MBraun Thermal Evaporator, MB Evap S/A, Thin Film Co-Deposition System, Stainless Steel Bell-Jar Chamber, 13 x 17 inch, 4 Thermal Sources and 2 Inficon QCM Thickness Monitors with new Pfeiffer HiPace 300 Turbo Pump, Refurbished

This refurbished Mbraun Evap S/A vacuum coating chamber (2012 manufactured year) is equiped with a brand new HiPace 300 turbo pump and a brand new Edwards 12 rotary roughing pump. The tool is in excellent working condition. The interior of the chamber has been grit blasted to remove all possible contaminants from previous usage. The tool is suitable for thermal evaporation of high melting point metals and dielectrics like gold, titanium, and oxides. It has a stainless steel bell-jar chamber that is 13" diameter x 17" height. The maximum evaporation throw distance is 10" with substrate holder rotation, it can be increased to 12" with no substrate rotation assembly, suitable for lift-off metal deposition. The substrate holder can take a maximum of 4" x 4" sample sizes with rotation during deposition or 6" x 6" samples with no rotation. The chamber has 4 thermal evaporation sources that have a loading capacity of about 1 cc each.

This MBraun Thermal Evaporator it is equipped with many features, including a new custom made 4-inch rotary substrate holder. It has 2 Inficon QCM sensors, and two new quartz crystals installed, an Inficon SQC-310C co-deposition controller with manual and auto process modes. The deposition process can be sequential or co-deposition. Other features include a 6" viewport to observe the coating progress, pneumatic source and substrate shutters, fail safe mechanisms, an optical safety curtain, visual and audio status indicators in form alarms.