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Agilent Varian VHS-10 射流耦合扩散泵替换部件，PN L6367301

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Agilent Varian VHS-10 射流耦合扩散泵替换部件，PN L6367301

健康）状况：

新的

零件号：

P106935

保修单：

Full Manufacturer's Warranty

缺货

销售： NT$20,265.43

货币： New Taiwan Dollar (TWD)

描述

Agilent Varian VHS-10 喷射耦合扩散泵替换部件
安捷伦瓦里安部件号 L6367301

这些 Agilent Varian VHS-10 扩散泵喷射耦合部件是喷射组件的一部分，是 VHS-10 扩散真空泵的 OEM Agilent Varian 替换部件。请参阅下面 PDF 说明手册第 42 页的参考内容。这些是 VHS-10 扩散泵的原装 OEM Agilent Varian 替换零件，零件号为 L6367301，请参阅下面分解图和零件插图中的第 5 项。

下载

安捷伦瓦里安 VHS-10、VHS-400 高真空扩散泵手册.pdf

PDF

安捷伦扩散泵目录.pdf

PDF

宣传册

Specifications
Specification	Value
Pumping Speed, Operating Range	3,650 l/s air, 4,560 l/s He/H₂
Maximum Pumping Speed	5,300 l/s air w/standard cold cap; 4,200 w/extended cold cap
Maximum Throughput	6.3 T-l/s (8.4 mbar-l/s) in operating range, 7.5 T-l/s (10.0 mbar-l/s) @ 0.01 Torr
Operating Range	1.7x10⁻³ to < 5x10⁻⁹ Torr at 4,400 W. (2.3 x 10⁻³ to < 6.5 x 10⁻⁹ mbar)
Maximum Forepressure	No Load: 0.65 Torr (0.85 mbar) Full Load: 0.55 Torr (0.72 mbar)
Recommended Backing Pump	≥ 30 cfm (51 m³/hr)
Backstreaming Rate	< 5x10⁻⁴ mg/cm²/min (with standard cold cap)
Warmup Time	15 minutes
Cooldown Time	25 minutes (with quick cool coil)
Fluid Charge	1,000 cc
Electrical Requirements	3 ph, 50/60 Hz, 208/240/380/480 VAC
Pump Power	4,400 Watts
Cooling Water Requirements	0.40 gpm (80 l/h)
Water Connections	⅛ in. FPT Tee

VHS-10 Diffusion Pump Replacement Parts List

Description	Part No.	Item
Standard Cold Cap Assembly	F0429301	1
Extended Cold Cap Assembly	L8917301	2
Sight Glass Repair Kit consisting of:	L8908301	3
Sight Glass	L8816001	5.1
Gasket, Teflon	L9694001	5.1
O-ring, Viton, Parker No. 2-113	CommI	5.1
O-ring, Viton, Parker No. 2-226	CommI	5.1
Jet Assembly	F0428401	4
Jet Coupling	L6367301	5
Splash Baffle	F0431301	6
Foreline Baffle Assembly	F0435301	7
Thermal Switch Includes:	L8912301	8
Switch (set at 300 °F – 147 °C)	642906025	8a
Lug	648056680	8b
Wire	656179100	8c
Box Insulator	89867001	8d
Heater wire, 10 AWG, 42 inches (3 per pump required)	X3901-68003	9
Heater Wiring Kit, Includes:	L8913301	9
15 ft. wire	L8913301	5.1
Nickel lug	648056680	5.1
Terminal Strip Molex 39100-1512	648091065	5.1
Heaters (two heaters required per pump)		10
208 V / 2200 watt Heater Element	647310140	5.1
240 V / 2200 watt Heater Element, 1Ph	647310150	5.1
380 V / 2200 watt Heater Element	647310160	5.1
480 V / 2200 watt Heater Element, wired open Delta, unbalanced load	647310170	5.1
208 V / 2550 watt Heater Element	647310145	5.1
240 V / 2550 watt Heater Element, 1Ph	647310155	5.1
380 V / 2550 watt Heater Element, wired open Delta, unbalanced load	647310165	5.1
480 V / 2550 watt Heater Element, wired open Delta, unbalanced load	647310175	5.1
Heater Crush Plate (replace when either heater is replaced)	K7667001	11
Heater Clamping Plate A36 Steel	K4928001	12
Heater Clamping Plate Retrofit, Slotted	R2667301	12
Heater Insulation Blanket	L8914001	13
Heater Cover	L8903301	14
O-Ring Kit includes:	K0377185	15
1 inlet flange O-ring, Butyl No. 2-385	F0430001
1 foreline flange O-ring, Butyl No. 2-338	660893338
10 Viton fill and drain O-rings (Old style), Viton No. 2-112		5.1
10 Viton fill and drain O-rings (new style, Parker No. 2-113		5.1
1 Sight glass O-ring, Parker No. 2-226		5.1
1 PTFE gasket		5.1
Viton Centering ring for ISO inlet flange, 320K		16
Centering ring for ISO foreline flange ISO-63K	IC063SV	17
Screw, Socket hd cap, no. 8-32x11/44, stainless steel	Screw	18
Centering ring for ISO inlet flange, 160K	IC160SV	19
Centering ring for ISO foreline flange, KF40	KC40SV	20
Included with the pump:		5.1
1 inlet flange O-ring, Butyl No. 2-385	F0430001	5.1
1 Butyl foreline flange O-ring, Butyl No. 2-338	660893338	5.1
13/8 Hose 1/8 Pipe Barbed Connectors	264301102	5.1
		5.1
DC-702 diffusion pump fluid, 500 cc (2 required)	695472005
DC-704 diffusion pump fluid, 500 cc (2 required)	695474005
DC-705 diffusion pump fluid, 500 cc (2 required)	695475005
Installation and Operation Manual	699901021

Kit Components

Availability Of Kit Components 2 Kit: P106935 - Agilent Varian VHS-10 射流耦合扩散泵替换部件，PN L6367301
Component	Desc.	Req'd	Avail
P107008	Agilent Varian HS-16 喷射耦合扩散泵替换零件，PN L6367301	1	0