring, Viton, Parker No. 2-113 CommI 5.1
   O-ring, Viton, Parker No. 2-226 CommI 5.1
Jet Assembly F0428401 4
Jet Coupling L6367301 5
Splash Baffle F0431301 6
Foreline Baffle Assembly F0435301 7
Thermal Switch Includes: L8912301 8
   Switch (set at 300 °F – 147 °C) 642906025 8a
   Lug 648056680 8b
   Wire 656179100 8c
   Box Insulator 89867001 8d
Heater wire, 10 AWG, 42 inches (3 per pump required) X3901-68003 9
Heater Wiring Kit, Includes: L8913301 9
   15 ft. wire L8913301 5.1
   Nickel lug 648056680 5.1
   Terminal Strip Molex 39100-1512 648091065 5.1
Heaters (two heaters required per pump) 10
   208 V / 2200 watt Heater Element 647310140 5.1
   240 V / 2200 watt Heater Element, 1Ph 647310150 5.1
   380 V / 2200 watt Heater Element 647310160 5.1
480 V / 2200 watt Heater Element, wired open Delta, unbalanced load 647310170 5.1
   208 V / 2550 watt Heater Element 647310145 5.1
   240 V / 2550 watt Heater Element, 1Ph 647310155 5.1
   380 V / 2550 watt Heater Element, wired open Delta, unbalanced load 647310165 5.1
480 V / 2550 watt Heater Element, wired open Delta, unbalanced load 647310175 5.1
Heater Crush Plate (replace when either heater is replaced) K7667001 11
Heater Clamping Plate A36 Steel K4928001 12
Heater Clamping Plate Retrofit, Slotted R2667301 12
Heater Insulation Blanket L8914001 13
Heater Cover L8903301 14
O-Ring Kit includes: K0377185 15
   1 inlet flange O-ring, Butyl No. 2-385 F0430001
   1 foreline flange O-ring, Butyl No. 2-338 660893338
   10 Viton fill and drain O-rings (Old style), Viton No. 2-112 5.1
   10 Viton fill and drain O-rings (new style, Parker No. 2-113 5.1
   1 Sight glass O-ring, Parker No. 2-226 5.1
   1 PTFE gasket 5.1
Viton Centering ring for ISO inlet flange, 320K 16
Centering ring for ISO foreline flange ISO-63K IC063SV 17
Screw, Socket hd cap, no. 8-32x11/44, stainless steel Screw 18
Centering ring for ISO inlet flange, 160K IC160SV 19
Centering ring for ISO foreline flange, KF40 KC40SV 20
Included with the pump: 5.1
   1 inlet flange O-ring, Butyl No. 2-385 F0430001 5.1
   1 Butyl foreline flange O-ring, Butyl No. 2-338 660893338 5.1
   13/8 Hose 1/8 Pipe Barbed Connectors 264301102 5.1
5.1
DC-702 diffusion pump fluid, 500 cc (2 required) 695472005
DC-704 diffusion pump fluid, 500 cc (2 required) 695474005
DC-705 diffusion pump fluid, 500 cc (2 required) 695475005
Installation and Operation Manual 699901021
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CONTACT US
Ideal Vacuum Products , LLC
5910 Midway Park Blvd NE
Albuquerque, New Mexico 87109-5805 USA

Phone: (505) 872-0037
Fax: (505) 872-9001
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