Lower Utilities Costs. Typically a 40% saving can be made on utilities costs over an entire fab. Based on a 300mm fab in the US, containing 200 tools, 537 pumps 70% GX pumps, 30% iH pumps
iGX fitted with constant flow water valve
Designed for Energy Efficiency
High performance motors and inverter drives
Low operating power consumption
Lower power standby mode using Active Utility Control (AUC)
Nitrogen dilution can be tuned to the application requirement
Minimizes gas usage
Highly efficient cooling
High conductivity materials and good design enables low water flow
Precision ceramic bearings
Very high load capability for reliability
Low noise and vibration
Ethernet Connectivity
The GX Series includes unique web serving functionality that allows viewing of key parameters through a simple Ethernet connection and browser. Any user can simply connect to the pump to view a range of information, such as: